• Journal of Korea Multimedia Society
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• v.21 no.8
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• pp.864-875
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• 2018

In this paper, we propose a measurement method for height of white light scanning interferometer using deep learning. In order to measure the fine surface shape, a three-dimensional surface shape measurement technique is required. A typical example is a white light scanning interferometer. In order to calculate the surface shape from the measurement image of the white light scanning interferometer, the height of each pixel must be calculated. In this paper, we propose a neural network for height calculation and use virtual data generation method to train this neural network. The accuracy was measured by inputting 57 actual data to the neural network which had completed the learning. We propose two new functions for accuracy measurement. We have analyzed the cases where there are many errors among the accuracy calculation values, and it is confirmed that there are many errors when there is no interference fringe or outside the learned range. We confirmed that the proposed neural network works correctly in most cases. We expect better results if we improve the way we generate learning data.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.331-336
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• 2004

The phase change due to the reflection from target surfaces in a white-light interferometer induces measurement errors when target surfaces are composed of dissimilar materials. We prove that this phase change on reflection as the polarization of the white-light changes causes a shift of both envelope peak position and fringe peak position of several tens of nanometers as the polarization of the white-light changes. In addition, we propose a new equation for white-light interference fringes depending on the polarization of the source.

• Proceedings of the Optical Society of Korea Conference
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• 2003.02a
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• pp.88-89
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• 2003

산업이 고도로 발달함에 따라 생산 부품의 소형화와 정밀도가 크게 요구되고 있다. 특히 최첨단 제품인 반도체와 광통신 부품, 그리고 광학 부품 등에 있어 이러한 추세가 두드러지게 나타나고 있다. 이에 따라 이들 부품들에 대한 제조 공정 못지 않게 초정밀 측정에 대한 관심도 꾸준히 늘고 있다. 뿐만아니라 요즘 새롭게 부각되고 있는 생명 공학 기술(Bio-Technology)과 나노기술(Nano-Technology)을 이용한 바이오센서나 칩, 그리고 타소 나노 튜브 등을 제작하거나 검사를 할 때도 초정밀 측정을 필요로 하게 된다. (중략)