• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.233.1-233.1
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• 2016

화학적 방법에 의한 NTE graphite의 박리 또는 전도도 개선을 위한 도핑공정을 수행할 경우, 결함 및 불순물 생성에 의해 재결정화 공정 및 순도 개선을 위한 별도의 공정을 필요로한다. 본 연구에서는 건식 방법으로써 10,000K 이상의 초고온 RF 열플라즈마를 이용하여 in-situ 방법으로 흑연의 박리, 결함 제거, 결정성 향상 및 도핑 공정을 수행하고, 도핑특성을 평가하였다. 질소 도핑을 위하여 암모니아 가스를 첨가하여 NTE graphite를 도핑 처리하였으며, 시뮬레이션을 통하여 반응기 내부의 온도분포를 파악하고, 도핑을 위한 암모니아가스가 분해되어 도핑공정이 수행될 수 있는 투입위치를 결정하였다. 질소 도핑율은 암모니아 가스의 주입위치에서의 온도 및 가스 주입 유량 등의 공정조건에 따라 변화됨을 확인하였고, XPS 분석결과 최대 14.87 atomic%의 도핑율의 결과를 얻었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.99.1-99.1
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• 2016

The materials for an electronic packaging provide diverse important functions including electrical contact to transfer signals from devices, isolation to protect from the environment and a path for heat conduction away from the devices. The packaging materials composed of metals, ceramics, polymers or combinations are crucial to the device operating properly and reliably. The demand of effective charge and heat transfer continuous to be challenge for the high-speed and high-power devices. Nanomaterials including graphene, carbon nanotube and boron nitride, have been designed for the purpose of exploiting the high thermal, electrical and mechanical properties by combining in the matrix of metal or polymer. In addition, considering the inherent electrical and surface properties of graphene, it is expected that graphene would be a good candidate for the surface layer of a template in the electroforming process. In this talk, I will present recent our on-going works in nanomaterials for microelectronic packaging: 1) porous graphene/Cu for heat dissipations, 2) carbon-metal composites for interconnects and 3) nanomaterials-epoxy composites as a thermal interface materials for electronic packaging.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.66.2-66.2
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• 2015

There is the urgent need of new human health care's technology against cancers or tumors based on plasma electronics, medicine and biology. Main target of our study is to enhance efficacy and selectivity of plasma on cancer cells with metabolic modifiers and by inducing immune-modulations. We have evaluated the combination effect of plasma with metabolic modifiers (2-DG) on various solid and liquid cancers. Our findings suggest that 2-DG enhances the efficacy and selectivity of plasma and induces apoptosis in blood cancer cells through glucose deprivation. Finally, we conclude that 2-DG with non-thermal plasma may be used as a combination treatment against cancer cells. Our work also comprises plasma induced activation of immune cells; which find applications for curing various kinds of resistant tumors and other dreadful diseases. Plasma significantly activates immune cells which increases cell death in solid tumors in co-culture conditions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.897-900
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• 2002

The collimation mirror will be used for thermal vacuum testing of spacecraft. The reflection mirror system to generate parallel beam inside the thermal vacuum chamber. A 600mm diameter aspheric Collimation mirror was fabricated by ultra-precision single point diamond turning (SPDT). Aluminum alloy for mirror substrates is known to be easily machining, but not polishable due to its ductility. Aspheric large collimation reflector without a conventional polishing process, the surface roughness of 10nmRa, and the from error of $\lambda/2 ~\lambda/4(\lambda$ =632.8 nm) for reference curved surface 600 mm has been required. The purpose of this research is to find the optimum machining conditions for reflector cutting of A16061-T651 and apply the SPDT technique to the manufacturing of ultra precision optical components of metal aspheric reflector.

• 한국진공학회지
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• 제8권2호
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• pp.136-140
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• 1999

The stability and response time of $WO_3$ thin films for EC device are critical problems being solved. Those are affected by the species of electrolyte, preparation conditions and fabricating methods of specimen. In this paper, we compared the stabilities of three kinds of tungsten oxide film in electrolyte. Each of three films was prepared by different manufacturing conditions, that is, one is a thermal oxidation film of tungsten metal deposited on pure glass substrate, another is a $WO_3$ film made on ITO glass directly, the other is a thermally oxidized film on tungsten plate. It was observed that thermally oxidized $WO_3$ films has a remarkable stability (the lifetime was above $10^6$ cycle). From these results, we found that the stability was closely related to the stoichiometric bonding between tungsten and oxygen atoms in addition to crystallinity and density of film.

• Tribology and Lubricants
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• 제14권3호
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• pp.1-6
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• 1998

An experimental study was performed to discover the effect of environmental conditions on the rolling resistance behavior of pure silver and lead coated 52100 bearing steel. Pure silver and lead coatings were produced by a thermal evaporation coating method. Experiments using a thrust ball bearing-typed rolling test-rig were performed under vacuum, dry air and controlled humidity conditions. Results showed that agglomeration of particles were suppressed in vacuum environment and resulted in low and stable rolling resistance by shakedown phenomena. Also, humidity related closely to the agglomeration of particles and the rolling resistance after the failure of coated layer.

• 한국진공학회지
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• 제4권S1호
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• pp.34-39
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• 1995

Various silicon films were prepared by thermal- and UV photo-CVD processes. The reactants were SiH4, Si2H6, SiH2F2, SIF4, and H2. Silicon films grown at temperatures below $500 ^{\circ}C$ were either amorphous or crystalline depending on the process conditions, and the growth rates ranged between 5 and $80\AA$min. Crystallinity of the film was improved even at $250^{\circ}C$ when the film was grown by photo-CVD using fluoro-silanes as the reactants. Analysis of the film by RBS, SIMS, XRD, and ex-situ IR indicated that substrate surface was contaminated by oxygen and other impurities when the reactants contained neither hydrogen nor fluoro-silnanes, but when fluoro-silanes were used as reactants the silicon film was highly crystalline.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.644-644
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• 2013

Graphene is a two-dimensional sp2 layer material. Despite the short history in the empirical synthesis of the graphene layers, the academic/industrial unique features have brought highly significant interest in research and development related to graphene-related materials. In particular, the electrical and optical performances have been targeted towards pre-existing microelectronicand emerging nanoelectronic applications. The graphene synthesis relies on a variety of processing factors, such as temperature, pressure, and gas ratios involving H2, CH4, and Ar, in addition to the inherent selection of copper substrates. The current work places its emphasis on the role of experimental factors in growing graphene thin films. The thermally-grown graphene layers are characterized using physical/chemical analyses, i.e., four point resistance measurements, Raman spectroscopy, and UV-Visible spectrophotometry. Ultimately, an optimization strategy is proposed in growing high-quality graphene layers well-controlled through empirical factors.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1995년도 제8회 학술발표회 논문개요집
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• pp.113-113
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• 1995

The adsorpption and decompposition of NO on a stepped ppt(111) surface have been studied using thermal desorpption sppectroscoppy and Auger electron sppectroscoppy. NO adsorbs molecularly in two different states of the terrace and the stepp, which are distinguishable in thermal desorpption sppectra. NO dissociates via a bent sppecies at the stepp sites on the basis of vibrational sppectrum data repported ppreviously. The dissociation of NO is activation pprocess : the activation energy is estimated to be about 2 kcal/mol. Increase in the NO dissociation with adsorpption tempperature is expplained by a pprocess controlled by different of the dissociated atomic nitrogen from the stepp to the terrace of the surface. In addition to No and N2, the desorpption ppeak of N2O is observed. We conclude that the formation of N2O is attributed to surface reaction of No and N adsorbed on the surface.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1998년도 제27회 춘계학술대회
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• pp.47-54
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• 1998

An experimental study was performed to discover the effect of environmental conditions on the rolling resistance behavior of pure silver and lead coated 52100 bearing steel. Pure silver and lead coating were produced by a thermal evaporation coating method. Experiments using a thrust ball bearing-typed rolling test-rig were performed under vacuum, dry air and controlled humidity conditions. Results showed that agglomeration of particles were prevented in vacuum environment and as it showed low and stable rolling resistance by shakedown phenomena. Also, humidity relates closely to the agglomeration of particles and increased the rolling resistance after the failure of coated layer.