• Tribology and Lubricants
• /
• v.31 no.3
• /
• pp.79-85
• /
• 2015

RC delay is a critical issue for achieving high performance of ULSI devices. In order to minimize the RC delay time, we uses the CMP process to introduce high-conductivity Cu and low-k materials on the damascene. The low-k materials are generally soft and fragile, resulting in structure collapse during the conventional high-pressure CMP process. One troubleshooting method is electrochemical mechanical polishing (ECMP) which has the advantages of high removal rate, and low polishing pressure, resulting in a well-polished surface because of high removal rate, low polishing pressure, and well-polished surface, due to the electrochemical acceleration of the copper dissolution. This study analyzes an electrochemical state (active, passive, transpassive state) on a potentiodynamic curve using a three-electrode cell consisting of a working electrode (WE), counter electrode (CE), and reference electrode (RE) in a potentiostat to verify an electrochemical removal mechanism. This study also tries to find optimum conditions for ECMP through experimentation. Furthermore, during the low-pressure ECMP process, we investigate the effect of current density on surface roughness and removal rate through anodic oxidation, dissolution, and reaction with a chelating agent. In addition, according to the Faraday’s law, as the current density increases, the amount of oxidized and dissolved copper increases. Finally, we confirm that the surface roughness improves with polishing time, and the current decreases in this process.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.12 no.1
• /
• pp.50-55
• /
• 1999

We have investigated the $LiMn_2O_4$system as an cathode material for lithium rechargeable batteries. $LiMn_2O_4$spinel oxides have been synthesized by a solid state methode. We varied sintering time at a fixed sintering temperature of 75$0^{\circ}C$. In order to investigate the electrochemical properties of prepared $LiMn_2O_4$we assembled three-electrode cells using the working electrode as active material and Li metal as the counter and reference electrodes. The electrolyte was 1 M LiPE$_{6}$-EC:DEC(1:1 by volume). The particle size of sample synthesized at 75$0^{\circ}C$ ranged about 60$\mu m$. The discharge capacity of a cell involving spinel $LiMn_2O_4$ increased with increasing sintering time.e.

• Journal of Electrochemical Science and Technology
• /
• v.12 no.2
• /
• pp.167-172
• /
• 2021

he progressively improved sensing sensitivity (∆λ_SPR/∆n, nm/RIU) to detect the refractive index is observed on the SPR platform of an Au-covered epoxy gratings in an increase in potential cycling in a typical three-electrode cell. Here, a DVD-R optical disc was used as a structure template to prepare an Au-covered epoxy gratings, and the newly formed reverse track pitch structure on the epoxy substrate was used as a working electrode directly in aqueous sulfuric acid solution. It is expected that Au reconstruction by potential cycling in sulfuric acid electrolyte increases the packing density of Au atoms in the grain boundary and improves the propagation of electromagnetic waves.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.6 no.2
• /
• pp.120-129
• /
• 1994

A numerical investigation has been carried out for the electrochemical reaction, mass and heat transfer characteristics of the Molten Carbonate Fuel Cell(MCFC) stack. The effects of cooling air channel and water gas shift reaction were taken into account. The current density distribution of electrodes, the molecular fractions of reactant gasses and three dimensional temperature distribution can be calculated and shown by several lines of equivalent values. The results have been compared with the existing ones, and reasonable agreement has been obtained. To examine the influence of changing parameters, such as the composition of reactant gases, the target average current density, the utilization of reactant gases, the cooling air inlet temperature and flow rates, the computer simulation has been done. The analysis method and computer program developed in this study will be greatly helpful to design and verify the optimum operating condition of MCFC stack.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.24 no.4
• /
• pp.333-339
• /
• 2011

In this work, electrochemical characteristics and optical transmittance of carbon nanotubes (CNTs) counter electrodes which had different amount of CNTs in CNTs slurries were analyzed. Two-step heat treatment processes were applied to achieve well-fabricated CNTs electrode. Three sets of CNTs electrodes and dye-sensitized solar cells (DSSCs) with CNTs counter electrodes were prepared. As the amount of CNTs increased, sheet resistance of CNTs electrode decreased. CNTs electrode with low sheet resistance had low electrochemical impedance and fast redox reaction. On the other hand, in case of CNTs counter electrode with low density of CNTs, performance of the dye-sensitized solar cell was improved due to its high optical transmittance. We found that the transmittance of CNTs counter electrode influence the performance of dye-sensitized solar cells.

• Toxicological Research
• /
• v.30 no.2
• /
• pp.117-120
• /
• 2014

Uranium is toxic and radioactive traces of it can be found in natural water and soils. High concentrations of it in biological systems cause genetic disorders and diseases. For the in vivo diagnosis, micro and nano range detection limits are required. Here, an electrochemical assay for trace toxic uranium was searched using stripping voltammetry. Renewable and simplified graphite pencils electrode (PE) was used in a three-electrode cell system. Seawater was used instead of an electrolyte solution. This setup can yield good results and the detection limit was attained to be at $10{\mu}gL^{-1}$. The developed skill can be applied to organic liver cell.

• Journal of Environmental Science International
• /
• v.19 no.8
• /
• pp.941-949
• /
• 2010

The three electrode system was used to detect the pesticide fenitrothion ($C_9H_{12}NO_5PS$. MW=277.24) using cyclic voltammetry (CV) and square wave anodic stripping voltammetry (SWASV). The working electrode was mercury immobilized on a carbon nanotube paste electrode (Hg-CNTPE). At the optimized condition, the limit of detection (LoD) was 0.6 ppt ($2.16{\times}10^{-12}\;M$), and the relative standard deviation was 0.035% (n=15). And there is more sensitive in detecting fenitrothion than common type carbon nanotube paste electrode. When it was implanted into the brain of live fish (carp), the existence of fenitrothion was measured without any destruction or damage of tissue.

• Journal of the Korean Electrochemical Society
• /
• v.17 no.3
• /
• pp.201-208
• /
• 2014

A Pt catalyst ($Pt/G_xC_y$) supported on the hybrid supporting materials composed of graphene oxide (GO) and carbon black (C) was fabricated using polyol method to improve the durability of electrocatalysts. The electrochemical performances measured by cyclic voltammograms using three-electrode system revealed that the properly designed $Pt/G_xC_y$ catalyst exhibited higher durability than that of Pt/C catalyst without sacrificing an electrocatalytic acivity. In the oxygen reduction reaction (ORR) performed in acid solution with the rotating disk electrode, the $Pt/G_xC_y$ catalyst showed greater mass and area-specific activity than those of Pt/C catalyst.

• Journal of Electrochemical Science and Technology
• /
• v.1 no.2
• /
• pp.69-74
• /
• 2010

Methodologies to improve photovoltaic performance of dye-sensitized solar cell (DSSC) are reviewed. DSSC is usually composed of a dye-adsorbed $TiO_2$ photoanode, a tri-iodide/iodide redox electrolyte and a Pt counter electrode. Among the photovoltaic parameters of short-circuit photocurrent density, open-circuit voltage and fill factor, short-circuit photocurrent density is the collective measure of light harvesting, charge separation and charge collection efficiencies. Internal quantum efficiency is known to reach almost 100%, which indicates that charge separation occurs without loss by recombination. Thus, light harvesting efficiency plays an important role in improvement of photocurrent. In this paper, technologies to improve light harvesting efficiency, including surface area improvement by nano-dispersion, size-dependent light scattering efficiency, bi-functional nano material, panchromatic absorption by selective positioning of three different dyes and transparent conductive oxide (TCO)-less DSSC, are introduced.

• Transactions of the Korean hydrogen and new energy society
• /
• v.33 no.4
• /
• pp.337-342
• /
• 2022

In this study, a water electrolysis was studied to investigate the effect of ammonia on current density and H2 gas production. A H type cell with three electrodes was used and KOH solution was used as electrolyte. The conventional platinum foil was used for working electrode, whereas nickel foam was used for counter electrode. CV experiment was performed to see the activity of ammonia oxidation reaction. In addition, CP experiment was done to examine the dependence of Faraday efficiency of hydrogen on current density and NH3 concentration. The CV result shows the 0.5M NH3 concentration required for highest current density and reliable operation. The CP result shows the increased current density leads to higher H2 generation. The higher H2 production and subsequent energy efficiency was observed for 0.5M NH3 using a Pt/13%Rh coil for a cathode as compared to those in water electrolysis.