Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1987.07a
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- Pages.536-538
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- 1987
CO2 Laser Assisted Recrystallization of Polysilicon Island
CO2 레이저 열처리에 의한 다결정 실리콘 Island의 재결정화
- Oh, Min-Rok (Dept.of Elec. Eng., Sogang University) ;
- An, Chul (Dept.of Elec. Eng., Sogang University)
- Published : 1987.07.03
Abstract
The recrystallization of polysilicon layer deposited on Si was attemped by means of C02 laser annealing. The polysilicon layer was defined in small island patterns (
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