• Transactions on Electrical and Electronic Materials
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• 제7권3호
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• pp.112-117
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• 2006

In this paper we present that the effects of polymer adsorption on stabilities and CMP performance of ceria abrasive particles. Characterization of ceria abrasive particles in the presence of poly(vinyl pyrrolidone) (PVP) was performed by the measurements of adsorbed amounts of PVP, average sizes, and the back scattering intensities of the ceria abrasive particles as functions of PVP molecular weight and PVP concentration. The ceria abrasive particles in the presence of PVP were used to polish $SiO_2\;and\;Si_3N_4$ films deposited on Si wafers in order to understand the effect of PVP adsorption on chemical mechanical polishing (CMP) performance, together with ceria abrasive particles without PVP. Adsorption of PVP on the ceria abrasive particles enhanced the stability of ceria abrasive particles due to steric stabilization of the thick adsorbed layer of PVP. Removal rates of the deposited $SiO_2\;and\;Si_3N_4$ films by the ceria abrasive particles in the presence of PVP were much lower than those in the absence of PVP and their magnitudes were decreased with an increase in the concentration of free PVP chains in the dispersion media. This suggests that the CMP performance in the presence of PVP could be mainly controlled by the hydrodynamic interactions between the adsorbed PVP chains and the free ones. Moreover, the molecular weight dependence of PVP on the removal rates of the deposited films was hardly observed. On the other hand, high removal rate selectivity between the deposited films in the presence of PVP was not observed.

• 멤브레인
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• 제18권3호
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• pp.198-205
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• 2008

제올라이트 분리막을 형성시키기 위하여 결정핵으로 작용할 수 있는 동일한 제올라이트 입자들을 다공성 지지체 위에 균일하게 도포하는 기술을 개발하고자 하였다. 제올라이트 입자들을 수용액에 분산시킨 다음 이 수용액을 튜브형 다공성 세라믹 지지체에 일정 유속으로 공급하고, 세라믹 지지체의 반대편에 진공을 유지하여 일부 수용액이 지지체를 통과하면서 동시에 제올라이트 입자들을 지지체 표면에 도포하였다. 수용액 상에 분산된 제올라이트의 농도, 도포시간 그리고 분산 수용액의 공급속도 등이 결정핵 도포량에 미치는 영향을 고찰하였다. 공급유속이 100 mL/min, 도포시간이 4분인 경우 농도가 0.01 wt%에서 0.3 wt%로 증가할수록 도포량이 0.0019 g에서 0.0208 g으로 증가하였다. 농도가 0.01 wt%, 공급유속이 100 mL/min인 경우 도포시간이 1분에서 4분으로 증가하는 경우 도포량이 0.0004 g에서 0.0019 g으로 증가함을 알 수 있었다. 또한 농도가 0.3 wt%이고, 도포시간이 1분일 때 유속이 100 mL/min에서 300 mL/min으로 빨라진 경우 도포량이 0.002 g에서 0.01 g으로 증가함을 알 수 있었다. 그러나 도포량이 증가할수록 제올라이트 분리막을 통한 물과 에탄올의 총투과속도는 감소함을 확인할 수 있었다.

• 한국전기전자재료학회논문지
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• 제16권12호
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• pp.1125-1130
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• 2003

The electrophoretic deposition method using the suspension solution with additives under the electric potential was applied for the fabrication of YBCO superconductor wire. This method was able to simplify the fabrication facilities, and produce an uniform and dense thick film. To improve the critical current density of deposited films, the additive PEGs(Poly Ethylene Glycole) with the molecular weight of 600, 1000 and 3400 were used as chemical binders for the suspension solution. The organic additive (PEG) showed better effects to the properties of YBCO superconductor wire. The PEG improved the adhesion between superconductor particles and suppressed the crack on the surface, which enhanced the surface uniformity and density of YBCO deposited film. It was found that acetone suspension solution showed better deposition properties than the others. The samples fabricated in the solution with the additive, 8 vol.% of 1% PEG(1000), showed the highest critical current density measured as 2300∼2400 A/$\textrm{cm}^2$ at 77 K, 0 T.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.123-126
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• 2003

The electrophoretic deposition method using the suspension solution with additives under the electric potential was applied for the fabrication of YBCO superconductor wire. This method was able to simplify the fabrication facilities, and produce an uniform and dense thick film. To improve the critical current density of deposited films, the additive PEGs(Poly Ethylene Glycole) with the molecular weight of 600, 1000 and 3400, were used as chemical binders for the suspension solution. The organic additive PEG showed better effects to the properties of YBCO superconductor wire. The PEG improved the adhesion between superconductor particles and suppressed the crack on the surface, which enhanced the surface uniformity and density of YBCO deposited film. It was found that acetone suspension solution showed better deposition properties than the others. The samples fabricated in the solution with the additive, 8 vol.% of 1% PEG(1000), showed the highest critical current density measured as $2300{\sim}2400\;Acm^2$ at 77 K, 0 T.

• 분석과학
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• 제31권6호
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• pp.247-258
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• 2018

본 연구는 대기오염 영향에 따라 주변의 오염도를 식물로 평가할 수 있는 여부를 고찰하기 위한 연구이다. 국내 자생하는 소나무의 1년생 솔잎가지를 대상 평가지표로 선택하였으며, 채취지점은 공단지역 주변의 공원 2곳, 상대적으로 오염원이 적다고 예상되는 도시지역 공원 2곳을 선정하였다. 대상 채취지점에서 소나무 10 그루 이상에서 지상 2 m 이상의 솔잎가지를 채취하였다. 채취한 솔잎가지 표면에 침착된 입자상 물질에 대한 분석항목은 입도분포, 전자현미경의 표면촬영, 먼지제거율, 납 등 중금속, 다환방향족탄화수소류(PAHs) 유기물질이었다. 초음파를 이용하여 탈착시킨 침착된 입자상 물질의 입도는 $0.4{\mu}m{\sim}200{\mu}m$ 범위로 나타났고, $10{\mu}m$ 이하의 입도는 20 % 수준이었다. 솔잎가지에 침착된 입자상 물질의 양은 평균 0.636 mg (0.450 mg~0.825 mg) 이었고, 강수장치에의한제거율은 평균 18.8 % (10.0 %~27.6 %)로 나타났다. 고주파전처리장치로 산전처리한 후 ICP/MS로 측정한 입자상 물질의 중금속 농도는 As 18.8~26.3 mg/kg, Be 0.08~0.13 mg/kg, Cd 0.06~0.08 mg/kg, Cr 4.91~17.8 mg/kg, Cu 5.26~405 mg/kg, Fe 1,930~2,670 mg/kg, Pb 3.03~28.1 mg/kg, Mn 26.9~42.8 mg/kg, Ni 2.66~10.4 mg/kg, Al 4,560~8,730 mg/kg, Ba 2,500~6,120 mg/kg, Rb 5.27~17.8 mg/kg, Sr 40.9~95.3 mg/kg, Zn 4,030~8,260 mg/kg 범위이었다. 침착된 입자상 물질의 세척액을 액-액 추출 정제한 후 GC/MS/MS로 분석한 PAHs의 농도는 ${\Sigma}PAH_{16}$은 1.179~12.396 mg/kg, ${\Sigma}PAH_7$은 0.147~0.741 mg/kg 범위이었다.

• 한국세라믹학회지
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• 제52권5호
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• pp.366-373
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• 2015

Sol-gel binder was prepared by hydrolysis and condensation reaction using boehmite sol and methyltrimethoxysilane as a function of aging-time. The coating slurry was composed of a plate-shape alumina in the sol-gel binder for the EPD process, in which particles dispersed in the slurry were deposited on the electrode under an electric field due to the surface charge. We studied the effects of three parameters: the content of boehmite, the aging time, and the applied voltage, on the physical, thermal, and electrical properties of the hybrid composite films by EPD. The amount of boehmite was 10 ~ 20 wt% and the aging time was 0.5 ~ 72, with a fixed amount of plate-shape alumina of 10 wt%. The condition of applied voltage was 5 ~ 30 V with a distance of 2 cm between the electrode during the EPD process. We confirmed that a structure of hybrid composite films of well-ordered plate alumina was deposited on the substrate when the film was prepared using a sol-gel binder composed of 15 wt% boehmite with 1 hr aging time and EPD at 10 V. The process shows a weight loss of 7% at $500^{\circ}C$ in TGA and a breakdown voltage of 8 kV at $87{\mu}m$.

• 한국산업보건학회지
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• 제27권3호
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• pp.180-186
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• 2017

Objectives: The purposes of this study were to compare the surface resistance of cassettes according to the material, and to evaluate the wall deposition of carbon nanotubes(CNTs) by electrostatic loss in the inner wall of the cassette. Methods: Surface resistance was measured for three types of cassettes(25 mm polypropylene conductive cowl, 25 mm and 37 mm clear styrene cassettes) with a surface resistance meter. Also, electrostatic wall loss was measured at different weights of CNTs depending on the cassette. CNTs were laid on a weight dish with the cassette for five minutes to provide sufficient time to attach on the wall. Wipe sampling was performed to collect CNTs deposited on the wall and elemental carbon, known as a surrogate for CNTs, was analyzed. Results: The cassette with conductive materials(18% of black carbon) showed the lowest surface resistance($<1.21{\times}10^3{\Omega}$). Cassettes made from clear polystyrene showed the relatively highest surface resistance(25 mm: $10.02{\times}10^9{\Omega}$, 37 mm: $10.59{\times}10^9{\Omega}$). This means that particles are more likely to stick to the internal wall of styrene cassettes due to electrostatic electricity. This may lead to an underestimation of the airborne concentration of CNTs. The experiment showed that EC was not detected when using a 25 mm conductive cowl cassette, while EC was detected at the internal wall of 25 mm and 37 mm polystyrene cassettes. Conclusions: This study confirms that cassettes with a conductive cowl have low surface resistance and are more appropriate for CNT sampling. In addition, this finding could be applied for other types of particulate, especially regarding electrostatic charge and sampling.