• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.11a
• /
• pp.48-48
• /
• 2009

최근 빠른 동작속도와 고 집적도를 얻기 위해 metal oxide semiconductor field effect transistor (MOSFET) 의 크기는 계속 해서 줄어들고 있다. 동시에 게이트의 절연층도 얇아지게 된다. 절연층으로 사용되는 $SiO_2$ 의 두께가 2nm 이하로 얇아 지게 되면 터널링에 의해 누설 전류가 발생하게 된다. 이 문제를 해결하기 위해 $SiO_2$ 를 대체할 고유전체 물질의 연구가 활발하다. 고유전체 물질 중에는 $ZrO_2,\;Al_2O_3,\;HfO_2$ 등이 많이 연구 되어 왔다. 하지만 유전상수 이외에 band gap energy, thermodynamic stability, recrystallization temperature 등의 특성이 좋지 않아 대체 물질로 문제점이 있다. 이를 보안하기 위해 산화물을 합금과 결합시키면 서로의 장점들이 합쳐져 기준들을 만족하는 물질을 만들 수 있고 $HfAlO_3$가 그 중 하나이다. Al를 첨가하는 이유는 문턱전압을 낮추기 위해서다. $HfAlO_3$는 유전상수 18.2, band gap energy 6.5 eV, recrystallization temperature 800 $^{\circ}C$이고 열역학적 특성이 안정적이다. 게이트 절연층은 전극과 기판사이에 적층구조를 이루고 있어 이방성인 드라이 에칭이 필요하고 공정 중 마스크물질과의 선택비가 높아야한다. 본 연구는 $HfAlO_3$박막을 $BCl_3/Ar,\;N_2/BCl_3/Ar$ 유도결합 플라즈마를 이용해 식각했다. 베이스 조건은 RF Power 500 W, DC-bias -100 V, 공정압력 15 mTorr, 기판온도 40 $^{\circ}C$ 이다. 가스비율, RF Power, DC-bias, 공정 압력에 의한 마스크물질과 의 선택비를 알아보았다.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.8 no.1
• /
• pp.97-105
• /
• 1998

Antioxidation mechanism of Al metal powders on $Al_2O_3-C$ refractory was investigated in temperature range from 800 to $1400^{\circ}C$. The addition of 5 wt% Al metal powders suppressed the oxidation of carbon in $Al_2O_3$-C sample. The carbons were distributed uniformly on the surface and the interface of the $Al_2O_3$-C-Al. Reaction products of $Al_4C_3$ and AIN were found with a composition of Al-C at temperatures between 800 and $1200^{\circ}C$ and transformed to $Al_2O_3$ above $1400^{\circ}C$. Cavity structures related to the to the formation of $Al_4C_3$ were observed for the AI-C after heating at $1000^{\circ}C$ ofr 1 hour. Thermodynamic mechanism was considered to discuss the formation $Al_4C_3$, AlN and their transformation to $Al_2O_3$, which leads to the effect of oxidation resistance.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.32 no.8
• /
• pp.118-128
• /
• 2004

Exhaust plume effects on longitudinal aerodynamics of missile were investigated by wind tunnel tests using a solid plume simulator and CFD analyses with both the solid plume and air jet plumes. Approximate plume boundary prediction technique was used to produce the outer shape of the solid plumer and chamber conditions and nozzle shapes of the air jet plumes were determined through plume modeling technique to compensate the difference in thermodynamic properties between air and real plume. From comparisons among turbulence models in case of external flow interaction with the air jet plume, Spalart-Allmaras model turned out to give accurate result and to be less grid-dependent. Effects induced by the plume were evaluated through the computations with Spalart-Allmaras turbulence model and the air jet plume to account for various ratios of chamber and ambient pressure and Reynolds number under the flight test condition.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.21 no.2
• /
• pp.264-274
• /
• 1997

A numerical analysis on condensation and coagulation of the metallic species with fly ash particles pre-existing in an incinerator was performed. Waste was simplified as a mixture of methane, chlorine, and small amounts of Pb and Sn. Vapor-phase amounts of Pb- and Sn -compounds were first calculated assuming a thermodynamic equilibrium state. Then theories on vapor-to-particle conversion, vapor condensation onto the fly ash particles, and particle-particle interaction were examined and incorporated into equations of aerosol dynamics and vapor continuity. It was assumed that the particles followed a log-normal size distribution and thus a moment model was developed in order to predict the particle concentration and the particle size distribution simultaneously. Distributions of metallic vapor concentration (or vapor pressure) were also obtained. Temperature drop rate of combustion gas, fly ash concentration and its size were selected as parameters influencing the discharged amount of metallic species. In general, the coagulation between the newly formed metal particles and the fly ash particles was much greater than that between the metal particles themselves or between the fly ash particles themselves. It was also found that the amount of metallic species discharged into the atmosphere was increased due to coagulation. While most of PbO vapors produced from the combustion were eliminated due to combined effect of condensation and coagulation, the highly volatile species, PbCl$_{2}$ and SnCl$_{4}$ vapors tended to discharge into the atmosphere without experiencing either the condensation or the coagulation. For Sn vapors the tendency was between that of PbO vapors and that of PbCl$_{2}$ or SnCl$_{4}$. To restrain the discharged amount of hazardous metallic species, the coagulation should be restrained, the number concentration and the size of pre-existing fly ash particles should be increased, and the temperature drop rate of combustion gas should be kept low.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.12 no.6
• /
• pp.2888-2897
• /
• 2011

The performance of a geothermal heat pump system using carbon dioxide was investigated by the steady-state cycle simulation program developed in this study. A parametric study was carried out in order to investigate the effect of various operating conditions on the performance of the basic cycle without an IHX(internal heat exchanger). The simulation program consists of several Fortran subroutines for simulating indoor and outdoor heat exchangers, compressors, and expansion valves and Visual Basic subroutines for the graphic user interface(GUI) consisted with pre-processor for input data and post-processor for the output data. Refprop V6.01 was used for estimating the thermodynamic properties and equilibrium behaviors of carbon dioxide. The simulation results were validated by comparing experimental data through a series of case studies. The cycle simulation program developed in this work would seem to be a useful tool in optimizing and establishing economical and efficient operating conditions in the $CO_2$ geothermal heat pump system.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.11 no.2
• /
• pp.449-454
• /
• 2010

In this paper, flow characteristics of R600a in an adiabatic capillary tube were investigated employing the homogeneous flow model. The model is based on fundamental equations of mass, energy and momentum which are solved simultaneously. Two friction factors(Churchill) and viscosity(McAdams) are comparatively used to investigate the flow characteristics. Thermodynamic and transport properties of R600a are calculated employing EES property code. Flow characteristics analysis of R600a in an adiabatic capillary tube is presented to offer the basic design data for the operating parameters. The operating parameters considered in this study include condensation temperature, evaporation temperature, subcooling degree and inner diameter tube of the adiabatic capillary tube. The main results were summarized as follows: condensation and evaporation temperature, inlet subcooling degree and inner diameter tube of an adiabatic capillary tube using R600a have an effect on length of an adiabatic capillary tube. The length of an adiabatic capillary tube using R600a is expressed to the correlation shown in Eq. (15).

• Journal of Microbiology and Biotechnology
• /
• v.19 no.7
• /
• pp.713-717
• /
• 2009

The dependence of the catalytic properties of horseradish peroxidase on the structural changes of ionic liquids was investigated with two water-miscible ionic liquids, N-butyl-3methypyridinium tetraftuoroborate ([$BMP_y$][$BF_4$]) and 1-butyl-3-methylimidazolium methylsulfate ([BMIM][$MeSO_4$]), each of which shares an anion ($BF_4^-$) or a cation ($BMIM^+$) with 1-butyl-3-methylimidazolium tetraftuoroborate ([BMIM][$BF_4$]), respectively. The oxidation of guaiacol (2-methoxyphenol) with $H_2O_2$was used as a model reaction. In order to minimize the effect of solution viscosity on the kinetic constants of the enzymatic catalysis, the enzymatic reactions for the kinetic study were performed in water-ionic liquid mixtures containing 25% (v/v) ionic liquid at maximum. Similarly to the previously reported results for [BMIM][$BF_4$], as the concentration of [$BMP_y$][$BF_4$] increased, the $K_m$value increased with a decrease in the $k_{cat}$value: the $K_m$value increased markedly from 2.8 mM in 100% water to 12.6 mM in 25% (v/v) ionic liquid, indicating that ionic liquid significantly weakens the binding affinity of guaiacol to the enzyme. On the contrary, [BMIM][$MeSO_4$] decreased the Km value to 1.4 mM in 25% (v/v) ionic liquid. [BMIM][$MeSO_4$] also decreased $k_{cat}$more than 3-folds [from 13.8 $s^{-1}$in 100% water to 4.1 $s^{-1}$in 25% (v/v) ionic liquid]. These results indicate that the ionic liquids interact with the enzyme at the molecular level as well as at a macroscopic thermodynamic scale. Specifically, the anionic component of the ionic liquids influenced the catalysis of horseradish peroxidase in different ways.

• Membrane Journal
• /
• v.18 no.4
• /
• pp.317-324
• /
• 2008

Polysulfone membranes were prepared via the phase inversion process. With propionic acid as a nonsolvent additive, polysulfone casting solutions were solidified in an isopropanol bath. Propionic acid (PA) worked as a thermodynamic enhancer for phase separation and as a rheological suppressor for kinetic hindrance. Morphology of the prepared membranes significantly varied with propionic acid content in the casting solution. The dense skin layer, which was identified in the membrane prepared without PA, almost disappeared in the membrane prepared trom PA 10wt%. With 30wt% PA, the membrane revealed the morphological gradient from a nodular skin structure to a sponge-like substructure, including the finger-like cavity. Water permeability increased with PA content, and polyethylene glycol rejection decreased with the nonsolvent content.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.19 no.6
• /
• pp.447-456
• /
• 2007

Suspended particles behavior when they go through a vertical riser with heat transfer is of significant concern to system designers and operators in pneumatic transport, various processes such as in chemical, pharmaceutical and food industries. When it comes with the energy system, that knowledge is critical to the reliable design practices of related equipment as heat exchangers, especially in the phase of system scale-up. Without haying a good understanding of the related physics, many scale-up practices based on their pilot plant experience suffer from unexpected behaviors and problems of unstable fluidization typically associated with excessive pressure drop, pressure fluctuation and even unsuccessful particle circulation. In the present study, we try to explain the observed phenomena with related physics, which may help understanding of our unanswered experiences and to provide the designers with more reliable resources for their work. We selected hot exhaust gas with solid particle that goes through a heat exchanger riser as our model to be considered. The effect of temperature change on the gas velocity, thermodynamic properties, and eventually on the particles motion behavior is reviewed along with some heat transfer analyses. The present study presents an optimal riser length at full scale under given conditions, and also defines the theoretical limiting length of the riser. The field data from the numerical analysis was validated against our experimental results.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.35 no.6
• /
• pp.593-601
• /
• 2011

An analysis program to simulate the operation of a polymer electrolyte membrane fuel cell (PEMFC) system was set up, and system operation with variations in the working conditions of various components (especially the thermal management system) was simulated. The entire system included a PEMFC stack and balance-of-plant components such as an air-supply unit, a fuel-supply unit, and a heat-management unit (cooling system). Thermodynamic models of all components were made to evaluate the design performance of the entire system, and then off-design models were set up to simulate the operation of the entire system under arbitrary working conditions. A parametric study was carried out to examine the effects of varying the operating conditions (especially the ambient conditions and the operating conditions of the cooling system) on the operation and performance of the entire system.