• 반도체디스플레이기술학회지
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• 제6권1호
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• pp.7-10
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• 2007

In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

• 감성과학
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• 제2권1호
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• pp.105-111
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• 1999

In order to introduce the touch to engineering and industries, it must be preceded to dstablish a quantitative barometer of the feeling. for this purpose, we developed a tactile measuring system to measure physical properties of texture, such as surface roughness, friction coefficient and compliance. The tactile measuring system uses a LASER type displacement sensor, which is a non-contacting system, in measuring the surface roughness. By considering that human tactile system is a contacting mechanism, this non-contacting method needs to be modified. As a precedent research of that, we compared the contacting and non-contacting method in this paper. Surface roughness of ten cloths were measured by using the measuring system, then compared to the test results using the Kawabata evaluation system(KES), which uses a contacting method in measuring the surface roughness.