• Journal of the Semiconductor & Display Technology
• /
• v.19 no.2
• /
• pp.16-21
• /
• 2020

How accurately reproducible energy is delivered to the wafer in the process of making thin films using PE-CVD (Plasma enhanced chemical vapor deposition) during the semiconductor process. This is the most important technique, and most of the reaction on the wafer surface is made by thermal energy. In this study, we studied the method of monitoring the change of thermal energy transferred to the wafer surface by monitoring the temperature change according to the change of the thin film formed on the showerhead facing the wafer. Through this research, we could confirm the monitoring of wafer thin-film which is changed due to abnormal operation and accumulation of equipment, and we can expect improvement of semiconductor quality and yield through process reproducibility and equipment status by real-time monitoring of problem of deposition process equipment performance.

• Nuclear Engineering and Technology
• /
• v.55 no.7
• /
• pp.2572-2577
• /
• 2023

A field determination method for small D-T neutron source yield based on the oxygen prompt gamma rays was established. A neutron-gamma transport equation of the determination device was developed. Two yield field determination devices with a thickness of 20 mm and 50 mm were made. The count rates of the oxygen prompt gamma rays were calculated using three energy spectra processing approaches, which were the characteristic peak of 6.13 MeV, the overlapping peak of 6.92 MeV and 7.12 MeV, and the total energy area. The R-square of the calibration curve is better than 94% and the maximum error of the yield test is 5.21%, demonstrating that it is feasible to measure the yield of D-T neutron source by oxygen prompt gamma rays. Additionally, the results meet the requirements for field determination of the conventional D-T neutron source yield.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.19 no.4
• /
• pp.393-399
• /
• 2009

Historically, industrial condition monitoring has been performed by costly hard-wired sensors or infrequent checks by maintenance personnel equipped with hand held monitoring equipment. Self- powered wireless condition monitoring systems provides on-line monitoring of critical plant and machinery providing major operating cost benefits. A vibration energy harvester(VEH) is a device that converts kinetic energy occurred by machine vibration into useable electrical energy. Using VEHs to power wireless monitoring systems can yield significant benefits: increased reliability, lower life time costs and no battery disposal issues, etc. This paper proposes the novel prototype design and manufacturing of a VEH that can eliminate the effect by failed batteries.

• Journal of Chest Surgery
• /
• v.56 no.5
• /
• pp.336-345
• /
• 2023

Background: The objective of this study was to demonstrate the safety, efficacy, and feasibility of intraoperative monitoring of the recurrent laryngeal nerves during thoracoscopic and robotic 3-field esophagectomy. Methods: This retrospective analysis details our initial experience using intraoperative nerve monitoring (IONM) during minimally invasive 3-field esophagectomy. Data were obtained from a prospectively maintained database and electronic medical records. The study included all patients who underwent minimally invasive (video-assisted thoracic surgery/robotic) transthoracic esophagectomy with neck anastomosis. The patients were divided into those who underwent IONM during the study period and a historical cohort who underwent 3-field esophagectomy without IONM at the same institution. Appropriate statistical tests were used to compare the 2 groups. Results: Twenty-four patients underwent nerve monitoring during minimally invasive 3-field esophagectomy. Of these, 15 patients underwent thoraco-laparoscopic operation, while 9 received a robot-assisted procedure. In the immediate postoperative period, 8 of 24 patients (33.3%) experienced vocal cord paralysis. Relative to a historical cohort from the same institution, who were treated with surgery without nerve monitoring in the preceding 5 years, a 26% reduction was observed in the nerve paralysis rate (p=0.08). On follow-up, 6 of the 8 patients with vocal cord paralysis reported a return to normal vocal function. Additionally, patients who underwent IONM exhibited a higher nodal yield and a decreased frequency of tracheostomy and bronchoscopy. Conclusion: The use of IONM during minimally invasive 3-field esophagectomy is safe and feasible. This technique has the potential to decrease the incidence of recurrent nerve palsy and increase nodal yield.

• Proceedings of the KSRS Conference
• /
• 2003.11a
• /
• pp.917-919
• /
• 2003

This paper demonstrates that RADARSAT ScanSAR data can be an important data source of radar remote sensing for monitoring crop systems and estimation of rice yield for large areas in tropic and sub-tropical regions. Experiments were carried out to show the effectiveness of RADARSAT ScanSAR data for rice yield estimation in whole province of Guangdong, South China. A methodology was developed to deal with a series of issues in extracting rice information from the ScanSAR data, such as topographic influences, levels of agro-management, irregular distribution of paddy fields and different rice cropping systems. A model was provided for rice yield estimation based on the relationship between the backscatter coefficient of multi-temporal SAR data and the biomass of rice.

• Food Science and Biotechnology
• /
• v.14 no.6
• /
• pp.836-840
• /
• 2005

Extraction characteristics of Bonus species of Brassica oleracea var. capita and functional properties of corresponding extract were monitored by response surface methodology (RSM). Maximum extraction yield of 44.07% was obtained at ratio of solvent to sample of 27.94 mL/g, ethanol concentration of 24.35%, and extraction temperature of $55.21^{\circ}C$. At ratio of solvent to sample, ethanol concentration, and extraction temperature of 21.11 mL/g, 58.53%, and $68.83^{\circ}C$, respectively, maximum electron-donating ability was 48.44%. Maximum inhibitory effect on tyrosinase was 68.94% at ratio of solvent to sample, ethanol concentration, and extraction temperature of 24.08 mL/g, 10.49%, and $78.71^{\circ}C$, respectively. Superoxide dismutase (SOD) showed maximum pseudo-activity of 24.78% at ratio of solvent to sample of 22.66 mL/g, ethanol concentration of 45.69%, and extraction temperature of $93.81^{\circ}C$. Based on superimposition of four-dimensional RSM with respect to extraction yield, electron-donating ability, and pseudo-activity of SOD, optimum ranges of extraction conditions were ratio of solvent to sample of 20-30 mL/g, ethanol concentration of 35-65%, and extraction temperature of $50-80^{\circ}C$.

• Journal of the Korean Society of Food Science and Nutrition
• /
• v.30 no.3
• /
• pp.466-470
• /
• 2001

Response surface methodology was used for monitoring extraction conditions, based on quality properties of old pumpkin extracts. Hunter's color L value of extracts was maximized at 101℃, 2.6 hr and decreased gradually after maximum point. The polynomial equation for Hunter's color L value showed 10% of significance level and 0.8799 of R². Hunter's color a value was minimized at 117℃, 3.9 hr and R² of polynomial equation was 0.9852 within 1% significance level. Hunter's color b value and ΔE value increased as the extracting temperature and time increased. Extraction yield of old pumpkin was maximized at 110℃, 4 hr and increased in proportional to the extracting temperature and time, but decreased after 113℃ and 2 hr. Viscosity of pumpkin extracts were maximized at 120℃, nearly 3 hr. R² of polynomial equations for yield, viscosity and sugar content were 0.9532, 0.9812 and 0.8869, respectively. Optimum ranges of extraction conditions for quality properties of old pumpkin were 102∼109℃, 2.5∼3.5 hr, respectively. Predicted values at the optimum extraction condition agreed with experimental values.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.21 no.5
• /
• pp.397-401
• /
• 2008

Most of the topic in PCB industry was about increasing the volume of product for the development of electronics in numerous industrial application area. However, it has been emerged that yield improvement quality manufacturing via detecting any suspicious process in order to minimize the scrapped product and material waste. In addition, recently, restriction of hazardous substances (RoHS) claims that electronic manufacturing environment should reduce the harmful chemicals usage, thus the importance of monitoring copper etchant and detecting any mis-processing is crucial for electronics manufacturing. In this paper, we have developed real-time chemical monitoring system using RGB sensor, which is simpler but more accurate method than commercially utilized oxidation reduction potential (ORP) technique. The developed Cu etchant monitoring system can further be utilized for copper interconnect process in future nano-semiconductor process.

• KOREAN JOURNAL OF CROP SCIENCE
• /
• v.54 no.2
• /
• pp.203-209
• /
• 2009

Yield monitoring is one of a precision agriculture technology that is used most widely. It is spatial variability analysis of yield information that should be attained with yield monitoring system development. This experiment was conducted to evaluate spatial variability of yield and grain moisture content in rice paddy field, and their relationships to rice productivity. It is necessary to minimize sampling interval for accurate yield map making or to control cutting width of rice combine. Considering small rice plots such as $0.2{\sim}0.4$ ha, optimum size of sampling plot was below 15 m more than 5 m in with and length. In variable rate treatment field, average yield was similar, but yield variation was reduced than conventional field. Gap of yield by another plot in same field was bigger than half of average yield than yield variation was significantly big. Therefore yield measuring flow sensor must be able to measure at least 300 kg/10a more than 1000 kg/10a. Variation of moisture content in same field was not big and spatial dependance did not appear greatly. But, variation between different field is appeared difference according to weather circumstance before harvesting. Change of spatial dependence of yield was not big, because of field variation of moisture content is not big.

• Geomechanics and Engineering
• /
• v.14 no.5
• /
• pp.421-428
• /
• 2018

In deep mining, the lateral deformation of strip coal pillar appears to be a new characteristic. In order to study the lateral deformation of coal-mass, a monitoring method and monitoring instrument were designed to investigate the lateral deformation of strip coal pillar in Tangkou Coalmine with the mining depth of over 1000 m. Because of without influence of repeated mining, the bedding sandstone roof is easy to break and the angle between maximum horizontal stress and the roadway is small, the maximum lateral deformation is only about 287 mm lower than the other pillars in the same coalmine. In deep mining, the energy accumulation and release cause a discontinuous damage in the heterogeneous coal-mass, and the lateral deformation of coal pillar shows discontinuity, step and mutation characters. These coal-masses not only show a higher plasticity but also the high brittleness at the same time, and its burst tendency is more obvious. According to the monitoring results and theoretical calculations, the yield zone of the coal pillar width is determined as 15.6 m. The monitoring results presented through this study are of great significance to the stability analysis and design of coal pillar.