• Title/Summary/Keyword: underlayer

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In-situ Analysis on the Effect of Mo Underlayer on Hillock Formation Behavior in Al Thin Films (Al 박막의 힐록 형성에 미치는 Mo 하부층의 영향에 관한 실시간 분석)

  • Lee, Yong-Duck;Hwang, Soo-Jung;Lee, Je-Hun;Joo, Young-Chang;Park, Young-Bae
    • Korean Journal of Materials Research
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    • v.17 no.1
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    • pp.25-30
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    • 2007
  • The in-situ scanning electron microscopy observation of real-time hillock evolution in pure hi thin films on glass substrate during Isothermal annealing was analyzed quantitatively to understand the compressive stress relaxation mechanism by focusing on the effect of Mo interlayer between Al film and glass substrate. There is a good correlation between the hillock-induced stress relaxation by in-situ scanning electron microscopy observation ana the measured stress relaxation by wafer curvature method. It is also clearly shown that the existence of Mo interlayer plays an important role in hillock formation probably due to the large difference in interfacial diffusivity of Al films.

The Effect of Thickness and Underlayer on Crystallographic Properties of Co-Cr Thin Films (CoCr 박막의 결정성에 미치는 두께 및 하지층의 영향)

  • Choi, Sung-Min;Kim, Jae-Hwan;Keum, Min-Jong;Kim, Kyung-Hwan;Nakagawa, Nakagawa;Naoe, M.
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1447-1449
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    • 1998
  • The c-axis orientation plays a very important role in controlling the main parameters of the perpendicular magnetic recording media, such as perepndicular magnetic anisotropy field $H_{K{\bot}}$, the ratio of coercive force $H_{C{\bot}}/H_{C//}$, the recording density $D_{50}$, and the dispersion of the c-axis orientation $\Delta\theta_{50}$, which is quite important for the performance as perpendicular recording media, as well as the magnetic properties of the film. In this study, the essential process requirement for preparing the Co-Cr films with the superior c-axis orientation, the dependence of $\Delta\theta_{50}$ and the magnetic properties on the film thickness $\delta$, and the effect of underlayer on the dispersion of c-axis orientation have been investigated for both the FTS and DCM system.

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Reflow in Metallization Process (금속 배선 공정에서의 reflow 현상)

  • Lee, Seung-Yun;Park, Jong-Uk
    • Korean Journal of Materials Research
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    • v.9 no.5
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    • pp.538-543
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    • 1999
  • The theory of the reflow applied to metallization process was studied, and the factors affecting the reflow and the relation between the reflow and the grain growth were investigated. The driving force for the metal reflow is the difference in chemical potentials along the metal surface, and it causes the atom movement. On condition that metal interconnect is fabricated for semiconductor devices, surface diffusion is the primary atom movement mechanism. The metal reflow is influenced by reflow temperature, reflow time, reflow ambient, thin film thickness, thin film material, underlayer material, pattern size, and aspect ratio. It is supposed that the reflow characteristic varies according to the grain growth during the reflow, so the effect of the grain growth on the reflow should be considered.

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The Effect of Additional Elements X on Magnetic Properties of CoCrTa/Cr-X Thin Film (CoCrTa/Cr-X 자성박막의 자기적성질에 미치는 첨가원소 X의 영향)

  • 김준학;박정용;남인탁;홍양기
    • Journal of the Korean Magnetics Society
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    • v.3 no.4
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    • pp.314-319
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    • 1993
  • The Effects of additional element X (X = Si, Mo, Cu, Gd) on magnetic properties and microstructure of Co-1Zat%Cr-Zat%Ta/Cr-X magnetic thin film were investigated. The thickness changes of Cr-X underlayer and CoCrTa magnetic layer were in the range of $1000~2000\AA$ and $200~800\AA$. respectively. Substrate temperatures were controlled from $100^{\circ}C$ to $200^{\circ}C$. Increase of coercivity by about 100~200 Oe was observed in CoCrTa/Cr-X thin films compared to those without additional X element. Cu was the most effective additional element for increasing coercivity. CoCrTa/Cr-Cu thin film shows relatively high coercivity in $1500\AA$ underlayer thickness and $600\AA$ magnetic layer thickness.

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Effects of Sputtering Parameters on the Properties of Co/Pd Multilayered Films

  • Shin, J. N.;Hong, D. H.;Lee, T. D.
    • Journal of Magnetics
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    • v.8 no.4
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    • pp.146-148
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    • 2003
  • Multilayered films of Co/Pd have been studied as a candidate material for a high density perpendicular recording medium due to higher anisotropy energy. However, high exchange coupling among grains results in large transition noise. To reduce the exchange coupling and grain size, addition of 3rd elements and physical separation of grains have been attempted. In the present paper, effects of sputtering pressure, Co sublayer thickness and Pd underlayer thickness on magnetic properties and microstructures were studied. It was found that by increasing sputtering pressure from 5 mTorr to 25 mTorr, Ms decreased to one half and coercivity increased more than 5000 Oe. The increase of the coercivity is associated with physical separation of grains by high pressure sputtering. Ms per volume of Co for Co/Pd multilayered film deposited at 25 mTorr shows continuous decrease with increasing Co sublayer thickness. This was related to void formation and intermixing of Co/Pd interface. Also, effect of Pd underlayer thickness on magnetic properties will be discussed.

Performance of Read Head Offset on Patterned Media Recording Channel (패턴드 미디어 채널에서 트랙 위치 오프셋에 따른 성능)

  • Kim, Jin-Young;Lee, Jae-Jin
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.35 no.11C
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    • pp.896-900
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    • 2010
  • We investigate the bit error rate against signal-to-noise ratio performance corresponding to track mis-registration for patterned media storage. The patterned media channels with and without soft underlayer are implemented, and we simulate using one-dimensional Viterbi detector and two-dimensional soft output Viterbi detector (SOVA) when the track mis-registration is 0% (on-track), 10%, 20%, 30%, and 40%. While the BER performance degrades approximate 0.3 ~ 0.5 dB at 10% track mis-registration, it degrades severe over 10% track mis-registration.

ZnO/Cu/Al2O3 transparent heaters fabricated by magnetron sputtering (마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구)

  • Min, Changheum;Choi, Dooho
    • Journal of the Korean institute of surface engineering
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    • v.55 no.5
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    • pp.284-291
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    • 2022
  • Herein, we studied ultrathin Cu-layer-based transparent heaters embedded between a ZnO underlayer and an Al2O3 overlayer. The anti-reflecting functions for the ZnO and Al2O3 layers by independently varying the layer thicknesses, with the Cu layer thickness fixed at 8.5 nm. The smallest visible light transmittance of 11.1% was achieved when the overlayer and underlayer thicknesses were 90 and 30 nm, respectively. We conducted electrically driven Joule heating test for the Cu layers having thicknesses of 8.5 nm (Rs: 14.7 Ohm/sq.) and 19 nm (Rs: 3.4 Ohm/sq.). External voltages were increased with an interval of 2 V until irreversible failures occurred at temperatures of ~390 ℃ and 550 ℃, respectively. At each voltage increase before heater failures, the heater exhibited superior thermal response with the heater temperatures reaching over 90% of the final temperatures. The heaters also showed excellent reproducibility when turning on and off the heater repeatedly.