• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.25-29
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The relationship of transporting speed according to the change of flexural beam shape is verified and the system performance for practical use is evaluated.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 추계학술대회논문집
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• pp.792-796
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• 2006

In recent years, the semiconductor industry and the optical industry is developed rapidly. The recent demand has expanded for optical components such as a optical lens, a optical semiconductor and a measuring instrument. Object transport systems are driven typically by the magnetic field and the conveyer belt. Recent industry requires more faster and efficient transport system. However, conventional transport systems are not adequate for transportation of optical elements and semiconductors. Because conveyor belts can damage precision optical elements by the contact force and magnetic systems can destroy the inner structure of semiconductor by the magnetic field. In this paper, the levitation transport system using ultrasonic wave is developed for transporting precision elements without damages. This transport system is using 2-mode ultrasonic wave excitation and flexural beam modes shapes are evaluated. It compared simulation results with experimental results