• Title/Summary/Keyword: thermal vacuum

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Advanced Materials Delivery Successes in CVD Processing

  • Loan, James F.
    • Journal of the Korean Vacuum Society
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    • v.4 no.S1
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    • pp.40-68
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    • 1995
  • As silicon divice geometrics become smaller and aspect ratios larger, processing technoloty is moving from PVD into the area of CVD and OMCVD. Many new source materials are in the research and development stage, and have placed challenging demands on materials delivery technology. This paper will describe the many successes achieved with various delivery methods including thermal, bubblers, pressure-based and Direct Liquid Injection.

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Numerical Study on the Characteristics of Thermal Plasmas Disturbed by Inserting a Langmuir Probe (랑뮤어 탐침에 의해 변형된 열플라즈마 특성에 관한 해석적 연구)

  • Lee, J.C.;Kim, Y.J.
    • Journal of the Korean Vacuum Society
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    • v.17 no.3
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    • pp.189-194
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    • 2008
  • Measurements with a Langmuir probe, which are the most often used procedures of plasma diagnostics, can disturb plasma flows and change its characteristics quite a little because the probe should be inserted into thermal flowing plasmas. In this study, we calculated the characteristics of thermal plasmas with and without the probe into an atmospheric argon free-burning arc numerically, and investigated aerodynamic and thermal disturbances with temperature and axial velocity distributions. For the modelling of thermal plasmas, we have made two governing equations, which are on the thermal-flow and electromagnetic fields, coupled together with a commercial CFD package and user-coded subroutines. It was found that thermal disturbances happened to both sides of the probe, before and behind, seriously. Due to the aerodynamic disturbance, we could find that there were the stagnation point in front of the probe and the wake behind it. Therefore, aerodynamic and thermal disturbances caused by the probe insertion should be considered to increase the reliability of the probe diagnostics.

Design and Performance Test of a Closed Loop Thermal Control System for Thermal Vacuum Chamber (열진공 챔버용 폐회로 열제어시스템 설계 및 성능평가)

  • Seo, Heejun;Cho, Hyokjin;Park, Sungwook;Moon, Gueewon;Jung, Sanghun;Huh, Hwanil
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.44 no.1
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    • pp.88-97
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    • 2016
  • A closed loop thermal control system simulates space thermal environment to verify the satellites' functionality in extremely cold/hot temperature. It is composed of a cryogenic blower, thermal shroud, heater, cryogenic valves. This paper presents an overview of closed loop thermal control system's design parameter and test results for control parameter. A capacity of blower is calculated through energy balance equation and an advantage/disadvantage for a shroud material and a type was analysed. The thermal control system is controlled by a constant density of fluid in the system. A requested performance of closed loop thermal control system was verified by measuring a homogeneity and stability of shroud through control parameter such as density and RPM of blower.

Thermal Analysis on the LNG Storage Tank of LNG Bunkering System Applied with Double Shield Insulation Method (LNG 벙커링용 이중 단열적용 LNG 저장탱크 열해석)

  • Jung, Il-Young;Kim, Nam-Guk;Yun, Sang-Kook
    • Journal of the Korean Institute of Gas
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    • v.22 no.4
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    • pp.1-6
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    • 2018
  • An LNG bunkering system stores LNG in a horizontal IMO's C-Type tank insulated with perlite powder, and $10^{-2}$ Torr vacuum in the annular space between the double walls. Current storage tanks have high heat leakage, evaporating over 2.0% daily. A more efficiently insulated storage tank reducing the evaporation rate is required to develope. This research carried out thermal analysis on a new effective insulation method, i.e. double shield insulation system, that separates high super vacuum in the annular space between two tanks with a perlite vacuum in the back side of outer tank. This highly efficient insulation system obtained an evaporation rate of 0.16% per day under a $10^{-4}$ Torr vacuum. Even if the space loses its vacuum, the new insulation system showed a lower evaporation rate of 5.23% than the present perlite system of 4.9%.

Ultrahigh Vacuum Technologies Developed for a Large Aluminum Accelerator Vacuum System

  • Hsiung, G.Y.;Chang, C.C.;Yang, Y.C.;Chang, C.H.;Hsueh, H.P.;Hsu, S.N.;Chen, J.R.
    • Applied Science and Convergence Technology
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    • v.23 no.6
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    • pp.309-316
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    • 2014
  • A large particle accelerator requires an ultrahigh vacuum (UHV) system of average pressure under $1{\times}10^{-7}$ Pa for mitigating the impact of beam scattering from the residual gas molecules. The surface inside the beam ducts should be controlled with an extremely low thermal outgassing rate under $1{\times}10^{-9}Pa{\cdot}m^3/(s{\cdot}m^2)$ for the sake of the insufficient pumping speed. To fulfil the requirements, the aluminum alloys were adopted as the materials of the beam ducts for large accelerator that thanks to the good features of higher thermal conductivity, non-radioactivity, non-magnetism, precise machining capability, et al. To put the aluminum into the large accelerator vacuum systems, several key technologies have been developed will be introduced. The concepts contain the precise computer numerical control (CNC) machining process for the large aluminum ducts and parts in pure alcohol and in an oil-free environment, surface cleaning with ozonized water, stringent welding process control manually or automatically to form a large sector of aluminum ducts, ex-situ baking process to reach UHV and sealed for transportation and installation, UHV pumping with the sputtering ion pumps and the non-evaporable getters (NEG), et al. The developed UHV technologies have been applied to the 3 GeV Taiwan Photon Source (TPS) and revealed good results as the expectation. The problems of leakage encountered during the assembling were most associated with the vacuum baking which result in the consequent trouble shootings and more times of baking. Then the installation of the well-sealed UHV systems is recommended.

Measurement of outgassing rates of Kevlar and S-Glass materials used in torque tubes of High Tc Superconducting (HTS) Motors

  • Thadela, S.;Muralidhar, BVAS;Kalyani, B;Choudhury, UK;Yadav, SN;Rao, V.V.
    • Progress in Superconductivity and Cryogenics
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    • v.20 no.4
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    • pp.11-15
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    • 2018
  • Torque tubes in High Temperature Superconducting (HTS) motor transfer torque from superconducting field winding rotor to the room temperature shaft. It should have minimum heat conduction property for minimizing the load on cryo-refrigerator. Generally, these torque tubes are made with stainless steel material because of high strength, very low outgassing and low thermal contraction properties at cryogenic temperatures and vacuum conditions. With recent developments in composite materials, these torque tubes could be made of composites such as Kevlar and S-Glass, which have the required properties like high strength and low thermal conductivity at cryogenic temperatures, but with a reduced weight. Development and testing of torque tubes made of these composites for HTS motor are taken up at Bharat Heavy Electricals Limited (BHEL), Hyderabad in collaboration with Central Institute of Plastics and Engineering Technology (CIPET), Chennai and Indian Institute of Technology (IIT), Kharagpur. As these materials are subjected to vacuum, it is important to measure their outgassing rates under vacuum conditions before manufacturing prototype torque tubes. The present study focusses on the outgassing characteristics of Kevlar and S-Glass, using an Outgassing Measurement System (OMS), developed at IIT Kharagpur. The OMS facility works under vacuum environment, in which the test samples are exposed to vacuum conditions over a sufficient period of time. The outgassing measurements for the composite samples were obtained using pressure-rise technique. These studies are useful to quantify the outgassing rate of composite materials under vacuum conditions and to suggest them for manufacturing composite torque tubes used in HTS motors.

Development of Porous Metal Mold Material using Vacuum Sintering Method (진공 소결 방식을 이용한 통기성 금형 소재 개발)

  • Kim, Dong-Won;Cho, Kyu-Il;Kim, Hyun-Keun;Kang, Ja-Youn;Rhee, Won-Hyuk;Hwang, Keum-Cheol
    • Journal of the Korean institute of surface engineering
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    • v.41 no.5
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    • pp.245-253
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    • 2008
  • The porous metal material is used for injection metal mold with a great deal of gas production because it makes plenty of gas exhausted through pores formed in the metal mold. A canning HIP method was conventionally used for manufacturing of porous metals, but because of difficulty of process control and high cost of production its application was limited. In this experiment, porous metal mold material was produced by an enhanced vacuum sintering method with simply controlled and economical process and porosities/mechanical properties with variation of sintering temperature and duration time during vacuum sintering were studied. As a result, quality goods were obtained at optimized conditions as follows: sintering temperature of $1230^{\circ}C$, duration time of 2 hr and showed superior properties in wear loss and thermal conductivity and the same properties in hardness, TRS (Transverse Rupture Strength), and thermal expansion coefficient in comparison with those under canning HIP.