• Transactions on Electrical and Electronic Materials
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• v.7 no.3
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• pp.112-117
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• 2006

In this paper we present that the effects of polymer adsorption on stabilities and CMP performance of ceria abrasive particles. Characterization of ceria abrasive particles in the presence of poly(vinyl pyrrolidone) (PVP) was performed by the measurements of adsorbed amounts of PVP, average sizes, and the back scattering intensities of the ceria abrasive particles as functions of PVP molecular weight and PVP concentration. The ceria abrasive particles in the presence of PVP were used to polish $SiO_2\;and\;Si_3N_4$ films deposited on Si wafers in order to understand the effect of PVP adsorption on chemical mechanical polishing (CMP) performance, together with ceria abrasive particles without PVP. Adsorption of PVP on the ceria abrasive particles enhanced the stability of ceria abrasive particles due to steric stabilization of the thick adsorbed layer of PVP. Removal rates of the deposited $SiO_2\;and\;Si_3N_4$ films by the ceria abrasive particles in the presence of PVP were much lower than those in the absence of PVP and their magnitudes were decreased with an increase in the concentration of free PVP chains in the dispersion media. This suggests that the CMP performance in the presence of PVP could be mainly controlled by the hydrodynamic interactions between the adsorbed PVP chains and the free ones. Moreover, the molecular weight dependence of PVP on the removal rates of the deposited films was hardly observed. On the other hand, high removal rate selectivity between the deposited films in the presence of PVP was not observed.

• Membrane Journal
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• v.18 no.3
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• pp.198-205
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• 2008

A novel technology for homogeneous deposition of zeolite particles on a porous support was developed so that those particles played a seeding role for the growth of zeolite crystals. After the particles were dispersed in water, the aqueous solution was 134 through the bore of a porous tubular support. By keeping the other side of the support in a vacuum, the aqueous solution passed through the pores of the support, leading the particles to be homogeneously deposited on the support. The amount of the deposited particles was investigated by changing the following operating parameters: a particle concentration in the solution, a time for deposition, and the feeding rate of the solution. The amount of the deposited particles increased from 0.0019 g to 0.0208 g as the concentration of the particles was changed from 0.01 wt% to 0.3 wt%, while the feeding rate and the deposition time were kept to 100 mL/min and 4 min, respectively. As the deposition time was varied from 1 min to 4 min, the deposition amount increased from 0.0004g to 0.0019g at the typical condition of the rest parameters. Also, it was observed that the deposited weight increased from 0.0029 g to 0.01 g as the feeding rate increased from 100 mL/min to 300 mL/min. However, the total permeance of water and ethanol decreased through the zeolite membrane as the deposited weight increased.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12
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• pp.1125-1130
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• 2003

The electrophoretic deposition method using the suspension solution with additives under the electric potential was applied for the fabrication of YBCO superconductor wire. This method was able to simplify the fabrication facilities, and produce an uniform and dense thick film. To improve the critical current density of deposited films, the additive PEGs(Poly Ethylene Glycole) with the molecular weight of 600, 1000 and 3400 were used as chemical binders for the suspension solution. The organic additive (PEG) showed better effects to the properties of YBCO superconductor wire. The PEG improved the adhesion between superconductor particles and suppressed the crack on the surface, which enhanced the surface uniformity and density of YBCO deposited film. It was found that acetone suspension solution showed better deposition properties than the others. The samples fabricated in the solution with the additive, 8 vol.% of 1% PEG(1000), showed the highest critical current density measured as 2300∼2400 A/$\textrm{cm}^2$ at 77 K, 0 T.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.123-126
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• 2003

The electrophoretic deposition method using the suspension solution with additives under the electric potential was applied for the fabrication of YBCO superconductor wire. This method was able to simplify the fabrication facilities, and produce an uniform and dense thick film. To improve the critical current density of deposited films, the additive PEGs(Poly Ethylene Glycole) with the molecular weight of 600, 1000 and 3400, were used as chemical binders for the suspension solution. The organic additive PEG showed better effects to the properties of YBCO superconductor wire. The PEG improved the adhesion between superconductor particles and suppressed the crack on the surface, which enhanced the surface uniformity and density of YBCO deposited film. It was found that acetone suspension solution showed better deposition properties than the others. The samples fabricated in the solution with the additive, 8 vol.% of 1% PEG(1000), showed the highest critical current density measured as $2300{\sim}2400\;Acm^2$ at 77 K, 0 T.

• Analytical Science and Technology
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• v.31 no.6
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• pp.247-258
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• 2018

The purpose of the present study was to investigate whether the degree of air pollution can be evaluated via examination of local plants. Selected sites included two parks in an industrial area, as well as two parks in an urban area. Selected plant samples comprised one-year-old pine shoot leaves. Leaves growing over 2 m from the ground were collected from over 10 pine trees. Leaf surface was analyzed for deposition of 14 trace elements and 16 polycyclic aromatic hydrocarbons (PAHs), including particle size and mass, surface imaging, precipitation-mediated particle removal rate, and concentration. Particle size ranged from 0.4 to $200{\mu}m$, and the volume percentage of particles ${\leq}10$ was 20 %. Deposited particle mass ranged from 0.450-0.825 mg, and precipitation-mediated removal rate ranged from 10.0-27.6 %. Trace element concentration, as measured by ICP/MS after microwave acid digestion, was 18.8-26.3 mg/kg As, 0.08-0.13 mg/kg Be, 0.06-0.08 mg/kg Cd, 4.91-17.8 mg/kg Cr, 5.26-405 mg/kg Cu, 1,930-2,670 mg/kg Fe, 3.03-28.1 mg/kg Pb, 26.9-42.8 mg/kg Mn, 2.66-10.4 mg/kg Ni, 4,560-8,730 mg/kg Al, 2,500-6,120 mg/kg Ba, 5.27-17.8 mg/kg Rb, 40.9-95.3 mg/kg Sr, and 4,030-8,260 mg/kg Zn. Concentration of PAHs, as analyzed by GC/MS/MS after liquid-liquid extraction and purification of deposited particles, ranged from 1.17 to 12.378 mg/kg for ${\Sigma}PAH_{16}$ and from 1.17 to 12.378 mg/kg for ${\Sigma}PAH_7$.

• Journal of the Korean Ceramic Society
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• v.52 no.5
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• pp.366-373
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• 2015

Sol-gel binder was prepared by hydrolysis and condensation reaction using boehmite sol and methyltrimethoxysilane as a function of aging-time. The coating slurry was composed of a plate-shape alumina in the sol-gel binder for the EPD process, in which particles dispersed in the slurry were deposited on the electrode under an electric field due to the surface charge. We studied the effects of three parameters: the content of boehmite, the aging time, and the applied voltage, on the physical, thermal, and electrical properties of the hybrid composite films by EPD. The amount of boehmite was 10 ~ 20 wt% and the aging time was 0.5 ~ 72, with a fixed amount of plate-shape alumina of 10 wt%. The condition of applied voltage was 5 ~ 30 V with a distance of 2 cm between the electrode during the EPD process. We confirmed that a structure of hybrid composite films of well-ordered plate alumina was deposited on the substrate when the film was prepared using a sol-gel binder composed of 15 wt% boehmite with 1 hr aging time and EPD at 10 V. The process shows a weight loss of 7% at $500^{\circ}C$ in TGA and a breakdown voltage of 8 kV at $87{\mu}m$.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.27 no.3
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• pp.180-186
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• 2017

Objectives: The purposes of this study were to compare the surface resistance of cassettes according to the material, and to evaluate the wall deposition of carbon nanotubes(CNTs) by electrostatic loss in the inner wall of the cassette. Methods: Surface resistance was measured for three types of cassettes(25 mm polypropylene conductive cowl, 25 mm and 37 mm clear styrene cassettes) with a surface resistance meter. Also, electrostatic wall loss was measured at different weights of CNTs depending on the cassette. CNTs were laid on a weight dish with the cassette for five minutes to provide sufficient time to attach on the wall. Wipe sampling was performed to collect CNTs deposited on the wall and elemental carbon, known as a surrogate for CNTs, was analyzed. Results: The cassette with conductive materials(18% of black carbon) showed the lowest surface resistance($<1.21{\times}10^3{\Omega}$). Cassettes made from clear polystyrene showed the relatively highest surface resistance(25 mm: $10.02{\times}10^9{\Omega}$, 37 mm: $10.59{\times}10^9{\Omega}$). This means that particles are more likely to stick to the internal wall of styrene cassettes due to electrostatic electricity. This may lead to an underestimation of the airborne concentration of CNTs. The experiment showed that EC was not detected when using a 25 mm conductive cowl cassette, while EC was detected at the internal wall of 25 mm and 37 mm polystyrene cassettes. Conclusions: This study confirms that cassettes with a conductive cowl have low surface resistance and are more appropriate for CNT sampling. In addition, this finding could be applied for other types of particulate, especially regarding electrostatic charge and sampling.