• Journal of Korean Vacuum Science & Technology
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• v.2 no.2
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• pp.118-121
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• 1998

Diisopropylselenide (DIPSe) is employed for the metalorganic vapor phase epitaxy (MOVPE) of ZnSe in order to eliminate premature gas phase reaction while maintaining negligible carbon incorporation and preserving relatively low growth temperature. In combination with dimethylzinc, single crystalline ZnSe layers were grown on GaAs at temperature around 450$^{\circ}C$. Secondary ion mass spectrometry showed a negligible carbon incorporation in ZnSe films grown from DIPSe even at high [Ⅵ]/[II] ratios, in contrast of a carbon concentration of 1021 cm-3 in ZnSe films grown from diallyselenide (DASe). Crystalline and interface quality are demonstrated by secondary electron microscopy, secondary ion mass spectroscopy and double crystal X-ray diffraction.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.178-178
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• 2010

We have deposited aluminum-doped ZnO thin films on borosilicate glass by atomic layer deposition. Diethylzinc (DEZ) and dimethylaluminum isopropoxide (DMAIP) were used as the metal precursor and the Al-dopant, respectively. Water was used as an oxygen source. DMAIP was successfully used as an aluminum precursor for chemical vapor deposition and ALD. All deposited films showed n-type conduction. The resistivity decreased to a minimum and then increased with increasing the aluminum content. The carrier concentration increased and the carrier mobility decreased with increasing the DMAIP to DEZ pulse ratio. The average optical transmittance was nearly 80 % in the visible part of the spectrum. The absorption edge moved to the shorter wavelength region with increasing the DMAIP to DEZ pulse ratio. Our results indicate that DMAIP is suitable for Al doping of ZnO films.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.140-140
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• 2010

Non-mass analyzed ion shower doping (ISD) technique with a bucket-type ion source or mass-analyzed ion implantation with a ribbon beam-type has been used for source/drain doping, for LDD (lightly-doped-drain) formation, and for channel doping in fabrication of low-temperature poly-Si thin-film transistors (LTPS-TFT's). We reported an abnormal activation behavior in boron doped poly-Si where reverse annealing, the loss of electrically active boron concentration, was found in the temperature ranges between $400^{\circ}C$ and $650^{\circ}C$ using isochronal furnace annealing. We also reported reverse annealing behavior of sequential lateral solidification (SLS) poly-Si using isothermal rapid thermal annealing (RTA). We report here the importance of implantation conditions on the dopant activation. Through-doping conditions with higher energies and doses were intentionally chosen to understand reverse annealing behavior. We observed that the implantation condition plays a critical role on dopant activation. We found a certain implantation condition with which the sheet resistance is not changed at all upon activation annealing.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.461-461
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• 2010

For a low dielectric constant inter-metal dielectric application, the low-k SiCOH film with a dielectric constant of 2.8-3.2 has been deposited by plasma-enhanced chemical vapor deposition with decamethylcyclopentasiloxane, cyclohexane, and helium which is carrier gas. In this work, we investigated chemical deposition rate, dielectric constant, characterization of plasma polymer films according to temperature(25C-200C) of substrate and change of component concentration. We measured impedance by using V-I prove during process. From experimental result, deposition rate decrease with increasing temperature. Through real time impedance analysis of chamber, we find corelation between film thickness and impedance by assuming equivalent circuit.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.145.1-145.1
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• 2013

A prerequisite for the development of graphene-based field effect transistors (FETs) is reliable control of the type and concentration of carriers in graphene. These parameters can be manipulated via the deposition of atoms, molecules, and polymers onto graphene as a result of charge transfer that takes place between the graphene and adsorbates. In this work, we demonstrate a unique and facile methodology for the homogenous and stable p-type doping of graphene by hybridization with ZnO thin films fabricated by MeV electron beam irradiation (MEBI) under ambient conditions. The formation of the ZnO/graphene hybrid nanostructure was attributed to MEBI-stimulated dissociation of zinc acetate dihydrate and a subsequent oxidation process. A ZnO thin film with an ultra-flat surface and uniform thickness was formed on graphene. We found that homogeneous and stable p-type doping was achieved by charge transfer from the graphene to the ZnO film.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2002.11a
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• pp.171-184
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• 2002

Approx. 200,000 bpd vacuum residue oil is produced from oil refineries in Korea. These are supplying to use asphalt, high sulfur fuel oil, and upgrading at the residue hydro-desulfurization unit. Vacuum residue oil has high energy content, however high sulfur content and high concentration of heavy metals represent improper low grade fuel. To meet growing demand for effective utilization of vacuum residue oil from refineries, recently some of the oil refinery industries in Korea, such as SK oil refinery and LG Caltex refinery, have already proceeded feasibility study to construct 435-500 MWe IGCC power plant and hydrogen production facilities. Recently, KIER(Korea Institute of Energy Research) are studing on the Vacuum Residue gasification process using an oxygen-blown entrained-flow gasifier. The experiment runs were evaluated under the reaction temperature : 1,100~1,25$0^{\circ}C$, reaction pressure : 1~6kg/$\textrm{cm}^2$G, oxygen/V.R ratio : 0.8~0.9 and steam/V.R ratio : 0.4-0.5. Experimental results show the syngas composition(CO+H$_2$) : 85~93%, syngas flow rate : 50~110Mm$^3$/hr, heating value : 2,300~3,000 ㎉/Nm$^3$, carbon conversion : 65~92, cold gas efficiency : 60~70%. Also equilibrium modeling was used to predict the vacuum residue gasification process and the predicted values were compared reasonably well with experimental data.

• Journal of Energy Engineering
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• v.12 no.1
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• pp.49-57
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• 2003

Approx. 200.000 bpd vacuum residue oil is produced from oil refineries in Korea, and is supplied to use asphalt, high sulfur fuel oil and for upgrading at the residue hydro-desulfurization unit. Vacuum residue oil has high energy content, however its high sulfur content and high concentration of heavy metals represent improper low grade fuel. To meet growing demand for effective utilization of vacuum residue oil from refineries, recently some of the oil refinery industries in Korea, such as SK oil refinery and LG Caltex refinery, have already proceeded feasibility study to construct 435~500 MWe IGCC power plant and hydrogen production facilities. Recently, KIER (Korea Institute of Energy Research) are studying on the Vacuum Residue gasification process using an oxygen-blown entrained-flow gasifier. The experiment runs were evaluated under the reaction temperature: 1.100~l,25$0^{\circ}C$, reaction pressure: 1~6 kg/$\textrm{cm}^2$G, oxygen/V.R ratio: 0.8~0.9 and steam/V.R ratio: 0.4~0.5. Experimental results show the syngas composition (CO+H$_2$): 85~93%, syngas flow rate: 50~l10 Nm$^3$/hr, heating value: 2,300~3,000 k㎈/Nm$^3$, carbon conversion: 65~92, cold gas efficiency: 60~70%. Also equilibrium modeling was used to predict the vacuum residue gasification process and the predicted values were compared reasonably well with experimental data.

• Journal of Korean Society of Environmental Engineers
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• v.29 no.12
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• pp.1329-1336
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• 2007

This study was carried out to develop an efficient process abating high NO concentration. A hybrid process of selective catalytic reduction(SCR) and activated carbon fiber(ACF) adsorption was newly designed and tested. Used ACF in NO adsorption was regenerated by simultaneously applying heat and vacuum. The result of ACF regeneration was for superior in the desorption condition at $140^{\circ}C$ and vacuum 600 mmHg. A commercial catalyst was used at the conditions of reaction temperature at $300^{\circ}C$, $NH_3/NO$ mole ratio = 1.0 for SCR process. NO evolved from ACF regeneration reactor could be removed by SCR reactor up to 98%. But high concentration of NO was exhausted from SCR reactor for one minute when the flue gas of NO 300 ppm and deserted NO from ACF regeneration were simultaneously treated by the same SCR reactor. Therefore, it is necessary to use additional small sized SCR reactor or to increase $NH_3$ concentration for a short time along with NO concentration rather than to mix flue gas with the gas evolving from ACF regeneration at fixed $NH_3$ inlet concentration. The hybrid process of SCR and ACF showed high NO removal efficiency over 80% at any time courses. Through the repeated cycles, stable DeNOx efficiency was maintained, indicating that the hybrid process would be a good countermeasure to the spotaneously high NO concentration instead of increasing the SCR capacity.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.104-104
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• 2015

Due to the demand of the cold neutron flux in the neutron science and beam utilization technology, the cold neutron source (CNS) has been constructed and operating in the nuclear research reactor all over the world. The majority of the heat load removal scheme in the CNS is two-phase thermosiphon using the liquid hydrogen as a moderator. The CNS moderates thermal neutrons through a cryogenic moderator, liquid hydrogen, into cold neutrons with the generation of the nuclear heat load. The liquid hydrogen in a moderator cell is evaporated for the removal of the generated heat load from the neutron moderation and flows upward into a heat exchanger, where the hydrogen gas is liquefied by the cryogenic helium gas supplied from a helium refrigeration system. The liquefied hydrogen flows down to the moderator cell. To keep the required liquid hydrogen stable in the moderator cell, the CNS consists of an in-pool assembly (IPA) connected with the hydrogen system to handle the required hydrogen gas, the vacuum system to create the thermal insulation, and the helium refrigeration system to provide the cooling capacity. If one of systems is running out of order, the operating research reactor shall be tripped because the integrity of the CNS-IPA is not secured under the full power operation of the reactor. To prevent unscheduled reactor shutdown during a long time because the research reactor has been operating with the multi-purposes, the introduction of the standby cooling system (STS) can be a solution. In this presentation, the design considerations are considered how to design the STS satisfied with the following objectives: (a) to keep the moderator cell less than 350 K during the full power operation of the reactor under loss of the vacuum, loss of the cooling power, loss of common electrical power, or loss of instrument air cases; (b) to circulate smoothly helium gas in the STS circulation loop; (c) to re-start-up the reactor within 1 hour after its trip to avoid the Xenon build-up because more than certain concentration of Xenon makes that the reactor cannot start-up again; (d) to minimize the possibility of the hydrogen-oxygen reaction in the hydrogen boundary.

• Journal of Energy Engineering
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• v.14 no.4 s.44
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• pp.268-276
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• 2005

Vacuum Residue (VR) combustion tests were carried out with a 20 kg/hr (fuel feed rate) small scale reactor. The nozzle used was a steam atomized, internal mixing type. Compared to heavy oil, vacuum residue used in this work is extremely high viscous and contains high percentages of sulfur, carbon residue and heavy metals. To ignite atomized VR particles, it was necessary to preheat the reactor, and it has been done with LP gas. The axial and radial gas temperature, major species concentrations and solid sample were analyzed when varying the fuel feed rate. The main reaction zone of atomized VR-air flame in a reactor was anticipated within about 1 m from the burner tip by considering the profiles oi gas temperature, species concentration and particle size measured along with the reactor. At downstream, the thermally, fully developed temperature distribution was obtained. SEM photographs revealed that VR carbon particles collected from the reactor are porous and have many blow-holes on the particle surface.