• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.477-477
• /
• 2008

For more than three decades, the gate dielectrics in CMOS devices are $SiO_2$ because of its blocking properties of current in insulated gate FET channels. As the dimensions of feature size have been scaled down (width and the thickness is reduced down to 50 urn and 2 urn or less), gate leakage current is increased and reliability of $SiO_2$ is reduced. Many metal oxides such as $TiO_2$, $Ta_2O_4$, $SrTiO_3$, $Al_2O_3$, $HfO_2$ and $ZrO_2$ have been challenged for memory devices. These materials posses relatively high dielectric constant, but $HfO_2$ and $Al_2O_3$ did not provide sufficient advantages over $SiO_2$ or $Si_3N_4$ because of reaction with Si substrate. Recently, $HfO_2$ have been attracted attention because Hf forms the most stable oxide with the highest heat of formation. In addition, Hf can reduce the native oxide layer by creating $HfO_2$. However, new gate oxide candidates must satisfy a standard CMOS process. In order to fabricate high density memories with small feature size, the plasma etch process should be developed by well understanding and optimizing plasma behaviors. Therefore, it is necessary that the etch behavior of $HfO_2$ and plasma parameters are systematically investigated as functions of process parameters including gas mixing ratio, rf power, pressure and temperature to determine the mechanism of plasma induced damage. However, there is few studies on the the etch mechanism and the surface reactions in $BCl_3$ based plasma to etch $HfO_2$ thin films. In this work, the samples of $HfO_2$ were prepared on Si wafer with using atomic layer deposition. In our previous work, the maximum etch rate of $BCl_3$/Ar were obtained 20% $BCl_3$/ 80% Ar. Over 20% $BCl_3$ addition, the etch rate of $HfO_2$ decreased. The etching rate of $HfO_2$ and selectivity of $HfO_2$ to Si were investigated with using in inductively coupled plasma etching system (ICP) and $BCl_3/Cl_2$/Ar plasma. The change of volume densities of radical and atoms were monitored with using optical emission spectroscopy analysis (OES). The variations of components of etched surfaces for $HfO_2$ was investigated with using x-ray photo electron spectroscopy (XPS). In order to investigate the accumulation of etch by products during etch process, the exposed surface of $HfO_2$ in $BCl_3/Cl_2$/Ar plasma was compared with surface of as-doped $HfO_2$ and all the surfaces of samples were examined with field emission scanning electron microscopy and atomic force microscope (AFM).

• Journal of the Korean Institute of Gas
• /
• v.16 no.2
• /
• pp.18-24
• /
• 2012

This research seeks to evaluate damage on type II gas cylinder by an acoustic emission test when executing 20000 cycles fatigue test and thereafter burst test. Used gas cylinders in the experimental are three types as follows; one is sound cylinder, others are cylinders which contain longitudinal and transverse artificial defect. The size of artificial defect is a depth of 3 mm, width of 3 mm and length of 50 mm. In the case of the cylinder which artificial defect, unlike the expectation that it will burst in low pressure, the burst pressure of the cylinder did not differ much according to whether or not there were defects. However, when there was longitudinal defect, the location of burst was near the location of defect. This leads to the effect in which the thickness of the composite material becomes thinner according to the length of the longitudinal defect and this is judged to have an effect on the location of initiation and growth of crack in the liner. Also, for the acoustic emission signal, when there is longitudinal defect, the ratio of an event occurring at defect position among overall hits is more than 50 %, and the source location also accords very precisely with defect position.

• Investigative Magnetic Resonance Imaging
• /
• v.11 no.1
• /
• pp.20-26
• /
• 2007

Purpose : The purpose of the present study was to develop and optimize solenoid coil for animal- model in 3 T MRI system and investigate and compare with the birdcage coil concerning the image quality with the various parameters such as SNR and Q-factor. Materials and Methods : Solenoid coil for animal-model was made on the acryl structure (diameter 4 cm, length 10 cm) 3 times-winding cooper tape of width 2 cm, thickness 0.05 cm and length 10 cm with 2 cm interval between winded tapes. Capacitors from 2 pF to 100 pF were used, and the solenoid coil was designed for receiver only coil. Results : SNR of the developed solenoid was 985 in CuSO4 0.7 g/L and 995 in rat experiment. Q-factor was 84-89 in unloaded condition and 203-206 in loaded condition. Conclusion : The resolution of the image obtained from solenoid was relatively higher than that of the conventional birdcage coil. In addition, the homogeneity of RF field by coil simulation was significantly excellent. The present study demonstrated that the solenoid coil could be useful to obtain small animal images with better contrast, resolution, visibility than images from birdcage.

• Journal of Periodontal and Implant Science
• /
• v.53 no.4
• /
• pp.306-317
• /
• 2023

Purpose: Biphasic calcium phosphate (BCP), a widely used biomaterial for bone regeneration, contains synthetic hydroxyapatite (HA) and β-tricalcium phosphate (β-TCP), the ratio of which can be adjusted to modulate the rate of degradation. The aim of this study was to evaluate the clinical and radiographic benefits of reconstructing peri-implant bone defects with a newly developed BCP consisting of 60% β-TCP and 40% HA compared to demineralized bovine bone mineral (DBBM). Methods: This prospective, multicenter, parallel, single-blind randomized controlled trial was conducted at the periodontology departments of 3 different dental hospitals. Changes in clinical (defect width and height) and radiographic (augmented horizontal bone thickness) parameters were measured between implant surgery with guided bone regeneration (GBR) and re-entry surgery. Postoperative discomfort (severity and duration of pain and swelling) and early soft-tissue wound healing (dehiscence and inflammation) were also assessed. Data were compared between the BCP (test) and DBBM (control) groups using the independent t-test and the χ² test. Results: Of the 53 cases included, 27 were in the test group and 26 were in the control group. After a healing period of 18 weeks, the full and mean resolution of buccal dehiscence defects were 59.3% (n=16) and 71.3% in the test group and 42.3% (n=11) and 57.9% in the control group, respectively. There were no significant differences between the groups in terms of the change in mean horizontal bone augmentation (test group: -0.50±0.66 mm vs. control groups: -0.66±0.83 mm, P=0.133), postoperative discomfort, or early wound healing. No adverse or fatal complications occurred in either group. Conclusions: The GBR procedure with the newly developed BCP showed favorable clinical, radiographic, postoperative discomfort-related, and early wound healing outcomes for peri-implant dehiscence defects that were similar to those for DBBM.

• Journal of Korean Society of Steel Construction
• /
• v.17 no.1 s.74
• /
• pp.63-71
• /
• 2005

There were already several studies conducted on the steel-concrete (SC) composite column, which was developedcomplement the weaknesses and maintain the advantages of previous composite columns. The axial compressive capacity of the SC composite column was estimated by the tests in previous studies, but the experiments for the large-scale column could not be performed because of the limitation with the laboratory's capacity. In this study, the analytical study was performed using the general finite element analysis program to reflect the interaction of concrete and steel and the local buckling of steel flange composed of the non-compact section. The appropriateness of the analytical model was verified by the comparison between experimental and analytical results. The nonlinear behavior of full-scale SC composite column was analyzed using the verified analytical model. From these analytical studies, it was concluded that the width-to-thickness ratio of the steel cross-section of the SC composite column should not exceed 25:0. The section area of the link is best when it is over 0.025 dt, and the link distance is to be less than D/2 or 300mm.

• Journal of Korean Society of Steel Construction
• /
• v.29 no.2
• /
• pp.147-158
• /
• 2017

The present study focused on the structural performance of newly developed prefabricated composite columns (PSRC composite column) using bolt-connected steel angles. Concentric axial loading tests were performed for four 2/3 scaled PSRC column specimens and two conventional SRC column specimens. The test parameters were the spacing and sectional configurations of lateral reinforcement, and width-to-thickness ratio of steel angles. The test results showed that the axial load-carrying capacity and deformation capacity of the PSRC column specimens were comparable to those of the conventional SRC column specimens. Closely spaced steel plates and Z-shaped steel plates for lateral reinforcement increased the deformation capacity of the PSRC column specimens. The load-carrying capacity was greater than the prediction by current design codes. Numerical analysis was performed for the specimens. The results agreed well with the test results in terms of initial stiffness, load-carrying capacity, except for strength degradation due to cover concrete spalling.

• Journal of the Mineralogical Society of Korea
• /
• v.19 no.3 s.49
• /
• pp.129-138
• /
• 2006

In this study, we identified the secondary precipitates from Samsan-jeil and Sambong mine, Goseong, Gyeongnam by means of scanning electron microscopy, electron probe microanalysis and X-ray powder diffraction analysis. Copper sulfide minerals had been produced from the mines during last few decades, however they are not worked. White and blue precipitates were found at the downstream of mine rock dump at Sambong mine and green one was at Samsan-jeil mine. The white precipitate covered the host rock surface with thickness of $30{\mu}m$, and is a kind of diatom with $10{\mu}m$ in length and $3{\mu}m$ in width. It is a species Fragilaria constuens, which is contained a order Pennales(pennate diatom) and lives in fresh water. The blue precipitate is the alteration product of chalcopyrite. It resultes in the increase in the ratio Cu:Fe from 5 to 13. The green precipitate has worm-like morphology with $10{\sim}20nm$ in diameter and $200{\sim}300nm$ in length. It is mainly composed of secondary copper sulfate such as woodwardite. However, it could be formed by the activity of microorganism, because the copper content is more than any secondary copper sulfate reported in copper sulfide mine. In order to identity the green precipitate exactly, the further research is needed.

• The Korean Journal of Food And Nutrition
• /
• v.24 no.4
• /
• pp.551-558
• /
• 2011

This present study was performed to analyze the efficiency and volatility of a porous film containing $Chamaecyparis$ $obtusa$ extract as a method to effectively package food compounds. Phytoncide was contacted the state of gas and showed effective antimicrobial properties. Limonene can be distilled without decomposition as a relatively stable terpene and was one of the extract components. $Chamaecyparis$ $obtusa$ essential oil. The optimal solvent composition was a ratio 5:20:0.3 of T-500:ethanol:hardener to effectively manufacture film containing phytoncide essential oil and the minimum antibacterial concentration was 2%. The films were made under different conditions(A-50LF1, A-25SF2, B-50SF1, C-50LF1, C-25SF2 and D-50SF1) containing phytoncide and the amounts of limonene inside the 1-L reaction chamber depending on storage were measured by gas chromatography-mass selective detention. The results showed that the 25SF2(width, 25 mm; length, 20 cm) revealed more amount of limonene compared with 50LF1(width 50 mm, length 20 cm). We confirmed that the gas emission amount showed a better layer on the film side than on the internal film. An effect of film thickness on phytoncide emissions was observed in that the amounts was less than the expectation for a thicker film at the beginning time, but the emitting amounts increased with increasing storage periods. In the storage testing of various films at $35^{\circ}C$ and 70% humidity for 14 days, 25SF2 showed longer preservation compared with that of 50LF in the case of bread. $C.$ $obtusa$ essential oil is a useful fresh ingredients, hence, analysis of limonene emission kinetics from various film was helpful to develop films with an optimal antimicrobial effect, and will allow application of such films in food packaging systems.

• Journal of Korean Society of Forest Science
• /
• v.43 no.1
• /
• pp.20-30
• /
• 1979

The purpose of present study is to analyze the genetic variation of natural stand of Pinus densiflora. In 1976 following after the seletion of 1974 and 1975, twenty trees from each of three natural populations of the species were selected and seeds were collected, and the locations and conditions of populations are presented in table 1, 2 and figure 1. Some morphological traits of the populations were already detailed in our fifth report of this series. The morphological traits of cone, seed and seed-wing, and also the growth performances and needle characters of the seedling were observed in the present study according to the previous methods. The results obtained are summarized as follows; 1. The meteorological data obtained by averaging the records of 30 year period(1931~1960) measured from the nearest meteorological station to each population are shown in fig. 2, 3, 4. The distributional patterns of investigated climate factors are generally considered to be similar among the locations. However, the precipitation density during growing season and the air temperature during dormant season on Samchuk area (Pop. 9) were quite different from those of the other areas. 2. The measurements of fresh cone weight, length, diameter and cone index (i.e.: length to diameter ratio) are presented in table 7. As shown in table 7, all these traits except for cone diameter seem to be not significant in population and to be highly significant in family differences within population. 3. The morohological traits of seed and seed-wing are detailed in table 8, 9, and highly significant differences are recognized among the populations and the families within population in seed weight, seed length, seed thickness but not among the populations in the other observed traits. The values of correlation between the characteristics of cone and seed are presented in table 12. As shown, the correlation between cone length and seed wing length, between seed wing width and seed width were significantly positive in population 8 and 9 but in population 7. The positive correlations between seed length and seed width were calculated in all populations studied 4. Significant statistical differences among populations and families within population are observed in the growth performances of 1-0 seedling height of these progenies. But the differences in 1-1 seedling height and root collar diameter are shown only among familes within population. As shown in table 13, the most parts of correlations are not significant statistically between the growth performances of seedling and the seed characters. 5. As shown in table 15, statistical differences are considered to be significant among the populations in stomata row on both sides of the needle but not in serration density. The correlations between progenies and parents are not generally observed in the investigated traits of needle as shown in table 16.

• Journal of the korean academy of Pediatric Dentistry
• /
• v.31 no.4
• /
• pp.721-728
• /
• 2004

Velopharyngeal closure is a sphincter mechanism between the activities of the soft palate, lateral pharyngeal wall and the posterior pharyngeal wall, which divides the oral and nasal cavity. It participates in physiological activities such as swallowing, breathing and speech. It is called a velopharyngeal dysfunction when this mechanism malfunctions. The causes of this dysfunction are defects in (1) length, function, posture of the soft palate, (2) depth and width of the nasopharynx and (3) activity of the posterior and lateral pharyngeal wall. The purposes of this study are to analyze the nasopharynx of cleft palate patients using cephalometry and to evaluate the degree of hypernasality using nasometry to find its relationship with velopharyngeal dysfunction. The following results were obtained : 1. In cephalometry, there were significant differences in soft palate length, soft palate thickness, nasopharyngeal depth, nasopharyngeal area, and adequate ratio between two groups. 2. In nasometry, there were significant differences between two groups in vowel /o/ and sentences including oral consonants. 3. In cleft palate patients, though no general correlation was found between Anatomic VPI and nasalance scores, vowel /i/ and sentences including oral consonants were slightly correlated. In conclusion, cephalometry and nasometer results were significantly different between the two groups. Though in the cleft palate group, Anatomic VPI and nasalance scores, which are indices for velopharyngeal closure, excluding the vowel /i/ and sentences including oral consonants show generally no significance.