• 대한치과보철학회지
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• 제45권1호
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• pp.85-97
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• 2007

Statement of problem: Recently, anodic oxidation of cp-titanium is a popular method for treatment of titanium implant surfaces. It is a relatively easy process, and the thickness, structure, composition, and the microstructure of the oxide layer can be variably modified. Moreover the biological properties of the oxide layer can be controlled. Purpose: In this study, the roughness, microstructure, crystal structure of the variously treated groups (current, voltage, frequency, electrolyte, thermal treatment) were evaluated. And the specimens were soaked in simulated body fluid (SBF) to evaluate the effects of the surface characteristics and the oxide layers on the bioactivity of the specimens which were directly related to bone formation and integration. Materials and methods: Surface treatments consisted of either anodization or anodization followed thermal treatment. Specimens were divided into seven groups, depending on their anodizing treatment conditions: constant current mode (350V for group 2), constant voltage mode (155V for group 3), 60 Hz pulse series (230V for group 4, 300V for group 5), and 1000 Hz pulse series (400V for group 6, 460V for group 7). Non-treated native surfaces were used as controls (group 1). In addition, for the purpose of evaluating the effects of thermal treatment, each group was heat treated by elevating the temperature by $5^{\circ}C$ per minute until $600^{\circ}C$ for 1 hour, and then bench cured. Using scanning electron microscope (SEM), porous oxide layers were observed on treated surfaces. The crystal structures and phases of titania were identified by thin-film x-ray diffractmeter (TF-XRD). Atomic force microscope (AFM) was used for roughness measurement (Sa, Sq). To evaluate bioactivity of modified titanium surfaces, each group was soaked in SBF for 168 hours (1 week), and then changed surface characteristics were analyzed by SEM and TF-XRD. Results: On basis of our findings, we concluded the following results. 1. Most groups showed morphologically porous structures. Except group 2, all groups showed fine to coarse convex structures, and the groups with superior quantity of oxide products showed superior morphology. 2. As a result of combined anodization and thermal treatment, there were no effects on composition of crystalline structure. But, heat treatment influenced the quantity of formation of the oxide products (rutile / anatase). 3. Roughness decreased in the order of groups 7,5,2,3,6,4,1 and there was statistical difference between group 7 and the others (p<0.05), but group 7 did not show any bioactivity within a week. 4. In groups that implanted ions (Ca/P) on the oxide layer through current and voltage control, showed superior morphology, and oxide products, but did not express any bioactivity within a week. 5. In group 3, the oxide layer was uniformly organized with rutile, with almost no titanium peak. And there were abnormally more [101] orientations of rutile crystalline structure, and bonelike apatite formation could be seen around these crystalline structures. Conclusion: As a result of control of various factors in anodization (current, voltage, frequency, electrolytes, thermal treatment), the surface morphology, micro-porosity, the 2nd phase formation, crystalline structure, thickness of the oxide layer could be modified. And even more, the bioactivity of the specimens in vitro could be induced. Thus anodic oxidation can be considered as an excellent surface treatment method that will able to not only control the physical properties but enhance the biological characteristics of the oxide layer. Furthermore, it is recommended in near future animal research to prove these results.

• 전기화학회지
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• 제11권2호
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• pp.95-99
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• 2008

본 연구에서는 ESD(Electrostatic spray deposition) 코팅법을 이용하여 지르코늄 산화물을 티타늄에 코팅한 전극을 제조하였다. 전처리과정에서 티타늄 기판의 에칭 방법 효율과 에칭된 티타늄 기판에 지르코늄 산화물 막의 제조 및 전기 화학적 특성에 대하여 연구하였다. 염산 에칭은 티타늄 기판에 가늘고 균일한 홈이 생성된다. 강력한 산화제로 사용되는 오존과 차아염소산을 생성하는 효과적인 금속 산화물 전극의 제작과 물질의 특성에 대해 고찰하였고 참고문헌을 통해 지그코늄 산화물에 초점을 맞추었다. 지르코늄 산화물 전극의 제작의 재현성을 향상시키기 위한 코팅 방법으로 지르코늄 옥시클로라이드의 ESD 코팅법을 사용하였다. 티타늄 기판 위에 지르코늄 산화물 막의 형성에 대한 테스트로 SEM, XRD, Cyclic voltammery를 수행하였다.

• 대한전자공학회논문지SD
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• 제39권5호
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• pp.1-7
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• 2002

Deep sub-micron bulk CMOS circuits require gate electrode materials such as metal silicide and titanium silicide for gate oxides. Many authors have conducted research to improve the quality of the sub-micron gate oxide. However, few have reported on the electrical quality and reliability of an ultra-thin gate. In this paper, we will recommend a novel shallow trench isolation structure and a two-step TiS $i_2$ formation process to improve the corner metal oxide semiconductor field-effect transistor (MOSFET) for sub-0.1${\mu}{\textrm}{m}$ VLSI devices. Differently from using normal LOCOS technology, deep sub-micron CMOS devices using the novel shallow trench isolation (STI) technology have unique "inverse narrow-channel effects" when the channel width of the device is scaled down. The titanium silicide process has problems because fluorine contamination caused by the gate sidewall etching inhibits the silicide reaction and accelerates agglomeration. To resolve these Problems, we developed a novel two-step deposited silicide process. The key point of this process is the deposition and subsequent removal of titanium before the titanium silicide process. It was found by using focused ion beam transmission electron microscopy that the STI structure improved the narrow channel effect and reduced the junction leakage current and threshold voltage at the edge of the channel. In terms of transistor characteristics, we also obtained a low gate voltage variation and a low trap density, saturation current, some more to be large transconductance at the channel for sub-0.1${\mu}{\textrm}{m}$ VLSI devices.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권3호
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• pp.252-258
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• 2013

In this paper, a thermally stable nickel silicide technology using the co-sputtering of nickel and titanium atoms capped with TiN layer is proposed for nano-scale metal oxide semiconductor field effect transistor (MOSFET) applications. The effects of the incorporation of titanium ingredient in the co-sputtered Ni layer are characterized as a function of Ti sputtering power. The difference between the one-step rapid thermal process (RTP) and two-step RTP for the silicidation process has also been studied. It is shown that a certain proportion of titanium incorporation with two-step RTP has the best thermal stability for this structure.

• Metals and materials international
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• 제24권6호
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• pp.1303-1308
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• 2018

A new sintering technique for enhancing a densification and hardness of sintered titanium body by supplying hydrogen was developed (Hydrogen Sintering Process, HSP). The HSP was developed by only injecting hydrogen into an argon atmosphere during the core time. As a result, sound titanium sintered bodies with high density and hardness were obtained by the HSP. In addition, a pore size and number of the HSP specimens were smaller than those of the argon atmosphere specimen. It was found that the injecting hydrogen into the argon atmosphere by HSP can prevent the formation of oxide layers, resulting in enhanced densification and hardness.

• 전기학회논문지
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• 제59권4호
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• pp.754-758
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• 2010

In general, Dye-sensitized Solar Cells(DSCs) consist of the nanocrystalline titanium dioxide($TiO_2$) layer which is fabricated on a transparent conductive oxide(TCO) layer such as $F/SnO_2$ glass, a dye adhered to the $TiO_2$, an electrolyte solution and platinum-coated TCO. Among these components, two TCO substrates are estimated to be about 60% of the total cost of the DSCs. Currently novel TCO-less structures have been investigated in order to reduce the cost. In this study, TCO-less DSCs consisting of titanium electrodes were investigated. The titanium electrode is deposited on top of the porous $TiO_2$ layer using electron-beam evaporation process. The porosity of the titanium electrode was found out by the SEM analysis and dye adhesion. As a result, when the thickness of the titanium electrode increased, the surface resistance decreased and the conversion efficiency increased relatively.

• Bulletin of the Korean Chemical Society
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• 제32권10호
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• pp.3730-3734
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• 2011

The degree of self-assembly and the size variation of nanotubular structures in anodic titanium oxide prepared by the anodization of titanium in ethylene glycol containing 0.25 wt % $NH_4F$ at 40 V were investigated as a function of anodization time. We found that the degree of self-assembly and the size of the nanotubes were strongly dependent on thickness deviation and thus indirectly on anodization time, as the thickness deviation was caused by the dissolution of the topmost tubular structures at local areas during long anodization. A large deviation in thickness led to a large deviation in the size and number of nanotubes per unit area. The dissolution primarily occurred at the bottoms of the nanotubes ($D_{bottom}$) in the initial stage of anodization (up to 6 h), which led to the growth of nanotubes. Dissolution at the tops ($D_{top}$) was accompanied by $D_{bottom}$ after the formed structures contacted the electrolyte after 12 h, generating the thickness deviation. After extremely long anodization (here, 70 h), $D_{top}$ was the dominant mode due to increase in pH, meaning that there was insufficient driving force to overcome the size distribution of nanotubes at the bottom. Thus, the nanotube array became disorder in this regime.

• 전기전자학회논문지
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• 제25권1호
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• pp.69-75
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• 2021

본 연구에서는 티타늄(Ti) 금속 박막을 사용해서 값비싼 산화주석(FTO) 전극을 대체된 염료감응형 태양전지(DSSC)의 제작 방법과 전기적 특성에 대해서 고찰하였다. Ti 박막의 증착 시간을 조절하여 박막의 두께를 변화시켰으며, Ti 박막의 두께가 두꺼워지면서 표면저항은 감소하였다. 대략 190nm 두께에서 FTO 박막의 표면저항과 비슷해짐을 알 수 있었으며, 250nm 두께에서 DSSC의 에너지 변환효율 4.24%로 가장 높았다. 더 나아가 DSSC 모듈을 제작해 평가함으로써 상용화의 가능성을 확인하였다.

• Advances in concrete construction
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• 제15권1호
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• pp.1-10
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• 2023

Concrete is one of the most widely used structure materials. Concrete is like the motor of the construction industry. The remarkable feature of this Concrete is its cheapness and low energy consumption. Concrete alone does not show resistance against any force but only against compressive forces. Therefore, steel rebar product is used as a reinforcement and increase the strength of Concrete. It can be done by putting rebar in Concrete in different ways. Rebar rusting is one of the crucial symptoms that cause swift destruction in reinforced structures-factors such as moisture in concrete increase the steel corrosion rate. In most cases, it is difficult to compensate for the damage caused by the corrosion of base metals, so preventing corrosion will be much more cost-effective. Coatings made with nanotechnology can protect Concrete against external degradation factors to prevent water and humidity from penetrating the Concrete and prevent rusting and corrosion of the rebar inside. It prevents water penetration and contamination into the Concrete and increases the Concrete's quality and structural efficiency. In this research, silica and titanium dioxide nanoparticle coatings have been used due to their suitable electrical and thermal properties, resistance to oxidation, corrosion, and wear to prevent the corrosion of rebars in Concrete. The results of this method show that these nanoparticles significantly improve the corrosion resistance of rebars.

• 대한화학회지
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• 제65권6호
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• pp.415-418
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• 2021