The Effect on Electrical Property of Etched Magnetic Tunnel Junction Stack in $Cl_{2}/Ar\;and\;HBr/Ar\;plasma$
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- 한국자기학회:학술대회 개요집
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- 한국자기학회 2007년도 The 1st International Symposium on Advanced Magnetic Materials
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- pp.132.2-132.2
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- 2007