Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1987.07a
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- Pages.416-419
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- 1987
A study on the Bird's Beak-reduced LOCOS isolation by adding polysilicon
폴리 실리콘을 첨가하여 LOCOS 구조를 개량한 경우 소자분리 특성에 관한 연구
- Kim, Byeong-Yeol (SST R&D Center) ;
- Ryu, Hyeon-Gi (SST R&D Center) ;
- Park, Moon-Jin (SST R&D Center) ;
- Choi, Soo-Han (SST R&D Center) ;
- Song, Sung-Hae (SST R&D Center)
- 김병렬 (삼성 반도체 통신(주) 반도체 연구소) ;
- 류현기 (삼성 반도체 통신(주) 반도체 연구소) ;
- 박문진 (삼성 반도체 통신(주) 반도체 연구소) ;
- 최수한 (삼성 반도체 통신(주) 반도체 연구소) ;
- 송성해 (삼성 반도체 통신(주) 반도체 연구소)
- Published : 1987.07.03
Abstract
The miniaturization of Bird's Beak generated at the field oxidation has been studied by adding polysilicon layer between the silicon nitride and pad oxide stack, which is the basic structure of Conventional LOCOS. The size and shape of Bird's Beak were intensively observed by SEM, and also the electrical characteristics of Bird's Beak-reduced LOCOS structure were compared with those of Conventional LOCOS. The length of Bird's Beak was reached up to
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