• 한국전기전자재료학회논문지
• /
• 제14권12호
• /
• pp.1016-1022
• /
• 2001

This study presents the microstructure-electrical property relationship of reactive-sputtered Ta$_2$O$_{5}$ MIM capacitor structure processed by annealing in a vacuum and $O_2$ ambience. A microstructural investigation showed the existence of amorphous phase in as-deposited condition and the formation of preferentially oriented-Ta$_2$O$_{5}$ in $700^{\circ}C$ annealing. On annealing under the $O_2$ atmosphere, the Ta$_2$O$_{5}$ film exhibited the trend of its composition\`s approaching to stoichiometry from off-stoichiometry, analyzed by EPMA, the leakage current decrease and the enhanced temperature-capacitance characteristic stability. In the case of low temperature vacuum-annealing treatment, the leakage current behavior was stable irrespective of applied electric field. In the high temperature-annealed film at a vacuum condition, the electrical properties was observed to deteriorate. The results state that in Ta$_2$O$_{5}$ film annealed at $O_2$ atmosphere, gives rise to improvement of electrical characteristics in the capacitor were improved by reducing oxygen-vacancy and dandling Ta-O bond.-O bond.

• Journal of Biosystems Engineering
• /
• 제12권1호
• /
• pp.6-13
• /
• 1987

A mathematical model for the waste heat recovery system for an engine was developed. The model based on the experimental data reported before was validated and was used to predict the waste heat recovery and recoverable heat of the engine at various operating conditions of the engine and the system. The model was also used to determine flow rates of the circulating water in the system for a certain temperature increment of the water at various operating conditions of the engine to give basic data to design the system. Stability of the system performance was tested on subjects of vapor lock problem, thermal characteristics of the thermostatic valve, and temperature variation of the circulating water in the engine and fuel consumption of the engine during each mode of the system operation and its change into the other. The test showed that the system operation was stable enough. Temperature profile in the thermal energy storage (TES) was observed during storing thermal energy, and thermal stratification in the TES was well formed acceptable to be used in the system. Finally a scheme to automatize the system was suggested.

• 마이크로전자및패키징학회지
• /
• 제8권3호
• /
• pp.31-36
• /
• 2001

고온용 정전기척(high-temperature electrostatic chuck, HTESC)에 적합한 특성의 유전재료를 개발하였다. 유전층의 전기비저항과 유전상수 값은 HTESC가 적합하게 작동하기에 필요한 요구조건을 만족하였으며, 하부절연층재료와 열팽창계수가 유사하여 구조적인 안정성이 확보되었다. 유전층과 절연 층간의 접합층 재료로는 입자오염 문제의 최소화를 위해 붕규산염 유리재료를 선택하였고, 전극재료로는 은을 사용하였다. 상부유전 층과 하부절연층 사이에서 붕규산염 유리는 안정되게 접합되었으며, 우려 되었던 은전극의 유전층이나 유리층과의 확산 및 반응이 관찰되지 않았다. 제조된 HTESC의 척킹(chucking)특성은 상용 HTESC에 비하여 우수하게 나타났다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제49권10호
• /
• pp.559-563
• /
• 2000

The $(Sr_{1-x}Ca_x)TiO_3(SCT)$ thin films are deposited on Pt-coated(Pt/TiN/$SiO_2$/Si) using RF sputtering method with substitutional contents of Ca. The maximum grain of thin films is obtained by substitution of Ca at 15[mol%]. Also the composition of SCT thin films were closed to stoichiometry(1.081∼1.117 in A/B/ ratio). The dielectric constant was increased with increasing the substitutional contents of Ca, while it was decreased if the substitutional contents of Ca exceeded over 15[mol%]. The dielectric constant changes almost linearly in temperature ranges of -80∼+90[^${\circ}C$]. The temperature properties of the dielectric loss have a stable value within 0.02 independent of the substitutional contents of Ca. All SCT thin films used in this study show the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 2000[kHz]. The current-voltage characteristics of SCT15 thin films showed the increasing leakage current as the measuring temperature increase.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2001년도 추계학술대회 논문집
• /
• pp.278-280
• /
• 2001

BSCCO thin films have been fabricated by co-deposition at an ultralow growth rate using ion beam sputtering(IBS) method. The growth rates of the films was set in the region from 0.17 to 0.27 nm/min. MgO(100) was used as a substrate. In order to appreciate stable existing region of Bi 2212 Phase with temperature and ozone pressure, the substrate temperature was varied between 655 and 820$^{\circ}C$ and the highly condensed ozone gas pressure(PO$_3$) in vacuum chamber was varied between 2.0x10$\^$-6/ and 2.3x10$\^$-5/ Torr. Bi 2212 Phase appeared in the temperature range of 750 and 795$^{\circ}C$ and single phase of Bi 2201 existed in the lower region than 785$^{\circ}C$. Whereas, PO$_3$ dependance on structural formation was scarcely observed regardless of the pressure variation. And high quality of c-axis oriented Bi 2212 thin film with T$\sub$c/(onset) of about 70 K and T$\sub$c/(zero) of about 45 K is obtained. Only a small amount of CuO in some films was observed as impurity, and no impurity phase such as CaCuO$_2$ was observed in all of the obtained films.

• Tribology and Lubricants
• /
• 제16권5호
• /
• pp.365-372
• /
• 2000

Tribological behavior of novolac resin-based friction materials with three different relative amounts of graphite and zirconium silicate was investigated by using a pad-on-disk type friction tester. The goal of this paper is to examine the effects of the relative amount of a lubricant and an abrasive in the automotive friction material on friction and wear characteristics at elevated temperature. Friction and wear of friction materials were affected by the existence of transfer film(3$\^$rd/ body layer) at friction interface and the composition of friction material, especially lubricant amount. The friction material with higher content of graphite indicated homogenized and durable transfer film, and resulted in stable friction coefficient regardless of the increase in friction heat. The experimental result also showed that the higher concentration of ZrSiO$_4$ in friction material aggravated friction stability and wear resistance due to the higher friction heat generated at fiction interface during high temperature friction test.

• Journal of Microbiology and Biotechnology
• /
• 제21권1호
• /
• pp.20-27
• /
• 2011

The purification and characterization of a $Mn^{2+}$-dependent alkaline serine protease produced by Bacillus pumilus TMS55 were investigated. The enzyme was purified in three steps: concentrating the crude enzyme using ammonium sulfate precipitation, followed by gel filtration and cation-exchange chromatography. The purified protease had a molecular mass of approximately 35 kDa, was highly active over a broad pH range of 7.0 to 12.0, and remained stable over a pH range of 7.5 to 11.5. The optimum temperature for the enzyme activity was found to be $60^{\circ}C$. PMSF and AEBSF (1 mM) significantly inhibited the protease activity, indicating that the protease is a serine protease. $Mn^{2+}$ ions enhanced the activity and stability of the enzyme. In addition, the purified protease remained stable with oxidants ($H_2O_2$, 2%) and organic solvents (25%), such as benzene, hexane, and toluene. Therefore, these characteristics of the protease and its dehairing ability indicate its potential for a wide range of commercial applications.

• Journal of Microbiology and Biotechnology
• /
• 제24권10호
• /
• pp.1382-1388
• /
• 2014

Proteus vulgaris K80 lipase was expressed in Escherichia coli BL21 (DE3) cells and immobilized on amine-terminated magnetic microparticles (Mag-MPs). The immobilization yield and activity retention were 84.15% and 7.87%, respectively. A homology model of lipase K80 was constructed using P. mirabilis lipase as the template. Many lysine residues were located on the protein surface, remote from active sites. The biochemical characteristics of immobilized lipase K80 were compared with the soluble free form of lipase K80. The optimum temperature of K80-Mag-MPs was $60^{\circ}C$, which was $20^{\circ}C$ higher than that of the soluble form. K80-Mag-MPs also tended to be more stable than the soluble form at elevated temperatures and a broad range of pH. K80-Mag-MP maintained its stable form at up to $40^{\circ}C$ and in a pH range of 5.0-10.0, whereas soluble K80 maintained its activity up to $35^{\circ}C$ and pH 6.0-10.0. K80-Mag-MPs had broader substrate specificity compared with that of soluble K80. K80-Mag-MPs showed about 80% residual relative activity after five recovery trials. These results indicate the potential benefit of K80-Mag-MPs as a biocatalyst in various industries.

• 공업화학
• /
• 제28권6호
• /
• pp.691-695
• /
• 2017

본 연구에서는 알카라인 연료전지 환원극 가스확산층에 내열화학성이 우수한 초발수 성능을 부여하기 위하여 PDMS 코팅 공정을 최적화하였다. 성격이 상이한 두 개의 상용 가스확산층을 선택하였으며, 소재의 열적 안정성을 검토하여 코팅 온도를 최적화하고, PDMS 점도를 제어하여 코팅 균일성을 확보하고자 하였다. PDMS 전구체의 점도와 관계없이 $200^{\circ}C$ 부근에서 코팅하게 되면 모든 확산층 표면에서 높은 초발수 성능을 나타내었다. 가혹실험 조건에서 초발수 성능변화를 측정한 결과 1000 CS PDMS를 이용하여 28BC 가스확산층에 코팅한 경우가 가장 높은 내구성을 나타내었다.

• Journal of Microbiology and Biotechnology
• /
• 제6권1호
• /
• pp.19-25
• /
• 1996

Chitosanase from Bacillus sp. HW-002 was purified with CM-cellulose column chromatography, and HPLC with DEAE- TSK gel and YMC-pack Diol 120. The purified enzyme appeared as a single band on SDS-polyacrylamide gel. The molecular weight of the enzyme was estimated to be about 46 kDa on SDS-polyacrylamide gel, and was estimated to be about 23 kDa by GFC. The optimal pH of chitosanolytic activity was about pH 5.5-6.0, and the purified enzyme was most stable at pH 5.0. The optimal temperature of chitosanolytic activity was $65^{\circ}C$ and the enzyme was stable at $45^{\circ}C$ for 1 h. Chitosan was the most favorable substrate among various $\beta$-glucan. UVmax of the purified enzyme was 195 nmand was not noted around 280 nm. The main product of enzyme reaction with chitosan was chitobiose.