대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1985년도 하계학술회의논문집
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- Pages.224-227
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- 1985
Plasma 부하를 갖는 System에서의 Automatching 회로
- 발행 : 1985.07.26
초록
During operation of an RF glow discharge system, it can be observed that the reflected power tends to increase in small value, due to changes in the impedance of the system. This problem can be relieved by adding an automatic impedance matching circuit to the system. This paper presents a detailed method of automatically matching the input impedance of a 50 ohm transmission line to an RF glow discharge system at 13.56 MHZ.
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