• Journal of the Microelectronics and Packaging Society
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• v.24 no.4
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• pp.39-46
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• 2017

This paper presents the fabrication of ceramic insulation layer on metallic heat spreading substrate, i.e. an insulated metal substrate, for planar type heater. Aluminum alloy substrate is preferred as a heat spreading panel due to its high thermal conductivity, machinability and the light weight for the planar type heater which is used at the thermal treatment process of semiconductor device and display component manufacturing. An insulating layer made of ceramic dielectric film that is stable at high temperature has to be coated on the metallic substrate to form a heating element circuit. Two technical issues are raised at the forming of ceramic insulation layer on the metallic substrate; one is delamination and crack between metal and ceramic interface due to their large differences in thermal expansion coefficient, and the other is electrical breakdown due to intrinsic weakness in dielectric or structural defects. In this work, to overcome those problem, selected metal oxide buffer layers were introduced between metal and ceramic layer for mechanical matching, enhancing the adhesion strength, and multi-coating method was applied to improve the film quality and the dielectric breakdown property.

• Journal of IKEEE
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• v.26 no.3
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• pp.500-505
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• 2022

In this study, we designed oxide thin-film transistors (TFTs) with dual gate and tri layered split channels, and investigated the structural effect of the TFTs on the electrical characteristics. The dual gates played a key role in increasing the driving current, and the channel structure of tri layers and split form contributed to the increase in the carrier mobility. The tri layered channels consisting of the a-ITGZO and two ITO layers inserted between the gate dielectric and a-ITGZO led to the increase in the on-current by using ITO layers with high conductivity, and the split channels lowered series resistance of the channels. Compared with the mobility (15 cm²/V·s) of the single gate a-ITGZO TFT, the mobility (134 cm²/V·s) of the dual gate tri-layer split channel TFT was remarkably enhanced by the structural effect.

• Journal of electromagnetic engineering and science
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• v.18 no.1
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• pp.63-69
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• 2018

This work demonstrates attenuation effects of plasma on waves propagating in the 26.5-40 GHz range. The effect is investigated via experiments measuring the transmission between two Ka-band horn antennas set 30 cm apart. A dielectric-barrier-discharge (DBD) plasma generator with a size of $200mm{\times}100mm{\times}70mm$ and consisting of 20 layers of electrodes is placed between the two antennas. The DBD generator is placed in a $400mm{\times}300mm{\times}400mm$ acrylic chamber so that the experiments can be performed for plasma generated under various conditions of gas and pressure, for instance, in air, Ar, and He environments at 0.001, 0.05, and 1 atm of pressure. Attenuation is calculated by the difference in the transmission level, with and without plasma, which is generated with a bias voltage of 20 kV in the 0.1-1.4 kHz range. Results show that the attenuation varies from 0.05 dB/m to 9.0 dB/m depending on the environment. Noble gas environments show higher levels of attenuation than air, and He is lossier than Ar. In all gas environments, attenuation increases as pressure increases. Finally, electromagnetic models of plasmas generated in various conditions are provided.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.18 no.11
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• pp.1217-1223
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• 2007

Advanced microwave absorbers for wide oblique incidence angles are required in many applications including wireless communication or vehicle identification in ITS(Intelligent Transport System) where 5.8 GHz DSRC(Dedicated Short Range Communication) system is applied. In this study, two-layered microwave absorber(with a laminate structure of dielectric/magnetic composites) has been designed for the achievement of low reflection coefficient over wide incidence angles at 5.8 GHz. Iron flake particles are used as the filler in the absorbing layer, and the magnetic composite sheet exhibits high magnetic loss due to ferromagnetic resonance in gigahertz frequencies. The surface layer of low dielectric constant containing small amount of carbon black is used as the impedance transformer. On the basis of transmission line theory, the reflection loss has been calculated for the two-layer structure with variation of incident angles for both TE(Transverse Electric) and TM(Transverse Magnetic) polarizations. At the optimum thickness of the composite layers, a low value of reflection loss(less than -10 dB) has been predicted for wide incidence angles up to $55^{\circ}$ which is in good agreement with the measured value determined by free-space measurement.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.19 no.1
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• pp.247-252
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• 2019

The diffraction properties of optical signals by multi-layered periodic structures is formulated in two-dimensional space by using Fourier expansions associated with basic grating profile. The fields in each layer are then expressed in terms of characteristic modes, and the complete solution is found rigorously by using a modal transmission-line theory(MTLT) to address the pertinent boundary-value problems. Such an approach can treat periodic arbitrary gratings containing arbitrarily shaped dielectric components, which may generally have optical properties along directions that are parallel or perpendicular to the multi-layers. This paper illustrates the present approach by comparing our numerical results with data reported in the past for simple periodic circular 2D structures. In addition, this proposed theory can apply easily for more complex configurations, which include multiple periodic regions with several possible canonic shapes and high dielectric constants.

• Korean Journal of Optics and Photonics
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• v.19 no.1
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• pp.73-79
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• 2008

We propose a novel metal-waveguide structure for sustaining long-range surface-plasmon-polaritons (LRSPP). The LRSPP waveguides are composed basically of two asymmetric metal layers: a very thin, finite-width metal strip on top of a metal slab with a dielectric gap in between them. Mode cut-off of LRSPPs excited on the double-metal waveguides is characterized by consistently investigating their dispersion relations and mode profiles. We also confirm experimentally the existence of low-loss, well-confined LRSPP modes by measuring far-field outputs emerging from an edge of the asymmetric double-metal waveguides. In the experiment, we have fabricated several types of SPP waveguide devices including straight lines, S-bend, and Y-branch consisting of gold strips (20 nm-thick, $5{\mu}m$-wide). Overall propagation loss of the proposed double-metal waveguides is quite comparable to that of single metal-strip waveguides, in addition the mode sizes can be tuned by increasing the core-insulator gap between the metal layers to get a higher coupling efficiency with a single-mode fiber in telecom wavelength. The proposed LRSPP waveguides may open up realization of SPP-waveguide sensors or nonlinear SPP-devices by replacing the core-insulator with a bio-fluid or a nonlinear medium.

• Journal of Sensor Science and Technology
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• v.4 no.3
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• pp.51-59
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• 1995

Stress-balanced flat 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ dielectric membrane on silicon substrate has been fabricated. Analyses of stress-deflection and stress-temperature, and visual inspection for the strain diagnostic test patterns were performed in order to characterize stress properties of the membrane. The $SiO_{2}$ layers sandwiched between two $Si_{3}N_{4}$ layers were deposited by three different techniques(PECVD, LPCVD, and APCVD) for the purpose of investigating the dependence of stress on the deposition methods. Some extent of tensile stress in the membrane was always observed regardless of the deposition methods, however it could be balanced against silicon substrate by post-wet oxidation in $1,150^{\circ}C$. Stress-temperature characteristics of the membranes showed that APCVD-LTO was better as mid-$SiO_{2}$ layer than PECVD - or LPCVD - $SiO_{2}$ when there was no oxidation process.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.3
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• pp.63-67
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• 2016

In this paper, we present an indirect method of elastic modulus measurement for various lamination layers formed on polymer-based compliant substrates. Although the elastic modulus of every component is crucial for mechanically reliable microelectronic devices, it is difficult to accurately measure the film properties because the lamination layers are hardly detached from the substrate. In order to resolve the problem, 3-point bending test is conducted with a film-substrate specimen and area transformation rule is applied to the cross-sectional area of the film region. With known substrate modulus, a modulus ratio between the film and the substrate is calculated using bending stiffness of the multilayered specimen obtained from the 3-point bending test. This method is verified using electroplated copper specimens with two types of film-substrate structure; double-sided film and single sided film. Also, common dielectric layers, prepreg (PPG) and dry film solder resist (DF SR), are measured with the double-sided specimen type. The results of copper (110.3 GPa), PPG (22.3 GPa), DF SR (5.0 GPa) were measured with high precision.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1129-1132
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• 1995

In the preparation of the layered $BaTiO_3$ thin films with high performance, the new stacking method using the continuous cooling of the substrate was introduced. Amorphous/polycrystalline $BaTiO_3$ layered structure was confirmed by SEM and index of refraction. The layered $BaTiO_3$ thin films formed by the new stacking method showed such a high dielectric constant that the layered structure could not be explained by a stacking structure of the two defined layers but could only be explained by multi-layered structure, i.e. amorphous/micro crystalline/polycrystalline structure. The layered $BaTiO_3$ thin film with a thickness of 240 nm showed higher capacitance per unit area and breakdown strength than the double layered $BaTiO_3$ thin film prepared by the conventional stacking method. And well defined ferroelectric hysteresis leer was observed in the layered $BaTiO_3$ thin film with a thickness of 200 nm.

• Journal of the Korea Institute of Military Science and Technology
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• v.18 no.2
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• pp.139-145
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• 2015

In this paper, the flexible piezoelectric nanocomposite generator(NCG) device based on $BaTiO_3$ nanostructures was fabricated via simple and low-cost spin coating method. The $BaTiO_3$ nanostructures synthesized by self-assembly reaction showed dendrite morphologies. To produce the piezoelectric nanocomposite(p-NC layer) which acts as an electric energy source in NCG device, the piezoelectric nanopowders($BaTiO_3$) were dispersed in polydimethylsiloxane(PDMS). Sequently, the p-NC layer was inserted in two dielectric layer of PDMS; these layers enabled the NCG device flexibility as well as durability prohibiting detachment(exfoliation) for significantly mechanical bending motions. The fabricated NCG device shows average maximum open circuit voltage of 6.2 V and average maximum current signals of 300 nA at 20 wt% composition of $BaTiO_3$ nanostructures in p-NC layer. Finally, the flexible energy harvester generates stable output signals at any rate of frequency which were used to operate LCD device without any external energy supply.