• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.541-542
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• 2011

• Nuclear Engineering and Technology
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• v.34 no.3
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• pp.211-217
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• 2002

A 1-MW vacuum feedthrough for the KSTAR ICRF antenna is fabricated and high power RF test is performed. It is designed to have two alumina $(Al_2O_3)$ ceramic cylinders and O-ring seal instead of a brazed seal for good mechanical and thermal strength, which is important in long pulse or steady state operation. For cooling of the ceramics, dry air is circulated in a space between the two cylinders and the outer conductor. Independent cooling water channels are installed to cool the inner conductor of the feedthrough. RF high voltage test is performed using two kinds of ceramics with the purities of 99.7% and 97%. Stable operation is possible with the RF voltage of 30 kVp at long pulse of 300 sec without any severe damage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.475-476
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• 2010

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.50-50
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• 2000

당사는 1970년 제우스 콤 상사로부터 출발하여 1988년 12우러 주식회사 제우스로 법인 전환한 후 현재 한국반도체 산업협회 및 회원으로 등록 활동하고 있다. 이번 발표에서는 회사에 대한 소개와 함께 취급품목을 설명하고자 한다. 취급품목은 Ion beam sources(CSC), E-beam evaporator & E-beam source(Temescal), Residual Gas Analyzer(SPECTRA), Cryopump & Waterpump(CTI-Cryogenics), Thickness Monitor & Controller, Electrical Feedthrough, RTP system, Thin Film Analyzer, PECVD, RIE 등이다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.10
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• pp.81-86
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• 2020

A ceramic vacuum chamber feedthrough ceramic insulator is made of Al2O3; the manufacturing process involves filling alumina powder into a urethane mold and pressing it with a rubber press to produce a molded body. Thereafter, manufacturing is completed through primary shape processing, sintering, and secondary shape processing in the green body, which is a pressurized molding body, This work is intended to prevent defects in the first shape processing by improving the ceramic insulator in the green body, and to improve the productivity of the ceramic insulator by determining the optimal processing conditions.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.62-71
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• 1999

Integrating micro-machined sensors and actuators on the conventional devices with the copper power lines was incompatible to fabricate the mass produced micro electromechanical system (MEMS) devices. To achieve the compatibility of the wiring method between MEMS parts and devices, we developed the three-dimensional sputter-evaporation system that coats micropatterned thin copper films on the surface of the MEMS element. The system consists of a process chamber, two branch chambers, the substrate holder, and a linear-rotary motion feedthrough. Thin copper film was sputtered and evaporated on the biocompatible polymer, Pellethane$^{circed{R}}$ and silicone, catheter that is 2 mm in diameter and 700 mm in length. The metal film coating technique with three-dimensional thin film sputter-evaporation system was developed to apply the power and signal lines on the micro active endoscope. In this paper, we developed the three-dimensional metal film sputter-evaporation system operated on the low temperature for the biopolymeric substrates used in the medical MEMS devices.

• Journal of the Korean Vacuum Society
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• v.6 no.1
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• pp.85-90
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• 1997

A new ionized sputtering process was developed to fill small trench or via using additional ionizing mechanism of sputtered particles from 32cm $AlCu_x$(x=0.5%) cathode target with rotating magnet, then drawn toward substrate by small negative DC potential. The radial uniformity in RFI magnetron sputtering was studied by plasma diagnosis and appropriate RFI coil design to improve it. Optical emission intensities of excited species. $Ar^{\circ}, \;Ar^+;Al^+, \;Al^{\circ}$ are measured across the radial direction and showed close correlation with deposit's bottom to top thickness ratios in trenches and vias of submicron opening and 1.5 aspect ratio. After increase of the diameter of RF coil from 29 cm to 32 cm and improved the power leading feedthrough symmetry by removal of asymmetric single turn region, there was an increase of uniformity from 7.5% to 1.5% in bottom to top thickness ratio in 0.6 $\mu\textrm{m}$ vias.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.12
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• pp.1573-1579
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• 2013

To test the performance of nuclear fuels, coolant needs to be circulated through the test rig installed in the test loop. Because the pressure and temperature of the coolant is 15.5 MPa and $300^{\circ}C$ respectively, coolant sealing is one of the most important processes in fabricating a nuclear fuel test rig. In particular, 15 instrumentation cables installed in a test rig pass through the pressure boundary, and brazing is generally applied as a sealing method. In this study, an induction brazing system has been developed using a high frequency induction heater including a vacuum chamber. For application in the nuclear field, BNi2 should be used as a paste, and optimal process variables for Ni brazing have been found by several case studies. The performance and soundness of the brazed components has been verified by a tensile test, cross section test, and sealing performance test.