• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.265-273
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• 1999

Various oxide films are commonly used as a sacrificial layer or etch mask in the fabrication of microelectromechanical systems (MEMS). Large residual strain of these oxide films causes the wafer to bow, which can have detrimental effects on photolithography and other ensuing processes. This paper investigates the residual strain of tetraethoxysilane (TEOS), low temperature oxide (LTO), 7 wt% and 10 wt% phosphosilicate glass (PSG). Euler beams and a bent-beam strain sensor are used to measure the residual strain. A poly silicon layer is used as the sacrificial layer, which is selectively etched away by $XeF_2$. First, the residual strain of as-deposited films is measured, which is quite large. The residual strain of the films is also measured after annealing them not only at $500^{\circ}C$, $600^{\circ}C$, $700^{\circ}$ and $800^{\circ}C$ in $N_2$ environment for 1 hour but also at the conditions for depositing a $2\;{\mu}m$ thick polysilicon at $585^{\circ}C$ and $625^{\circ}C$. Our results show that the 7 wt% PSG is best suited as the sacrificial layer for $2\;{\mu}$ thick polysilicon processes.

• Journal of Sensor Science and Technology
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• v.6 no.4
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• pp.316-327
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• 1997

Polycrystalline $Sr_{2}Nb_{2}O_{7}$ and $La_{2}Ti_{2}O_{7}$ ceramics with very high Curie temperatures were synthesized by the chemical coprecipitation method (CCP). The powders synthesized were identified by XRD and their sintering behavior and physical properties were studied. The grain-orientation and electrical properties of sintered ceramics were investigated as a function of firing temperature. Single phase could be obtained by CCP method at temperature lower than that of the conventional method by 100 - $150^{\circ}C$. Strontium niobate, $Sr_{2}Nb_{2}O_{7}$, powder was Prepared by CCP method at temperatures as low as $800^{\circ}C$ via intermediate phase of $Sr_{5}Nb_{4}O_{15}$ formed at $700^{\circ}C$. The resulting CCP-derived powder was observed to have finer and more uniform particle size distribution than those obtained through the conventional or the molten salt synthesis method. Sintering of CCP-derived $Sr_{2}Nb_{2}O_{7}$ powder at $1500^{\circ}C$ yielded a highly dense ceramics with 97% theoretical density. Very high grain-orientation developed along the (0k0) direction was observed by SEM, which resulted in anisotropic dielectric properties of the sintered samples, with the dielectric constant values approaching those for single crystal.

• Journal of Sensor Science and Technology
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• v.5 no.5
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• pp.79-84
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• 1996

A $1\;{\mu}m$ thick n-type GaAs layer with Si doping density of $1{\times}10^{17}/cm^{3}$ and a $500{\AA}$ thick undoped single crystalline AlAs layer were subsequently grown by molecular beam epitaxy on the $n^{+}$ GaAs substrate. The AlAs/GaAs layer was oxidized in $N_{2}$ bubbled $H_{2}O$ vapor($95^{\circ}C$) ambient at $400^{\circ}C$ for 2 and 3 hours. From the result of XPS analysis, small amounts of $As_{2}O_{3}$, AlAs, and elemental As were found in the samples oxidized up to 2 hours. After 3 hours oxidation, however, various oxides related to As were dissolved and As atoms were diffused out toward the oxide surface. The as-grown AlAs/GaAs layer was selectively converted to $Al_{2}O_{3}/GaAs$ at the oxidation temperature $400^{\circ}C$ for 3 hours. The oxidation temperature and time is very critical to stop the oxidation at the AlAs/GaAs interface and to form a defect-free surface layer.

• Journal of Sensor Science and Technology
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• v.6 no.5
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• pp.423-429
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• 1997

We fabricated PLT thin films on ITO substrate for flat pannel display and investigated the characteristics, then we applicated to electroluminescent device and investigated application possibility. When we fabricated PLT thin films with substrate temperature of $500^{\circ}C$, and pressure of 30 mTorr, the relative deielectric constant and breakdown electricfield of PLT thin films were 120 and 3.2MV/cm. The electric resistivity was $2.0{\times}10^{12}{\Omega}{\cdot}cm$. PLT thin films had polycrystal structure of perovskite and pyrochlore at the higher substrate temperature than $450^{\circ}C$, and had good crystallinity at higher pressure. To use PLT insulator film and ZnS:Mn phosphor, we fabricated thin film electroluminescent device of ITO/PLT/ZnS:Mn/PLT/Al structure. At the result, threshold voltage was $35.2V_{rms}$ and brightness was $2400cd/m^{2}$ at $50V_{rms}$ and 1kHz. Maximum luminescence efficiency was 0.811m/W.

• Journal of Sensor Science and Technology
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• v.2 no.1
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• pp.109-115
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• 1993

A CdS single crystal was grown by using sublimation method. Lattice constants, $a_{o}$ and $c_{o}$, obtained by using extrapolation were $4.131{\underline{8}}{\AA}$ and $6.712{\underline{2}}{\AA}$, respectively. The carrier density was${\sim}10^{23}m^{-3}$ and the mobility was $2.93{\times}10^{-2}m^{2}$/V sec from measured Hall data at room temperature. The mobility has a increasing tendency in proportion to $T^{1/2}$ from 33 K to 150 K and a decreasing tendency in proportion to $T^{-2}$ from 180 K to room temperature. The short wavelength band peak measured from photocurrent was due to intrinsic transition, and the energy value of this peak was equal to the energy band gap of CdS photoconductor.

• Ocean and Polar Research
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• v.43 no.4
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• pp.229-243
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• 2021

Quality control (QC) to process observed time series has become more critical as the types and amount of observed data have increased along with the development of ocean observing sensors and communication technology. International ocean observing institutions have developed and operated automatic QC procedures for these observed time series. In this study, the performance of automated QC procedures proposed by U.S. IOOS (Integrated Ocean Observing System), NDBC (National Data Buy Center), and OOI (Ocean Observatory Initiative) were evaluated for observed time-series particularly from the Yellow and East China Seas by taking advantage of a confusion matrix. We focused on detecting additive outliers (AO) and temporary change outliers (TCO) based on ocean temperature observation from the Ieodo Ocean Research Station (I-ORS) in 2013. Our results present that the IOOS variability check procedure tends to classify normal data as AO or TCO. The NDBC variability check tracks outliers well but also tends to classify a lot of normal data as abnormal, particularly in the case of rapidly fluctuating time-series. The OOI procedure seems to detect the AO and TCO most effectively and the rate of classifying normal data as abnormal is also the lowest among the international checks. However, all three checks need additional scrutiny because they often fail to classify outliers when intermittent observations are performed or as a result of systematic errors, as well as tending to classify normal data as outliers in the case where there is abrupt change in the observed data due to a sensor being located within a sharp boundary between two water masses, which is a common feature in shallow water observations. Therefore, this study underlines the necessity of developing a new QC algorithm for time-series occurring in a shallow sea.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.22 no.4
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• pp.403-412
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• 2021

Despite strengthening requirements for fire retardancy and applied buildings of insulation panels, the number of fires and influence of damage have increased. In this study, the thermal effects were evaluated as the separation distances, and three types of EPS panel, glass wool panel, and gypsum board panel were then selected. Temperature sensors on the panels were installed vertically from the ground. The fire source on the lamination layer of lumber was ignited by changes in the separation distances (0 cm, 25 cm, 50 cm) from the panels. The test results suggested that the maximum temperature was 349 ℃ in the EPS panel. The inside/outside shape changes were limited by the height of the low and middle positions until the critical point of a 25 cm separation distance. Furthermore, the combustion marks appeared after 500 s on average, and then the EPS panel with a high fire strength showed a broad "U type" pattern, glass wool panel, and gypsum board panel showed medium or narrow "V type" pattern. Therefore, the acquired data can provide valuable information for evaluating the fire risks and verifying fire investigation from buildings composed of these insulation panels.

• Journal of the Korean Association of Geographic Information Studies
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• v.25 no.2
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• pp.1-17
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• 2022

This study analyzed the PM_2.5 pattern by using data measured for one year from June 2020 to May 2021 by 21 low-cost sensors installed near the Changwon National Industrial Complex in Changwon, Gyeongsangnam-do. For the PM_2.5 pattern, the land use types around the measuring points and meteorological factors such as air temperature and wind speed were considered. The PM_2.5 concentration was high from November to March in winter, and from 1 to 9 in the morning and early in the morning by time zone. The concentration of PM_2.5 was higher as it got closer to the industrial area, but the concentration was lower in the residential area and public facility area. In terms of meteorological factors, the higher the air temperature and wind speed, the lower the concentration of PM_2.5. As a result of this study, it was possible to identify the PM_2.5 patter near Changwon National Industrial Complex. This result will be useful data that can be used in urban and environmental planning to improve air quality including PM_2.5 in urban area in the future.

• Journal of Korea Foundry Society
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• v.41 no.6
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• pp.550-557
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• 2021

With the advent of the fourth industrial revolution, the interest in the internet of things (IoT) in manufacturing is growing, even at foundries. There are several types of process data that can be automatically collected at a foundry, but considerable amounts of process data are still managed based on handwriting for reasons such as the limited functions of outdated production facilities and process design based on operator know-how. In particular, despite recognizing the importance of converting process data into big data, many companies have difficulty adopting these steps willingly due to the burden of system construction costs. In this study, the field applicability of IoT-based devices was examined by manufacturing devices and applying them directly to the site of a centrifugal foundry. For the centrifugal casting process, the temperature and humidity of the working site, the molten metal temperature, and mold rotation speed were selected as process parameters to be collected. The sensors were selected in consideration of the detailed product specifications and cost required for each process parameter, and the circuit was configured using a NodeMCU board capable of wireless communication for IoT-based devices. After designing the circuit, PCB boards were prepared for each parameter, and each device was installed on site considering the working environment. After the on-site installation process, it was confirmed that the level of satisfaction with the safety of the workers and the efficiency of process management increased. Also, it is expected that it will be possible to link process data and quality data in the future, if process parameters are continuously collected. The IoT-based device designed in this study has adequate reliability at a low cast, meaning that the application of this technique can be considered as a cornerstone of data collecting at foundries.

• Journal of Appropriate Technology
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• v.7 no.2
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• pp.196-205
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• 2021

As industrial safety increases, various industrial accident prevention technologies using smart factory technology are being studied. However, small and medium enterprises (SMEs), which account for the majority of industrial accidents, are having difficulties in preventing industrial accidents by applying these smart factory technologies due to practical problems. In this study, customized monitoring and warning systems for each type of industrial accident were developed and applied to the actual field. Through this, we demonstrated industrial accident prevention technology through appropriate smart factory technology used by SMEs. A customized monitoring system using vision, current, temperature, and gas sensors was established for the four major disaster types: worker body access, short circuit and overcurrent, fire and burns due to high temperature, and emission of hazardous gas. In addition, a notification method suitable for each work environment was applied so that the monitored risk factors could be recognized quickly, and real-time data transmission and display enabled workers and managers to understand the disaster risk effectively. Through the application and demonstration of these appropriate smart factory technologies, the spread of these industrial safety technologies is to be discussed.