• Korean Journal of Optics and Photonics
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• v.11 no.2
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• pp.73-79
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• 2000

We measure a beam diameter of scan and sub-scan direction of LSD (Laser Scanning Urnt) which uses $fheta$ lens produced by injecLion molding method as a scanning lens. While the measured beam diameter in scan direction, which is $62muextrm{m}$ to $68\mu\textrm{m}$, shows similar size comparing to the design beam diameter, the sub-scan beam diameter shows sIzable beam diameter deviation as much as 37 11m ranging from $78\mu\textrm{m}$ to $115\mu\textrm{m}$. Injection molding lens has the surface figure error due to the shrinkage III the cooling time and the internal distortion (birefringence) due to the uneven cooling conditIOn so that these bring about wavefront aberration (i.e., the enlargement of beam size), and are eventually expre~sed as the deterioration of the pdnting image. In this paper. we first measure and analyze beam diameter, birefringence (polanzation ratio), and asphedcal figure error of mIens in order to know the principle cause of the beam diameter deviation in sub-scan directIOn. And Lhen. through the analysis of a designed depth of focus and a calculated field curvature (imaging position of the optical axis directIon) using the above figure elTor data, we know Lhat the birefringence IS the main factor of sizable beam diameter deVIation in sub-scan direction. ction.

• Journal of the Korea institute for structural maintenance and inspection
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• v.27 no.4
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• pp.1-10
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• 2023

In the seismic design of structures, seismic forces are calculated based on structural models and analysis. In order to accurately address the dynamic characteristics of the actual structure in the structural model, calibration based on actual measurements is required. In this study, a 4-story frame test specimen was manufactured to simulate frame building, accelerometers were attached at each floor, and 1-axis shaking table test was performed. The natural period of the specimen was similar to that of the actual 4 story frame building, and the columns were designed to behave with double-curvature having the infinite stiffness of the horizontal members. To investigate the effects seismic waves characteristics, historical and artificial excitations with various frequencies and acceleration magnitudes were applied. The natural frequencies, damping ratios, and mode shapes were obtained using frequency response functions obtained from dynamic response signals, and the mode vector deviations according to the input seismic waves were verified using the Mode assurance criterion (MAC). In addition, the damping ratios obtained from the vibration tests were applied to the structural model, and the method with refined dynamic characteristics was validated by comparing the analysis results with the experimental data.

• Korean Journal of Optics and Photonics
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• v.6 no.3
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• pp.188-200
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• 1995

A design of unit magnification 2-mirror system with high resolution is presented. It is for soft X-ray(wavelength of 13 nm) projection imaging and suitable for preparation of high density semiconductor chip. In general, a holosymmetric system with unit magnification has the advantage that both coma and distortion are completely eliminated. In our holosymmetric 2-mirror system, spherical aberration is addtionally removed by using two identical paraboloidal mirror surfaces and field curvature aberration is also corrected by balancing Petzval sum and astigmatism which depends on the distance between two mirrors, so that the system is a aplanatic flat-field paraboloidal 2-mirror holosymmetric system. This 2-mirror system is small in size, and has a simple configuration with rotational symmetry about optical axis, and has also small central obscuration. Residual finite aberrations, spot diagrams, and diffraction-based MTF's are analyzed for the check of performances as soft X-ray lithography projection system. As a result, the image sizes for the resolutions of$0.25\mum$and $0.18\mum$are 4.0 mm, 2.5 mm respectively, and depths of focus for those are $2.5\mum$, $2.4\mum$respectively. This system should be useful in the fabrication of 256 Mega DRAM or 1 Giga DRAM. DRAM.