• IE interfaces
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• v.16 no.3
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• pp.344-351
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• 2003

Critical dimension is one of the most important characteristics of up-to-date integrated circuit devices. Hence, critical dimension control in a semiconductor wafer fabrication process is inevitable in order to achieve optimum device yield as well as electrically specified functions. Currently, in complex semiconductor wafer fabrication processes, statistical methodologies such as Shewhart-type control charts become crucial tools for practitioners. Meanwhile, given a critical dimension sampling plan, the analysis of variance technique can be more effective to investigating critical dimension variation, especially for on-chip and on-wafer variation. In this paper, relating to a typical sampling plan, linear statistical models are presented for the analysis of critical dimension variation. A case study is illustrated regarding a semiconductor wafer fabrication process.

• Journal of Advanced Marine Engineering and Technology
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• v.15 no.2
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• pp.53-63
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• 1991

This study suggests a new type shaft generator driven by hydraulic power suitable for small size vessels. Since the shaft generator system is very easy to be affected by disturbances such as speed variation of main engine and load variation of the generator, a robust servo control must be implemented to obtain stable electric power with constant frequency. Thus, in this study two types of controller design method-the reference following optimal control method and robust servo control method-are adopted to the controller design. In the experiment, static and dynamic characteristics of the shaft generator system according to the variation of input frequency setting, the speed variation of the pump and the load variation of the generator are investigated. From the considerations on the computer simulation results and experimental results, it is ascertained that the shaft generator system proposed in this study has good control performances.

• Current Optics and Photonics
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• v.4 no.1
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• pp.23-30
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• 2020

This paper presents a new method for designing a lens system stable against chromatic variation at a specified wavelength. Conventional lenses are corrected for chromatic aberration, but the new method suppresses chromatic changes of the marginal ray in the image-side. By doing so, paraxial properties of the lens system are stabilized against chromatic variation. Since the new method is based on paraxial ray tracing, the stabilizing conditions against chromatic variation are given by recurrence formulas. However, there is an analytic solution for the case of a cemented doublet in the air. A stable doublet at 405 nm wavelength is designed and analyzed.

• International Journal of Internet, Broadcasting and Communication
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• v.10 no.2
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• pp.39-44
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• 2018

Wideness variation technique is compounded the smooth diffusivity-vibration status of the fulgurate-space realization level (FSRL) on the wideness realization morph. The realization level condition by the wideness realization morph system is associated with the diffusivity-vibration system. As to search a position of the dot situation, we are acquired of the wideness value with constructed-point point by the diffusivity upper structure. The concept of realization level is composed the reference of fulgurate-space level for variation signal by the wideness vibration morph. Further displaying a smooth variation of the FSRL of the maximum-minimum in terms of the diffusivity-vibration morph, and wideness position vibration that was the a wideness value of the far variation of the $Wid-rm-FA-{\alpha}_{MAX-MIN}$ with $23.24{\pm}3.37units$, that was the a wideness value of the convenient variation of the $Wid-rm-CO-{\alpha}_{MAX-MIN}$ with $7.83{\pm}1.32units$, that was the a wideness value of the flank variation of the $Wid-rm-FL-{\alpha}_{MAX-MIN}$ with $2.99{\pm}0.51units$, that was the a wideness value of the vicinage variation of the $Wid-rm-VI-{\alpha}_{MAX-MIN}$ with $0.51{\pm}(-0.01)units$. The diffusivity vibration will be to evaluate at the smooth ability of the diffusivity-vibration morph with constructed-point by the wideness realization level on the FSRL that is displayed the fulgurate-space morph by the realization level system. Diffusivity realization system will be possible to control of a morph by the special signal and to use a wideness data of diffusivity vibration level.

• Proceedings of the KIEE Conference
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• 1991.11a
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• pp.175-178
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• 1991

The drive system of servo motor is requested to have robustness of disturbance and parameter variation. However, the dynamics of PMSM drive change significantly by forced disturbance and parameter variation. Moreover, the state error caused by them should be suppressed completely and rapidly. In this paper, the vector-control system of PMSM using dual adaptive control loop is investigated. In the proposed system, linear adaptive control loop rapidly recovers the state error caused by both disturbance and parameter variation. In the dual adaptive control loop, the inner loop reduces the system sensitivity of parameter variation and disturbance, and the outer loop suppresses the state error caused by them completely. The proposed servo system is verified through a computer simulations and experimental results.

• 제어로봇시스템학회:학술대회논문집
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• 1991.10a
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• pp.629-632
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• 1991

Load Variation effects on the system driving performance. Therefore, this paper presents as a application example of Anti-windup method using general incremental form for a gun servo system of load variation involved. Also, this method can be easily implemented compared to gain scheduling technique.

• Journal of Power Electronics
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• v.9 no.1
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• pp.85-92
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• 2009

This paper studies the method to predict voltage variation that can be presented in the case of operating a small-sized wind turbine in grid connection to the isolated small-sized power system. In order to do this, it makes up the simplified simulation model of the existing power plant connected to the isolated system, load, transformer, and wind turbine on the basis of PSCAD/EMTDC and compares them with the operating characteristics of the actual established wind turbine. In particular, it suggests a simplified model formed with equivalent impedance of the power system network including the load to analytically predict voltage variation at the connected point. It also confirms that the voltage variation amount calculated by the suggested method accords well with both simulation and actually measured data. The results can be utilized as a tool to ensure security and reliability in the stage of system design and preliminary investigation of a small-sized grid connected wind turbine.

• 제어로봇시스템학회:학술대회논문집
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• 1991.10a
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• pp.957-961
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• 1991

The parameters of electro-hydraulic servo system are closely dependent on the variation of system characteristics. Especially the parameter sensitivity is incleased in the servo system with heavy load and wide operating range. This paper shows the effect of parameter variation and the experimental parameter values of high power servo system.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.3
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• pp.218-221
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• 2009

This paper reports on measurement method for the fiber optic strain monitoring of overhead contact line systems of trains, We used FBG (Fiber Bragg Grating) sensors to measure the strain variation of overhead contact line. FBG sensors can sensitively measure the variation of strain and! or temperature by the shift wavelength of reflected wave according to the lattice variation during the measurement. FBG sensor were attached on the contact line and connected to the monitoring system with optical fibers. The monitering system with FBG sensors showed very good sensitivity to measuring strain variation and this system could be applied to the overhead contact line of KTX (Korea Train eXpress).

• ETRI Journal
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• v.38 no.1
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• pp.195-205
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• 2016

This paper presents a novel follicular unit (FU) classification method based on an angle variation of a boundary vector according to the number of hairs in several FU images. The recently developed robotic FU harvest system, ARTAS, classifies through digital imaging the FU type based on the number of hairs with defects in the contour and outline profile of the FU of interest. However, this method has a drawback in that the FU classification is inaccurate because it causes unintended defects in the outline profile of the FU. To overcome this drawback, the proposed method classifies the FU's type by the number of variation points that are calculated using an angle variation a boundary vector. The experimental results show that the proposed method is robust and accurate for various FU shapes, compared to the contour-outline profile FU classification method of the ARTAS system.