• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.464-464
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• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.106.1-106.1
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• 2013

When strong static magnetic field is applied to the TMP, it is expected that the presence of the magnetic field might retard the velocity of the blades which results in the change of the pumping speed of the TMP. However, such effect of the magnetic field on the TMP has not been well characterized. Thus, under the strong magnetic field, monitoring pumping speed as well as generated heat, pressure, and vibration of the TMP may be an important issue to understand the magnetic field tolerance of the TMP and the development of magnetic shielding technique for the key components of the pump. For this purpose, magnetic field generation system to the vertical direction by a circular current source was firstly designed and suggested [K. Baik et al., 44th Annual Conf. KVS, 22(1), 153, (2012)]. In the current study, another magnetic field generation systems are presented to apply the magnetic field to the horizontal and radial directions by the rectangular current sources and the permanent magnets respectively. Such systems were made to generate at least 50 Gauss of magnetic field along the vertical direction and at least 25 Gauss of magnetic field along the horizontal or radial direction. Current study introduces the evaluation system of the magnetic field along the vertical, horizontal, and radial directions and presents the measured experimental results of the magnetic field when such systems are combined with the equipment where TMP will be installed.

• Journal of the Semiconductor & Display Technology
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• v.23 no.1
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• pp.92-96
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• 2024

The application of the technology for forming Al₂O₃ thin films using ALD(atomic layer deposition) method is rapidly increasing in the semiconductor and display fields. In order to increase the efficiency of the ALD process in a mass production line, metallic by-products generated from the ALD process chamber must be effectively collected. By collecting by-products flowing out of the chamber with a cold trap device before they go to the vacuum pump, damage to the vacuum pump can be prevented and the work room can be maintained stably, resulting in increased process flow rate. In this study, a cold trap was installed between the ALD process chamber and the dry pump to measure and analyze by-products generated during the Al₂O₃ thin film deposition process. As a result, it was confirmed that Al and O elements were discharged, and the collection forms were two types: bulk and powder. And the binding energy peaked at 73.7 ~ 74.3 eV, the binding energy of Al 2p, and 530.7 eV, the binding energy of O 1s, indicating that the binding structure was Al-O.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.9 no.3
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• pp.273-277
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• 2016

In this paper, we deals with the digitization of high frequency sine wave power supply using power source of high frequency surgical equipment and RF device. High frequency surgical equipment has been using commonly on medical surgery because of its merits such as programmable depth of incision, availability of incision and coagulation in the same device, increasing the usability on surgical side. However, the core part of the device is consists of vacuum tubes which are expensive, not ease to use and must be imported, therefore it is inevitable of high prices, forces to develop the fully digitized alternative technology. The fully digitized high frequency sine wave power supply for surgical device is proposed and verified by experimental results.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.193-193
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• 2012

In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is the most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. Single-chamber PECVD system for a-Si:H solar cell manufacturing has the advantage of lower initial investment and maintenance cost for the equipment. However, in single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of single-chamber PECVD system. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. In order to remove the deposited B inside of the plasma chamber during p-layer deposition, a high RF power was applied right after p-layer deposition with SiH4 gas off, which is then followed by i-layer, n-layer, and Ag top-electrode deposition without vacuum break. In addition to the p-i interface control, various interface control techniques such as FTO-glass pre-annealing in O2 environment to further reduce sheet resistance of FTO-glass, thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, and hydrogen plasma treatment prior to n-layer deposition, etc. were developed. The best initial solar cell efficiency using single-chamber PECVD system of 10.5% for test cell area of 0.2 $cm^2$ could be achieved by adopting various interface control methods.

• Ecology and Resilient Infrastructure
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• v.8 no.4
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• pp.194-203
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• 2021

With the recent increase in maintenance works on water and sewer pipes as well as district heating supply pipes, pavement cutting work using pavement cutter is on the rise. The pavement cutting operation generates considerable dust (cutting sludge) as well as noise; therefore, it is necessary to apply eco-friendly technologies that have low noise and dust recovery capability. Thus far, various equipment for recovering dust have been developed; however, there is a limitation in that the environmental friendliness is not quantified. Therefore, in this study, we developed a low-noise, dust-recovery type pavement cutter that can fundamentally remove the causes of environmental hazards such as noise and dust and evaluated the eco-friendliness of the pavement cutting process performed by this cutter. To this end, an integrated water cooling-sludge recovery system composed of a vacuum device and a sludge suction unit was developed, and the developed system was applied to a pavement cutter. Subsequently, the developed equipment was applied to the test bed, and data related to its eco-friendliness were collected and evaluated. The results showed that the cutting sludge recovery rate of the developed equipment was greater than 83%, the noise level was approximately 82 - 83 dB, and the sound power level was 115 dB. The results of this study will be used as basic data to develop improved pavement cutters in the future with improved cutting sludge recovery performance and lower noise.

• Korean Journal of Artificial Intelligence
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• v.11 no.2
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• pp.39-44
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• 2023

The creativity of thesis is that the significance of cyber security challenges in blockchain. The variety of enterprises, including those in the medical market, are the targets of cyberattacks. Hospitals and clinics are only two examples of medical facilities that are easy targets for cybercriminals, along with IoT-based medical devices like pacemakers. Cyberattacks in the medical field not only put patients' lives in danger but also have the potential to expose private and sensitive information. Reviewing and looking at the present and historical flaws and vulnerabilities in the blockchain-based IoT and medical institutions' equipment is crucial as they are sensitive, relevant, and of a medical character. This study aims to investigate recent and current weaknesses in medical equipment, of blockchain-based IoT, and institutions. Medical security systems are becoming increasingly crucial in blockchain-based IoT medical devices and digital adoption more broadly. It is gaining importance as a standalone medical device. Currently the use of software in medical market is growing exponentially and many countries have already set guidelines for quality control. The achievements of the thesis are medical equipment of blockchain-based IoT no longer exist in a vacuum, thanks to technical improvements and the emergence of electronic health records (EHRs). Increased EHR use among providers, as well as the demand for integration and connection technologies to improve clinical workflow, patient care solutions, and overall hospital operations, will fuel significant growth in the blockchain-based IoT market for linked medical devices. The need for blockchain technology and IoT-based medical device to enhance their health IT infrastructure and design and development techniques will only get louder in the future. Blockchain technology will be essential in the future of cybersecurity, because blockchain technology can be significantly improved with the cybersecurity adoption of IoT devices, i.e., via remote monitoring, reducing waiting time for emergency rooms, track assets, etc. This paper sheds the light on the benefits of the blockchain-based IoT market.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2309-2314
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• 2007

The application analysis of bubble pump on the domestic solar water heater system is presented. The system investigated in this study is a passive device, self pumping and self regulating. It was test to use the bubble pump on solar water heater system. The test experiment has been taken on the existed vacuum tube about the efficiency, working fluid temperature and pressure and circulated power. In order to check the working temperature and working pressure effectively, the bubble pump was test separated from the solar water heater. The equipment consists of the bubble pump, heater and heat exchanger. The main structure of bubble pump was design depend on the character of two phase flow. The complete system was instrumented to measure pressures, temperatures and flow-rates at various locations. The theory analysis of design bubble pump has been given and the experiment design has been included in the paper.

• Bulletin of the Korean Chemical Society
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• v.31 no.2
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• pp.291-297
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• 2010

This article introduces a facile nanoparticle self-assembly/annealing method for the preparation of nanoisland films. First, nanoparticle-polymer multilayer films are prepared with layer-by-layer assembly. Nanoparticle multilayer films are then annealed at $~500^{\circ}C$ in air to evaporate organic matters from the films. During the annealing process, the nanoparticles on the solid surface undergo nucleation and coalescence, resulting in the formation of nanostructured gold island arrays. By controlling the overall thickness (number of layers) of nanoparticle multilayer films, nanoisland films with various island density and different average sizes are obtained. The surface property of gold nanoisland films is further controlled by the self-assembly of alkanethiols, which results in an increased surface hydrophobicity of the films. The structure and characteristics of these nanoisland film arrays are found to be quite comparable to those of nanoisland films prepared by vacuum evaporation method. However, this self-assembly/annealing protocol is simple and requires only common laboratory supplies and equipment for the entire preparation process.

• KEPCO Journal on Electric Power and Energy
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• v.2 no.3
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• pp.425-431
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• 2016

Supply Capability of the generator, if the maximum demand occurs, refers to the maximum power that can be stably supplied and it is possible to maintain stable power supply to be greater than actual load. However, unexpected power demand and reduction in supply Capability due to stop of unexpected generator in operation can temporarily make a big chaos in power system. In fact, due to a lack of power supply Capability in the country, enforced emergency load adjustment to the September 15, 2011, the circulation power outage has occurred in several cities. As the result, interrupted operation of the elevator and stopped hospital medical equipment led to a great deal of trouble to people's lives, causing a social problem. At that time, it was found that a failed frequency control because of smaller actual supply Capability than that of predicted. The difference was about 1,170 MW with Gas turbine power plant. By accurately calculating the generator supply capability, we can not only grasp the power reserve rate, but also correspond to the time of power supply instability.