• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 1998년도 춘계학술대회논문집; 용평리조트 타워콘도, 21-22 May 1998
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• pp.302-307
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• 1998

In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of exactness and accuracy, because this is used as basic data for the design of building structure and structural dynamics of equipment. The study on the evaluation of the factors affecting the permissible vibration criteria is required to design the efficient isolation system of the semiconductor manufacturing of equipment. This paper deals with the properties of the effected factor for vibration criteria of high sensitive equipment.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 추계학술대회논문집 II
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• pp.1376-1383
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• 2001

Modem technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of 'exactness' and 'accuracy', because this is used as basic data for the design of building structure and structural dynamics of equipment. This paper deals with the properties of time and frequency domain in order to obtain more improved vibration criteria for high sensitive equipment.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 1997년도 춘계학술대회논문집; 경주코오롱호텔; 22-23 May 1997
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• pp.362-369
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• 1997

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be expressed in the form of 'exactness' and 'accuracy', because this is made basic data in the use of building structure design. This paper made a study on the specification of high sensitive equipment and proposed a contents of the specification.

• 반도체디스플레이기술학회지
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• 제1권1호
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• pp.1-7
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• 2002

Modem technology depends on the reliability of extremely high precision equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Therefore, this high technology equipments require very strict environmental vibration criteria because it is used as basic data for the design of building structure and structural dynamics of equipment. In this paper, the new approach is proposed to investigate the mismatch problem of time and frequency domain for vibration criteria of sensitive equipment. The proposed approach is based on a vibration measurement data and a relative transfer function which can be obtained by experiment or analysis.

• 소음진동
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• 제7권2호
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• pp.247-254
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• 1997

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria are usually obtained either by the real vibration exciting test on the equipment or by the analytical calculation. This paper proposes a new method to solve this problem at a time. The permissible vibration level to a precision equipment can be easily obtained by analyzing a process of Frequency Response Function. This paper also demonstrates its effectiveness by applying the proposed method to finding the vibration criteria of a Computer Hard Disk Driver by Impact Test.

• 소음진동
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• 제10권6호
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• pp.971-976
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• 2000

High level random vibration environments induced while launching of spacecraft can damage sensitive electronic equipment, unless the equipment is properly packaged. Thus careful consideration on the launch environment, especially for high level random vibration, is required in the design stage of electronic equipment of spacecraft. This paper describes the development process of Solar Array Regulator for KOMPAT-2, which is designed and tested by Korean engineers. Both analytical and experimental techniques are introduced in this paper.

• 국제초고층학회논문집
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• 제1권1호
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• pp.15-19
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• 2012

Occupant footfalls are often the most critical source of floor vibration on upper floors of buildings. Floor motions can degrade the performance of imaging equipment, disrupt sensitive research equipment, and cause discomfort for the occupants. It is essential that low-vibration environments be provided for functionality of sensitive spaces on floors above grade. This requires a sufficiently stiff and massive floor structure that effectively resists the forces exerted from user traffic. Over the past 25 years, generic vibration limits have been developed, which provide frequency dependent sensitivities for wide classes of equipment, and are used extensively in lab design for healthcare and research facilities. The same basis for these curves can be used to quantify acceptable limits of vibration for human comfort, depending on the intended occupancy of the space. When available, manufacturer's vibration criteria for sensitive equipment are expressed in units of acceleration, velocity or displacement and can be specified as zero-to-peak, peak-to-peak, or root-mean-square (rms) with varying frequency ranges and resolutions. Several approaches to prediction of floor vibrations are currently applied in practice. Each method is traceable to fundamental structural dynamics, differing only in the level of complexity assumed for the system response, and the required information for use as model inputs. Three commonly used models are described, as well as key features they possess that make them attractive to use for various applications. A case study is presented of a tall building which has fitness areas on two of the upper floors. The analysis predicted that the motions experienced would be within the given criteria, but showed that if the floor had been more flexible, the potential exists for a locked-in resonance response which could have been felt over large portions of the building.

• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.25-30
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• 2003

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. This high technology equipments require very strict environmental vibration criteria in proportion to the accuracy of the manufacturing. In this paper, the dynamic analysis and modal test were performed to evaluate the dynamic properties of the constructing clean room structure. Based on these results, a structural dynamic modification(SDM) were required to satisfiy the vibration allowable limit for pression machine. Therefore, in order to improve the dynamic stiffness of clean room structure, the VSD system which can control the force applied on structure, were adopted and its utility were proved from dynamic test results of the improved structure after a modification work.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2014년도 추계학술대회 논문집
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• pp.162-166
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• 2014

정밀 장비의 진동 허용치는 장비의 성능을 저하시키지 않는 외부 진동의 허용 범위를 의미하는 것으로 BBN 기준, NIST 기준 등이 있다. 반도체 및 디스플레이 산업 현장에서 주로 적용되는 BBN 기준을 평가하기 위해 측정시 측정자에 따라 상이한 결과가 발생하기도 한다. 이는 계측기의 설정 및 분석 방법 등 측정 방법의 차이에서 기인하는 것으로 관련된 측정 방법에 대한 가이드가 없기 때문인 것으로 보인다. 본 논문에서는 BBN 기준 평가를 위해 정밀 장비의 진동 허용치를 측정시 분석 방법, 평균화 방법 및 등급 판정 방법에 대한 가이드를 제안한다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 추계학술대회 논문집
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• pp.185-189
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• 2009

It is very important to control the vibration transmitted from external utilities and the transient response due to the internal sources for the precision equipment, which is very sensitive to the vibration environment. The anti-vibration tables that use air springs have been widely used due to their excellent isolation performance, but the systems with high flexibility have the critical problem of large transient response by the impulsive force of the moving mass in operation of the equipment. In this paper, the hybrid vibration control system is proposed, which is combined the air springs with the semi-active MR dampers in order to satisfy the performances of isolation and vibration reduction simutaneously.