Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1987.07a
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- Pages.532-535
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- 1987
A study of Solid Phase Epitaxial Regrowth of Silicon using Laser Interferometry
Laser Interferometry를 이용한 Solid Phase Epitaxial Regrowth에 관한 연구
- Park, Se-Geun (Gold Star Semiconductor, INC.) ;
- Walser, R.M. (Department of C & E Engineering The University of Texas at Austin)
- 박세근 ;
- Published : 1987.07.03
Abstract
A laser interferometry of very high spatial resolution was built to study the solid phase epitaxial regrowth of furnace-annealed silicon wafers. As boron concentration increases up to
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