대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1987년도 전기.전자공학 학술대회 논문집(I)
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- Pages.549-552
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- 1987
CAPACITANCE 증가를 위한 STACKED FILM의 전기적 특성 연구
ELECTRICAL CHARACTERISTICS OF STACKED FILM TO INCREASE CAPACITANCE
- Choi, Jong-Wan (SAMSUNG SEMICONDUCTOR LABORATORY) ;
- Yu, Jae-An (SAMSUNG SEMICONDUCTOR LABORATORY) ;
- Choi, Jin-Seog (SAMSUNG SEMICONDUCTOR LABORATORY) ;
- Rhieu, Ji-Hyo (SAMSUNG SEMICONDUCTOR LABORATORY) ;
- Song, Sung-Hae (SAMSUNG SEMICONDUCTOR LABORATORY)
- 발행 : 1987.07.03
초록
TO INCREASE THE CELL CAPACITANCE Of SMALL GEOMETRY DRAMS. HIGH DIELECTRIC MATERIAL HAS BEEN USED RECENTLY. THE PURPOSE Of THIS WORK IS TO INVESTIGATE THE STRUCTURAL AND ELECTRICAL CHARACTERISTICS Of SiO2/Si3N4/SiO2 STACKED FILM UTILIZING HIGH DIELECTRIC MATERIAL Si3N4(
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