• Proceedings of the Membrane Society of Korea Conference
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• 2000.04b
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• pp.17-27
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• 2000

• Journal of the Semiconductor & Display Technology
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• v.4 no.4 s.13
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• Journal of the Korean Society for Marine Environment & Energy
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• v.19 no.1
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• pp.18-24
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• 2016

Mineral carbonation is a technology for permanently storing carbon dioxide by reacting with metal oxides containing calcium and magnesium. In this study, we used sea water and alkaline industrial by-product such as paper sludge ash (PSA) for the storage of carbon dioxide through direct carbonation. We found the optimum conditions of both sea water content (mixing ratio of sea water and PSA) and reaction time required in the direct carbonation through various experiments using sea water and PSA. In addition, we compared the amounts of carbon dioxide storage with the cases when sea water and ultra-pure water were separately used as solvents in the direct carbonation with PSA. The amount of carbon dioxide storage was calculated by using both solid weight increase through the carbonation reaction and the contents of carbonate salts from thermal gravimetric analysis. PSA particle used in this study contained 67.2% of calcium. The optimum sea water content and reaction time in the carbonation reaction using sea water and PSA were 5 mL/g and 2 hours, respectively, under the conditions of 0.05 L/min flow rate of carbon dioxide injected at $25^{\circ}C$ and 1 atm. The amounts of carbon dioxide stored when sea water and ultra-pure water were separately used as solvents in the direct carbonation with PSA were 113 and $101kg\;CO_2/(ton\;PSA)$, respectively. The solid obtained through the carbonation reaction using sea water and PSA was composed of mainly calcium carbonate in the form of calcite and a small amount of magnesium carbonate. The solid obtained by using ultra-pure water, also, was found to be carbonate salt in the form of calcite.

• Proceedings of the Membrane Society of Korea Conference
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• 1995.10a
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• pp.74-79
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• 1995

In the last 10 years, membrane science and technology in Korea have grown fast in terms of basic research and process applications. Even the first large commercial membrane plant in Korea was an ion-exchange membrane process built in 1975 for the production of table salt with an annual capacity of 150,000 tons of salt, membrane processes could not draw general interests from industry not until 1987 when a reverse osmosis plant for the production of process water with a capacity of 10,000 m$^3$/day was built by Kugdong Petroleum Co. Today, the production of water by RO over the capacity of 140,000 m$^3$/day is in operation or under construction in Korea. Consumption of ultra pure water increases sharply in recent years mainly due to the rapid expansion of semiconductor industry and the introduction of ultra high pressure boilers for power plants.

• 한국태양에너지학회:학술대회논문집
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• 2012.03a
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• pp.194-199
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• 2012

In this study, for increasing the efficiency of solar collector, the thermal conductivities and viscosities of the pure water and ethanol oxidized multi-walled carbon nanofluids were measured. Nanofluids were manufactured by ultra-sonic dispersing oxidized multi-walled carbon nanotubes(OMWCNTs) in the pure-water and ethanol at the rates of 0.0005 ~ 0.1 vol%. the Thermal conductivities and viscosities of manufactured nanofluids were measured at the low temperature($10^{\circ}C$), the room temperature($25^{\circ}C$) and the high temperature($70^{\circ}C$). For measuring thermal conductivity and viscosity, we used Transient Hot-wire Method and Rotational Digital Viscometer, respectively. As a result, under given temperature conditions, thermal conductivity of the 0.1 vol% pure-water nanofluid improved 7.98% ($10^{\circ}C$), 8.34% ($25^{\circ}C$), and 9.14% ($70^{\circ}C$), and its viscosity increased by 37.08% ($10^{\circ}C$), 33.96% ($25^{\circ}C$) and 21.64% ($70^{\circ}C$) than the base fluids. Thermal conductivity of the 0.1 vol% ethanol nanofluids improved 33.72% ($10^{\circ}C$), 33.14% ($25^{\circ}C$), and 32.36% ($70^{\circ}C$), and its viscosity increased by 37.93% ($10^{\circ}C$), 31.92% ($25^{\circ}C$) and 29.42% ($70^{\circ}C$) than the base fluids.

• Journal of the Semiconductor & Display Technology
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• v.2 no.3
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• pp.1-6
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• 2003

In the rapid changes of the semiconductor manufacturing technologies for early 21st century, it may be safely said that a kernel of terms is the size increase of Si wafer and the size decrease of semiconductor devices. As the size of Si wafers increases and semiconductor device is miniaturized, the units of cleaning processes increase. A present cleaning technology is based upon RCA cleaning which consumes vast chemicals and ultra pure water (UPW) and is the high temperature process. Therefore, this technology gives rise to environmental issue. To resolve this matter, candidates of advanced cleaning processes have been studied. One of them is to apply the electrolyzed water. In this work, electrolyzed water cleaning was compared with various chemical cleaning, using Si wafer surfaces by changing cleaning temperature and cleaning time, and especially, concentrating upon the contact angle. It was observed that contact angle on surface treated with Electrolyzed water cleaning was $4.4^{\circ}$ without RCA cleaning. Amine series additive of high pKa (negative logarithm of the acidity constant) was used to observe the property changes of cathode water.

• Membrane and Water Treatment
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• v.13 no.6
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• pp.259-290
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• 2022

Carbon nanotubes (CNTs), due to their excellent physical, chemical and mechanical properties and their ability to prepare new membranes with attractive properties, have found applications in water and wastewater technology. CNT functionalization, which involves the introduction of different types of functional groups into pure CNTs, improves the capabilities of CNT membranes for water and wastewater treatment. It turns out that CNT-based membranes have many advantages, including enhanced water permeability, high selectivity and anti-fouling properties. However, their full-scale application is still limited by their high cost. With their tremendous separation efficiency, low biofouling potential and ultra-high water flux, CNT membranes have the potential to be a leading technology in water treatment in the future, especially in desalination.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.7
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• pp.287-291
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• 2002

We fabricated the crosslinked films using p-hexadecoxyphenol (p-HP), which is amphiphilic and can form polyion complexes with formaldehyde at the air-water interface. The behavior of polyion complexation at the air-water interface and the surface structure of LB films was investigated by Brewster angle microscope(BAM) and scanning Maxwell-stress microscope (SMM), respectively. Also, the electrical properties for crosslinking in phenol-formaldehyde LB films were investigated by measuring conductivity and dielectric constant. The conductivities of p-HP LB films are as follows: heat-treatment of 1% formaldehyde subphase(3.76$\times$10$^{-15}$ ~4.76$\times$10$^{-1}$5[S/cm])$\times$10$^{-14}$ ~1.74$\times$10$^{-14}$ [S/cm]). Also, relative dielectric constants of p-HP LB films were reduced from 6.76~7.84 (pure water) to 2.97~3.25 (heat-treatment of 1% formaldehyde subphase))

• Journal of the Korea Furniture Society
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• v.19 no.2
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• pp.137-140
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• 2008

This experiment states the ultra pure distilled water penetration depth through ray parenchyma cell in radial direction of Castanea crenata. Heartwood penetration depth was 1.16 times lower than the depth in softwood and that difference was found statistically significant at 75.2 second of penetration. Following go-stop-go cycle, water penetrated in the ray parenchyma cell. At the beginning this speed was high and then it was decreased slowly. Water penetration depth result was compared with alcohol penetration depth. It was found that water penetration in ray parenchyma was found lower than alcohol due to the low surface tension of water.

• Journal of the Korea Furniture Society
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• v.19 no.2
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• pp.111-115
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• 2008

An experiment was conducted to know ultra-pure distilled water penetration depth through large vessel, small vessel, latewood fiber and earlywood fiber in longitudinal direction of Castanea crenata. In heartwood, latewood fiber transported water more than large and small vessel. While in sapwood, small vessel conduction depth was found the highest. Penetration depth of water after 15.0 seconds, no significant difference was observed among earlywood fiber, latewood fiber and earlywood vessel. Whilst in heartwood, no statistical difference was observed among earlywood fiber, latewood fiber and earlywood vessel. At the beginning, the speed of water penetration was high and then gradually decreased.