• 한국진공학회지
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• 제6권4호
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• pp.298-307
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• 1997

CRT부품 탈가스(outgassing)를 온도를 변화 시켜가며 측정할 수 있고 시료의 열탈착 특성을 측정할 수 있는 TDS(Thermal Desorption Spectroscopy) 측정 장치를 설계 제작하였다. 제작된 시스템은 유효 배기속도를 조절할 수 있는 진공 장치와 시료의 온도조절 장치, 탈가스 측정 가치로 구성되어 있다. 제작된 시스템의 최저 도달 진공도는 $1{\times}10^{-7}$Pa 이하였고 가변 콘덕탄스(conductance)를 채택하여 유효 배기 속도를 조절 할 수 있도록 제작되었다. 가변 콘덕탄스 조절에 따른 시료위치에서의 유효 배기 속도 변화를 측정하였다. 텅스텐 히터와 온도조절기를 이용하여 시료의 온도는 600℃까지 ±1℃ 이내 오차로 조절 할 수 있었으며 온도 상승률도 조절할 수 있었다. 측정계기로 사용한 이온 진공계(ion gauge)와 사중극 질량분석기(quadrupole mass spectrometer)의 감도를 측정하여 정량적인 측정을 할 수 있도록 하였다. 제작된 시스템을 이용하여 CRT 공정에서의 부품별 온도별 측정 예와 공정분석에의 적용 예를 보였다.

• 암석학회지
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• 제10권3호
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• pp.190-201
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• 2001

동위원소희석법은 스파이크(농축 동위원소)를 사용하여, 질량분석기에서 얻어지는 각 원소들의 동위원소 스펙트럼을 비교함으로써 정량화하는 방법으로서, 현재까지 개발된 정량분석 방법 중 가장 정확한 방법이다. 특히 열이온 질량분석기(Thermal Ion Mass Spectrometer)를 이용한 동위원소희석법은 현재까지 알려진 분석방법 중 가장 신뢰도가 높은 결과(1% 이내의 정도까지 가능함)를 얻을 수가 있다. 동위원소회석법에 의해 정량분석을 하고자 할 때, 가장 중요한 요인중의 하나로서 스파이크(농축 동위원소)의 선택이다. 회토류원소의 복합 스파이크용액을 만들 때의 개개의 회토류원소의 스파이크는 $^{138}$ $La^{142}$ , $Ce^{145}$ /Nd, $^{149}$ /, $Sm^{151}$ , $Sm^{151}$Eu, $^{157}$ Gd, $^{163}$ Dy, $^{167}$ Er, $^{171}$ , $Yb^{176}$ Lu를 많이 쓴다. 이 동위원소희석법에 의한 정량분석이 가장 유용하게 쓰여지고 있는 지구화학적 연구분야는 암석이나 광물의 연대를 측정하고자 할 때의 관심원소의 정량 및 자연계시료의 회토류 원소의 미세구조를 들 수가 있다. 특히 희토류원소의 테트라드 효과를 연구하고자 할 때, 이 동위원소희석법은 아주 효과적인 방법이다.

• 한국군사과학기술학회지
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• 제8권3호
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• pp.83-91
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• 2005

Pyrolysis-mass spectrometry has been used to characterize the 17 biological materials including bacteria and proteins. In this study, an in situ thermal-hydrolysis methylation(THM) procedure using tetramethylammonium hydroxide(TMAH) was employed. The biological materials are ionized using chemical ionization(CI) method with ethanol by ion trap mass spectrometer(ITMS), which attached with our own made pyrolyzer module, and then their pyrolysis mass spectra were obtained. The major distinct characteristic peaks were selected from all the range of mass spectra, and analyzed using principal component analysis(PCA) method to assess the classification/identification possibility of biological materials.

• Bulletin of the Korean Chemical Society
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• 제19권8호
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• pp.830-835
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• 1998

The characteristics of the ablation plume generated by 532 nm Nd: YAG laser irradiation of a Pb(Zr0.52Ti0.48)O3 (PZT) target have been investigated using a pulsed-field time-of-flight mass spectrometer (TOFMS). The relative abundance of O+, Ti+, Zr+, Pb+, TiO+, and ZrO+ ions has been measured and discussed. TiO+ and ZrO+ ions were also found to be particularly stable within the laser ablation plasma with respect to PbO+ species. The behavior of the temporal distributions of each ionic species was studied as a function of the delay time between the laser shot and the ion extraction pulse. The most probable velocity of each ablated ion is estimated to be Vmp=1.1-1.6x 105 cm/s at a laser fluence of 1.2 J/cm2, which is typically employed for the thin film deposition of PZT. The TOF distribution of Ti+ and Zr+ ions shows a trimodal distribution with one fast and two slow velocity components. The fast velocity component (6.8x 10' cm/s) appears to consist of directly ablated species via nonthermal process. The second component, originated from the thermal evaporation process, has a characteristic velocity of 1.4-1.6 x 105 cm/s. The slowest component (1.2 x 105 cm/s) is composed of a dissociation product formed from the corresponding oxide ion.

• Journal of Electrical Engineering and Technology
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• 제3권1호
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• pp.121-124
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• 2008

This paper presents the fabrication and field emission of carbon nanotube field emitters for a micro mass spectrometer. The carbon nanotube is an adequate material as a field emitter since it has good characteristics. We have successfully fabricated a diode field emitter and a triode field emitter. Each field emitter has been constructed using several micromachining processes and a thermal CVD process. In the case of the diode field emitter, to increase the electric field, the carbon nanotubes are selectively grown on the patterned nickel catalyst layer. The electron current of the diode field emitter is 73.2 ${\mu}A$ when the anode voltage is 1100V. That of the triode field emitter is 3.4 pA when the anode voltage is 1000V.

• 한국대기환경학회지
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• 제30권5호
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• pp.461-476
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• 2014

Continuous Water-Soluble Organic Carbons (WSOC) by the Particle Into Liquid Sampler - Total Organic Carbon (PILS-TOC) analyzer were measured at the Seoul intensive monitoring site from June 17 through July 5 in 2014. In addition, the 24 hour integrated PM2.5 collected by Teflon and Quartz filters were analyzed for water soluble ions by Ion chromatography (IC), WSOC by TOC from water extracts, organic carbon (OC), elemental carbon (EC) by carbon analyzer using the thermal optical transmittance (TOT) method, and mass fragment ions (m/z) related to alkanes and PAHs (Poly Aromatic Hydrocarbons) by Gas Chromatography-Mass Spectrometer-Thermal Desorption (GC/MS-TD). Based on the statistical analysis, four different Carbonaceous Thermal Distributions (CTDs) from OCEC thermal-gram were identified. This study discusses the primary and secondary sources of WSOC based on the Classified CTD, organic mass fragments, and diurnal patterns of WSOC. The results provide knowledge regarding the origins of WSOC and their behaviors.

• 한국군사과학기술학회지
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• 제7권3호
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• pp.110-121
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• 2004

Pyrolysis-mass spectrometry, incorporating an in situ thermal hydrolysis and methylation(THM) step, has been used to study biological materials for bacteria, toxin and virus. Newly developed pyrolyzer was used to decompose biological materials, and tetramethylammonium hydroxide(TMAH) was used as a methylation reagent. Chemical ionization(CI) using ethanol and ion trap mass spectrometer(ITMS) were used to ionize and analyze of pyrolysis components, respectively. Analytical characteristics of bacteria (including spore), virus and toxin were analyzed. Also acquisition and interpretation of mass spectra as biomarkers for classification/identification of biological material s were explained.

• 한국전기전자재료학회논문지
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• 제33권4호
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• pp.263-270
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• 2020

In this study, the physical mechanism and diffusion effects in aluminium implanted silicon was investigated. For fabricating power semiconductor devices, an aluminum implantation can be used as an emitter and a long drift region in a power diode, transistor, and thyristor. Thermal treatment with O₂ gas exhibited to a remarkably deeper profile than inert gas with N₂ in the depth of junction structure. The redistribution of aluminum implanted through via thermal annealing exhibited oxidation-enhanced diffusion in comparison with inert gas atmosphere. To investigate doping distribution for implantation and diffusion experiments, spreading resistance and secondary ion mass spectrometer tools were used for the measurements. For the deep-junction structure of these experiments, aluminum implantation and diffusion exhibited a junction depth around 20 ㎛ for the fabrication of power silicon devices.

• Asian Journal of Atmospheric Environment
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• 제6권1호
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• pp.53-66
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• 2012

A comparison of analytical approaches for Levoglucosan ($C_6H_{10}O_5$, commonly formed from the pyrolysis of carbohydrates such as cellulose) and used for a molecular marker in biomass burning is made between the four different analytical systems. 1) Spectrothermography technique as the evaluation of thermograms of carbon using Elemental Carbon & Organic Carbon Analyzer, 2) mass spectrometry technique using Gas Chromatography/mass spectrometer (GC/MS), 3) Aerosol Mass Spectrometer (AMS) for the identification of the particle size distribution and chemical composition, and 4) two dimensional Gas Chromatography with Time of Flight mass spectrometry (GC${\times}$GC-TOFMS) for defining the signature of Levoglucosan in terms of chemical analytical process. First, a Spectrothermography, which is defined as the graphical representation of the carbon, can be measured as a function of temperature during the thermal separation process and spectrothermographic analysis. GC/MS can detect mass fragment ions of Levoglucosan characterized by its base peak at m/z 60, 73 in mass fragment-grams by methylation and m/z 217, 204 by trimethylsilylderivatives (TMS-derivatives). AMS can be used to analyze the base peak at m/z 60.021, 73.029 in mass fragment-grams with a multiple-peak Gaussian curve fit algorithm. In the analysis of TMS derivatives by GC${\times}$GC-TOFMS, it can detect m/z 73 as the base ion for the identification of Levoglucosan. It can also observe m/z 217 and 204 with existence of m/z 333. Although the ratios of m/z 217 and m/z 204 to the base ion (m/z 73) in the mass spectrum of GC${\times}$GC-TOFMS lower than those of GC/MS, Levoglucosan can be separated and characterized from D (-) +Ribose in the mixture of sugar compounds. At last, the environmental significance of Levoglucosan will be discussed with respect to the health effect to offer important opportunities for clinical and potential epidemiological research for reducing incidence of cardiovascular and respiratory diseases.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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• pp.496-498
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• 2005

We reported that high dielectric hafnium oxide nano-film deposited by thermal atomic layer deposition on the poly-silicon film (poly-Si). The poly -Si film was produced by plasma enhanced chemical vapor deposition and excimer laser annealing. We used the hafniu m chloride ($HfCl_4$) and water as the precursors and analyzed the hafnium oxide film by transmission electron microscope and secondary ion mass spectrometer. Hafnium oxide produced by the ALD method showed very good coverage on the rough surface of poly-Si film. While deposited with 200 cycles, these hafnium oxide films revealed a relatively smooth surface and good uniformity, but the cumulative roughness produced by the incomplete reaction was apparent when the amount of deposition cycle increased to 600 cycles.