• 제목/요약/키워드: thickness distribution

검색결과 2,282건 처리시간 0.033초

보조 전극을 이용한 패턴된 전극에서의 전류 밀도 분포의 최적화 (Optimization of Current Distributions of Electroplating on Patterned Substrates with the Auxiliary Electrode)

  • 김남석;모화동;강탁
    • 한국표면공학회지
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    • 제28권3호
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    • pp.164-173
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    • 1995
  • Based on the potential-theory model for secondary current distribution, we could predict the thickness distributions of electroplating on patterned substrates with the different size of the auxiliary electrode. The substrates contain lithographic patterns at each sample geometry. Each sample geometry had different current distribution at the same condition except the size of the auxiliary electrodes. The size effect of the auxiliary electrode on thickness distribution of electrodeposition on patterned electrode was investigated in a series of experiments. Copper was galvanostatically deposited from an acid-sulfate solution in a reciprocating paddle cell. The thickness distributions of the workpiece scale measured by profilometry across the specimen were in good agreement with the current distribution predicted by boundary element method.

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박막두께 예측을 위한 증착 공정 모델링에 관한 연구 (Study on Evaporating Process Modeling for Estimation of Thin-film Thickness Distribution)

  • 이응기;이동은;김숙한
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2006년도 춘계학술대회
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    • pp.156-159
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    • 2006
  • In order to design an evaporation system, geometric simulation of film thickness distribution profile is required. In this paper, a geometric modeling algorithm is introduced for process simulation of the evaporating process. The physical fact of the evaporating process is modeled mathematically. Based on the developed method, the thickness of the thin-film layer can be successfully controlled.

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평판 충돌 제트로 생성되는 액막의 두께 분포 특성 연구 (A Study of the Thickness Characteristics of the Liquid Sheet Formed by an Impinging Jet onto a Plate)

  • 김민석;오진형;정회민;강보선
    • 한국분무공학회지
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    • 제27권2호
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    • pp.77-83
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    • 2022
  • In this study, the thickness of the liquid sheet formed by a low speed impinging jet onto a flat plate was measured by the direct contact method. The spatial distribution characteristics of the sheet thickness in the radial and circumferential directions, and the effects of jet velocity and liquid viscosity were analyzed. The measurement results were compared with the theoretical predictions. The wavy surface was observed in the case of low viscosity water, but not in the high viscosity aqueous glycerol solutions. The sheet thickness increased as the circumferential angle increased or the distance from the impinging point increased, but the thickness decreased as the circumferential angle increased around the impinging point. As the jet speed increased, the sheet thickness decreased, and the sheet thickness increased as the liquid viscosity increased. Comparison with the theoretical predictions showed that the measurement results agreed well in the case of low viscosity water or high viscosity liquids around the impinging point. The distribution characteristics of the sheet thickness can provide useful means for prediction of spray characteristics in splash plate injectors.

Theoretical prediction on thickness distribution of cement paste among neighboring aggregates in concrete

  • Chen, Huisu;Sluys, Lambertus Johannes;Stroeven, Piet;Sun, Wei
    • Computers and Concrete
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    • 제8권2호
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    • pp.163-176
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    • 2011
  • By virtue of chord-length density function from the field of statistical physics, this paper introduced a quantitative approach to estimate the distribution of cement paste thickness between aggregates in concrete. Dynamics mixing method based on molecular dynamics was employed to generate one model structure, then image analysis algorithm was used to obtain the distribution of thickness of cement paste in model structure for the purpose of verification. By comparison of probability density curves and cumulative probability curves of the cement paste thickness among neighboring aggregates, it is found that the theoretical results are consistent with the simulation. Furthermore, for the model mortar and concrete mixtures with practical volume fraction of Fuller-type aggregate, this analytical formula was employed to predict the influence of aggregate volume fraction and aggregate fineness. And evolution of its mean values were also investigated with the variation of volume fraction of aggregate as well as the fineness of aggregates in model mortars and concretes.

압연판의 두께 정밀도에 관한 연구 (Study on the thickness precision of rolled sheets)

  • 김동원;윤상건
    • 대한기계학회논문집
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    • 제11권5호
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    • pp.837-845
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    • 1987
  • 본 연구에서는 Tozawa의 이와 같은 근사적 3차원 해석법을 검토하여 그 특징 을 살피고 판나비, 판두께, 압하율의 변화가 삼차원변형역과 평면변형역의 최적 경계 면 위치에 미치는 영향을 고찰하고자 한다.

Fabric 형태에 따른 열가소성수지 적층복합재료의 성형성 (Formability of Thermoplastic Laminar Composite depending on the Types of- Fabric)

  • 신익재;이동주
    • 대한기계학회논문집A
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    • 제27권8호
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    • pp.1338-1346
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    • 2003
  • Three-dimensional formability of the thermoplastic laminar composite was studied according to manufacturing conditions. Five different types of the plain weave fabric were used as reinforcement with PET matrix. The square blank was made by press consolidation technique and formed in the type hemisphere. B-factor defined as the ratio of width of yarn and distance between yarns was used as the factor of formability in the type of plain weave fabric. The formability of PET/Glass fabric laminar composite was estimated in terms of forming rate and B-factor with the thickness distribution, area ratio of blank, and intra-ply shear angle. The thickness distribution across hemisphere was strongly affected by the B-factor, forming rate and blank thickness. The area ratio of blank was increased with B-factor, forming rate and blank thickness. Also, it was found that the intra-ply shear angle depends on the B-factor and forming rate.

구름요소의 프로파일 설계에서의 EHL해석의 작용

  • 박태조;김경웅
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1991년도 제13회 학술강연회초록집
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    • pp.50-54
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    • 1991
  • This paper shows the effect of axial profile on the elastohydrodnamic lubrication (EHL) behavior of axially profiled cylindrical roller. For two different type of profiles which have nearly similar elastostatic pressure distribution, the EHL results show large differences. Especially the difference in film shape is larger than that of pressure distribution. Therefore, the magnitude of the minimum film thickness should be a major criteria to design the axial profile of the roller and a new design procedure is presented which take into account the minimum film thickness as well as the pressure distribution.

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급수함수를 이용한 비대칭 이중게이트 MOSFET의 전위분포 분석 (Analysis for Potentail Distribution of Asymmetric Double Gate MOSFET Using Series Function)

  • 정학기
    • 한국정보통신학회논문지
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    • 제17권11호
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    • pp.2621-2626
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    • 2013
  • 비대칭 이중게이트 MOSFET의 전위분포에 대하여 고찰하였으며 이를 위하여 포아송방정식의 해석학적 해를 구하였다. 대칭 DGMOSFET는 3단자 소자로서 상하단의 게이트단자가 상호 연결되어 있어 상하단 동일한 제어능력을 가지고 있으나 비대칭 DGMOSFET 소자는 4단자 소자로서 상하단 게이트단자의 전류제어능력을 각각 설정할 수 있다는 장점이 있다. 전위분포를 구할 때 포아송방정식을 이용하였으며 도핑분포함수에 가우시안 함수를 적용함으로써 보다 실험값에 근사하게 해석하였다. 비대칭 이중게이트 MOSFET의 게이트 단자전압 및 게이트 산화막 두께 그리고 채널도핑의 변화에 따라 전위분포의 변화를 관찰하였다. 비대칭 DGMOSFET의 전위분포를 관찰한 결과, 게이트단자 전압 및 게이트 산화막 두께 등에 따라 전위분포는 크게 변화하는 것을 알 수 있었다. 특히 게이트 산화막 두께가 증가하는 단자에서 전위분포의 변화가 더욱 크게 나타나고 있었으며 채널도핑이 증가하면 드레인 측보다 소스 측 전위분포가 크게 변화하는 것을 알 수 있었다.

비대칭 이중게이트 MOSFET의 전위분포 분석 (Analysis for Potential Distribution of Asymmetric Double Gate MOSFET)

  • 정학기;이종인
    • 한국정보통신학회:학술대회논문집
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    • 한국정보통신학회 2013년도 추계학술대회
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    • pp.691-694
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    • 2013
  • 비대칭 이중게이트 MOSFET의 전위분포에 대하여 고찰하였으며 이를 위하여 포아송방정식의 해석학적 해를 구하였다. 대칭 DGMOSFET는 3단자 소자로서 상하단의 게이트단자가 상호 연결되어 있어 상하단 동일한 제어능력을 가지고 있으나 비대칭 DGMOSFET 소자는 4단자 소자로서 상하단 게이트단자의 전류제어능력을 각각 설정할 수 있다는 장점이 있다. 전위분포를 구할 때 포아송방정식을 이용하였으며 전하분포함수에 가우시안 함수를 적용함으로써 보다 실험값에 근사하게 해석하였다. 비대칭 이중게이트 MOSFET의 게이트 단자전압 및 게이트 산화막 두께 그리고 채널도핑의 변화에 따라 전위분포의 변화를 관찰하였다. 비대칭 DGMOSFET의 전위분포를 관찰한 결과, 게이트단자 전압 및 게이트 산화막 두께 등에 따라 전위분포는 크게 변화하는 것을 알 수 있었다. 특히 게이트 산화막 두께가 증가하는 단자에서 전위분포의 변화가 더욱 크게 나타나고 있었으며 채널도핑이 증가하면 드레인 측보다 소스 측 전위분포가 크게 변화하는 것을 알 수 있었다.

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