Proceedings of the Korean Institute of Communication Sciences Conference (한국통신학회:학술대회논문집)

The Korean Institute of Commucations and Information Sciences (한국통신학회)
권호 표지

ITO박막 반도체 고저항 소자의 제작 및 측정

  • 곽계달 (한양대학교 전자공학과) ;
  • 김홍배 (한양대학교 전자공학과) ;
  • 정원채 (한양대학교 전자공학과)
  • Published : 1983.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

In integrated circuit, for a saving in total chip area per circuit, stably high value resistor was fabricated. Hence this paper explained that the measurement and fabrication of high value semiconductor resistor using ITO thin film. It is also used special material and new method fabrication.

Keywords