• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.150.1-150.1
• /
• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Journal of Conservation Science
• /
• v.25 no.2
• /
• pp.161-169
• /
• 2009

The objective of this study was to investigate stability of Korean Paper(Hanji) which is being sold in the Korean markets according to aging treatment. In order to know the aging characteristics, the optical and mechanical properties of before and after wet and dry-heat aging treatment were examined. The optical and mechanical properties were shown higher reduction in the dry-heat aging treatment compared to the wet-heat aging treatment. The Soonji (pure mulberry Hanji) made from black mulberry bast pulp was shown a great reduction of the brightness and whiteness, and increase of the opacity in the aging treatment. On the other hand, in case of mechanical properties, the breaking length of Soonji made from white mulberry bast pulp was significantly higher than that of the others, and the tensile strength was shown drastic reduction in according to Soonji made from black mulberry bast pulp in the aging treatment. The burst strength of Soonji made from black and white mulberry bast pulp was shown the similar value in the wet-heat aging treatment. The folding endurance of Soonji made from white mulberry bast pulp was significantly higher than that of others before and after aging treatment. Consequently, Hanji was affected sensitive in the temperature compared to the humidity. Meanwhile, the density and color of the chinese ink was no significant changes before and after wet and dry-heat aging treatment.

• KOREAN JOURNAL OF CROP SCIENCE
• /
• v.34 no.s02
• /
• pp.66-80
• /
• 1989

Salt injury in rice is caused mainly by the salinity in soil and in the irrigated water, and occasionaly by salinity delivered through typhoon from the sea. The salt concentration of rice plants increased with higher salinity in the soil of the rice growing. The climatic conditions, high temperature and solar radiation and dry conditions promote the salt absorption of rice plant in saline soil. The higher salt accumulation in the rice plant generally reduces the root activity and inhibits the absorption of minerals of rice plant, resulting the reduction of photosynthesis. The salt damages of rice plant, however, are different from different growth stage of rice plants as follows: 1. Germination of rice seed was slightly delayed up to 1.0％ of salt concentration and remarkably at 1. 5％, but none of rice seeds were germinated at 2.5％. This may be due to the delayed water uptake of rice seeds and the inhibition of enzyme activity, 2. It was enable to establish rice seedlings at seed bed by 0.2％ of salt concentration with some reduction of leaf elongation. The increasing of 0.3％ salt concentration caused to the seedling death with varietal differences, but most of seedlings were death at 0.4％ with no varietal differences. 3. Seedlings grown at the nursery over 0.1％ salt, gradually reduced in rooting activity after transplanting according to increasing the salt concentration from 0.1％ up to 0.3％ of paddy field. However, the seedlings grown in normal seed bed showed no difference in rooting between varieties up to 0.1％ but significantly different at 0.3％ between varieties, but greatly reduced at 0.5％ and died at last in paddy after transplanting. 4. At panicle initiation stage, rice plant delayed in heading by salt damage, at meiotic stage reduced in grains and its filling rate due to inhibition of glume and pollen developing, and salt damage at heading stage and till 3 weeks after heading caused to reduction of fertilization and ripening rate. In viewpoint of agricultural policy the overcoming strategy for salt injury is to secure sufficient water source. Irrigation and drainage systems as well as underground drainage is necessary to desalinize more effectively. This must be the most effective and positive way except cost. By cultural practice, growing the salt tolerant variety with high population could increase yield. The intermittent irrigation and fresh water flooding especially at transplanting and from panicle initiation to heading stage, the most sensitive to salt injury, is important to reduce the salt content in saline soil. During the off-cropping season, plough and rotavation with flooding followed by drainage, or submersion and drainage with groove could improve the desalinization. Increase of nitrogen fertilizer with more split application, and soil improvement by lime, organic matter and forign soil addition, could increase the rice yield. Shift of trans-planting is one of the way to escape from the salt injury.

• Journal of the Korean Association of Geographic Information Studies
• /
• v.16 no.3
• /
• pp.12-24
• /
• 2013

Eradication of endemic malaria was declared in mid 1980's in Korea, but the number of malaria cases has been oscillating for the past 10 years since the reemergence of the disease in early 1990's. The occurrence of malaria has been concentrated near the demilitarized zone(DMZ), and the regional characteristics of the disease are evident. Considering the spatial variations of malaria incidence across the high-risk areas, the hotspot of the disease, it seems that the occurrence of the disease is influenced by the natural and human environment in the region. Malaria is an infectious disease that is transmitted to humans by the bites of vector-mosquitoes carrying malaria parasites, and it depends on specific climatic and sociodemographic factors. Malaria transmission is highly climate-sensitive, and temperature is the most important component. In addition, human contacts with vector-mosquitoes and the distance between human residence and mosquito habitats are crucial conditions determining malaria incidence rates. The present study aimed to test a hypothesis that the spatial characteristics of malaria incidence depended on local climatic conditions, relative proportions of mosquito habitats, and the distance between mosquito habitats and human residence using meteorological and satellite-based land cover data.

• Archives of design research
• /
• v.21
• /
• pp.99-106
• /
• 1997

There were the changes of shapes and color tones when the soil materials e.g. Blue-Porcelain, White-Porcelain, Bunchong, mixed A and B, mullite, Sanchong and Ongki - used by most domestic ceramic artists - were glazed at $ 950^{\circ}C,; 1200^{\circ}C,; 1250^{\circ}C,; 1280^{\circ}C,;1300^{\circ}C$ After the materials were dried out at 120t: in an electric oven, they were mixed with water, keeping the percentage of moisture content 25% and kneaded specimens which are hexahedron by $$ 250{\times}30{\times}8mm$$were produced and dried after calibrated at 200mm interval with a vernier caliper. After the materials were dried and glazed, they showed few shape-changes at $950^{\circ}C$ but began to changed at $1200^{\circ}C$,especially Bunchong and Ongki made rapid changes. In the case of color-change, White-Porcelain changed very little. The color of Blue-Porcelain, mixed A and B, Sanchong, Mullite changed to ]aune brilliant as temperature went up but Bunchong and Ongki changed to dark brown or dark chocolate under the same conditions. This study aims at suggestion of the basic data which minimize failure rates by recognizing the property of the materials on the basis of this study and regulating shape-change phenomena and sensitive changes of color when ceramic artists work.

• Analytical Science and Technology
• /
• v.8 no.2
• /
• pp.215-220
• /
• 1995

A simple, efficient and sensitive method was described for the simultaneous determination of catecholamine, indoleamine and related metabolites from the homogenates of the rat brain striatum by HPLC-ECD. The optimum mobile phase on a reverse phase $C_{18}$ column was 35mM sodium acetate buffer(included 10mM citric acid, 0.13mM $Na_4EDTA$, 0.58mM SOS, pH3-4):MeOH=85:15. The column temperature was $30^{\circ}C$. Dopamine(DA), 3, 4-dihydroxyphenyl acetic acid(DOPAC), homovanilic acid(HVA), 5-hydroxyindole acetic acid(5-HIAA), serotonin(5-HT) and noradrenaline(NA) could be separated and analysed to very small amount. The detection limits of this method were 2~10pg per injection for all components. The effects of age and sex of rat on the contents of the catecholamines and their metabolites in rat brain striatum were studied. The levels of DA and 5-HT contents of the 7 week old female rats were higher than those of the 7 week old male rats. As the age of rat increases, the contents of DOPAC increased significantly.

• Analytical Science and Technology
• /
• v.30 no.6
• /
• pp.303-311
• /
• 2017

A new method for obtaining the photoluminescence of footwear impression by using 1,2-indandione (1,2-IND) solution, which is a latent fingerprint-developing reagent, was studied. A binary complex of DL-alanine and 1,2-IND was prepared by spraying a DL-alanine solution and the 1,2-IND solution (an amino acid sensitive reagent) onto dry or wet origin footwear impression deposited on the surface of printed A4 paper. This binary complex reacts with the trace metal component in the footwear impression to form a ternary complex that exhibits photoluminescence. However, when 5-methylthioninhydrin (5-MTN) solution was used instead of 1,2-IND, no consistent photoluminescence was observed even under identical treatment conditions. In addition, when footwear impressions treated with DL-alanine and 1,2-IND solutions were stored under various temperature conditions (30, 40 and $50^{\circ}C$) and various humidity conditions (30 %, 40 %, 50 % and 60 % RH), the contrast between the footwear impression and the background decreased. Optimal footwear impression photoluminescence was obtained when the footwear impressions treated with DL-alanine and 1,2-IND solutions were stored at $30^{\circ}C$ and 30 % RH for 1 h. The sensitivity of the developed method was ccompared with the sensitivities of three known methods - black gelatin lifting, 2,2'-dipyridyl treatment, and 8-hydroxyquinoline treatment. The results showed that the sensitivity of the developed method was worse than that of the black gelatin lifting method but better than that of 2,2'-dipyridyl or 8-hydroxyquinoline treatment method.

• Journal of Sensor Science and Technology
• /
• v.1 no.2
• /
• pp.173-181
• /
• 1992

Tantalum pentoxide($Ta_{2}O_{5}$) thin films on p-type (100) silicon wafer were fabricated by RF reactive sputtering. Physical properties and structure of the specimens were examined by XRD and AES. From the C-V analysis, the dielectric constant of $Ta_{2}O_{5}$ films was in the range of 10-12 in the reactive gas atmosphere in which 10% of oxygen gas is mixed. The ratio of Ta : 0 was 1 : 2 and 1 : 2.49 by AES and RBS examination, respectively. The heat-treatment at $700^{\circ}C$ in $O_{2}$ ambient led to induce crystallization. When the heat-treatment temperature was $1000^{\circ}C$, the dielectric constant was 20.5 in $O_{2}$ ambient and 23 in $N_{2}$ ambient, respectively. The crystal structure of $Ta_{2}O_{5}$ film was pseudo hexagonal of ${\delta}-Ta_{2}O_{5}$. The flat band voltage shift(${\Delta}V_{FB}$) of the specimens and the leakage current density were decreased for higher oxygen mixing ratio. The maximum breakdown field was 2.4MV/cm at the oxygen mixing ratio of 10%. The $Ta_{2}O_{5}$ films will be applicable to hydrogen ion sensitive film and gate oxide material for memory device.

• Parasites, Hosts and Diseases
• /
• v.36 no.2
• /
• pp.99-108
• /
• 1998

The present study was performed to check the viability of eggs, filariform larvae and adults of Strongvloines venezueLensis exposed to various conditions for an in vitro maintenance. The eggs in the feces remained viable for about 25 days at $4^{\circ}C$ and 15 days at room temperature. However, the isolated eggs in sterile saline lost their viability within 24 hr at $4^{\circ}C$. The eggs in morula stage were very sensitive to air drying and rapidly lost their viability (=12 hrs. Filariform larvae survived for a maximum period of 45 days in fecal suspension and 28 days in 0.12% nutrient broth in polyvinyl culture bags maintained at $20^{\circ}C$. On the other hand, those isolated from nutrient broth cultures survived for a maximum period of 32 days in tap water and 22 days in sterile saline at $20^{\circ}C$. The mature adult worms obtained from experimentally infected rats survived maximally for 9 days in serum supplemented (10% rat-serum) 0.12% nutrient broth and 4 days in serum free nutrient broth at $37^{\circ}C$ while the culture media were changed at an alternate day. The adult female worms deposited fertile eggs in serum supplemented and serum free nutrient broth cultures, however, the hatched larvae (Ll) were not able to develop to the filariform stage in the culture media and found to die within 24 hr of maintenance. The present findings on an in vitro maintenance of different stages of 5. uenezueLetis may provide useful information for biological and biochemical studies with Strongyloines species. Key words: Strongvloides venezuelensis. viability in vitro maintenance, free-living filariform larvae (L3), embryonation of eggs

• Journal of Plant Biotechnology
• /
• v.32 no.3
• /
• pp.151-159
• /
• 2005

Injury caused by reactive oxygen species (ROS), known as oxidative stress, is one of the major damaging factors in plants exposed to environmental stress. Chloroplasts are specially sensitive to damage by ROS because electrons that escape from the photosynthetic electron transfer system are able to react with relatively high concentration of $O_2$ in chloroplasts. To cope with oxidative stress, plants have evolved an efficient ROS-scavenging enzymes such as superoxide dismutase (SOD) and ascorbate peroxidase (APX), and low molecular weight antioxidants including ascorbate, glutathione and phenolic compounds. To maintain the productivity of plants under the stress condition, it is possible to fortify the antioxidative mechanisms in the chloroplasts by manipulating the antioxidation genes. A powerful gene expression system with an appropriate promoter is key requisite for excellent stress-tolerant plants. We developed a strong oxidative stress-inducible peroxidase (SWPA2) promoter from cultured cells of sweetpotato (Ipomoea batatas) as an industrial platform technology to develop transgenic plants with enhanced tolerance to environmental stress. Recently, in order to develop transgenic sweetpotato (tv. Yulmi) and potato (Solanum tuberosum L. cv. Atlantic and Superior) plants with enhanced tolerance to multiple stress, the genes of both CuZnSOD and APX were expressed in chloroplasts under the control of an SWPA2 promoter (referred to SSA plants). As expected, SSA sweetpotato and potato plants showed enhanced tolerance to methyl viologen-mediated oxidative stress. In addition, SSA plants showed enhanced tolerance to multiple stresses such as temperature stress, drought and sulphur dioxide. Our results strongly suggested that the rational manipulation of antioxidative mechanism in chloroplasts will be applicable to the development of all plant species with enhanced tolerance to multiple environmental stresses to contribute in solving the global food and environmental problems in the 21st century.