• 한국표면공학회지
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• 제37권3호
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• pp.158-163
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• 2004

ITO thin film was deposited on the glass by RF magnetron sputtering. Dependance of the process parameters such as thickness, target-to-substrate distance, substrate temperature and oxygen partial pressure on the transmittance and electrical resistance of ITO film were investigated. The deposition conditions for getting better optical and electrical ITO characteristics were the 1800-$2300\AA$ thickness, 65mm substrate-to-target distance, $350^{\circ}C$ substrate temperature and 8% oxygen partial pressure. At these conditions, the transmittance and sheet resistance of the ITO film were 83.3% and 77.86Ω/$\square$, respectively.

• 한국주조공학회지
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• 제31권5호
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• pp.288-292
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• 2011

In order to complement the drawbacks of quartz crucible such as fragile-like break and melt-leakage through open slit nozzle, a new PFC system has been developed using a common graphite crucible and plugging system. The u melt is fed on to the rotating a roll through slit nozzle by self-gravity. The new equipment was designed and manufactured successfully. An effort for optimizing all related parameter has been made. Then using the optimized parameters about 10 meters u foil having very thin thickness, which meets the target thickness of 130 ${\mu}m$ and enough width more than 60 mm could be made. The thickness homogeneity set improved, due to the lower eddy flowing of the melt flow the self-gravity feeding system.

• 한국광학회지
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• 제6권3호
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• pp.245-256
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• 1995

Fourier 면환을 이용하여 불균일 굴절률 박막의 rugate 필터를 설계하였으며 rugate 필터의 반사율, 대역폭, 광학 두께, Q 함수 등을 변화시키며 Fourier 변환의 여러 가지 특성을 조사하였다. 주어진 단선 및 이중 rugate 필터의 과녁 스펙트럼에 불균일 굴절률 박막의 스펙트럼을 맞추기 위하여 merit 함수를 사용하였으며 merit 값이 최소가 되도록 Q 함수를 반복계산하여 수정하였다. Sossi, Bovard, Fabricius가 각각 유도한 세 종류의 Q함수를 반복계산 횟수, merit 함수의 값, 최적 광학두께 등의 관점에서 비교하였다. 반사율이 높은 rugate 필터 설계에는 반복계산 수정 후 반사율이 과녁스펙트럼에 가까운 Bovard와 Fabricius의 Q함수가 적당하며, 광학 두께는 최소 광학두께만 넘으면 반복계산 수정과정을 이용하여 과녁반사율을 맞출 수 있으므로 반사대역폭이 허용하는 광학두께로 결정하면 될 것이다.

• Nuclear Engineering and Technology
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• 제53권10호
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• pp.3164-3170
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• 2021

The increasing interest that GEANT4 is gaining nowadays, because of its special capabilities, prompted us to address its reliability in neutronic calculation for the realistic and complex spallation target MEGAPIE of the Paul Scherrer Institute of Switzerland. In this paper we have specifically addressed the neutronic characterization of the active zone of this target. Three physical quantities are evaluated: neutron flux spectra and total neutron fluxes on target's z-axis, and the neutron yield as a function of the target's altitude and radius. Comparison of the obtained results with those of the MCNPX reference code and some experimental measurements have confirmed the impact of the geometrical and proton beam models on the neutron fluxes. It has also allowed to reveal the intrinsic influence of the code type. The resulting differences reach a factor of ~2 for the beam model and 4-18% for the other parameters cumulated. The analysis of the neutron yield has led us to conclude that: 1) Increasing the productivity of the MEGAPIE target cannot be achieved simply by increasing the thickness of the target, if the irradiation parameters are not modified. 2) The size of the spallation area needs to be redefined more precisely.

• Journal of Radiation Protection and Research
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• 제35권1호
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• pp.43-48
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• 2010

방사선의 선질은 X선관의 target에 따라 결정된다. 유방검사의 경우 Molybdenum target을 사용하는데 22~28 kV 범위에서 평균 17.9~19.5 keV의 Mo 특성에너지를 얻어 유방의 high contrast 영상을 얻을 수 있다. 따라서 본 연구에서는 최근 대부분의 유방 검사장치에 이용되는 Mo/Mo 조합 유방장치의 미세병변 탐지능력을 측정하기 위하여 ALVIM TRM 팬텀을 이용하여 그 기초적인 실험으로 획득한 영상을 ROC(receiver operating characteristic) curve를 통해 분석하였다. 유방의 평균 피사체 두께가 40 mm로 가정하고 kV와 mAs, 그리고 두께변화에 따른 질환 검출능력을 실험한 결과, kV 변화에서는 Speck과 Fiber의 병소 검출능력이 거의 차이를 보이지 않은 것으로 나타났으며, mAs와 피사체두께 변화에서는 많은 차이를 보이는 것으로 나타났다. 즉, 유방의 피사체 평균두께인 약 40 mm에서는 관전압 변화가 병소의 검출능력에 많은 영향을 끼치지 않으므로 평균 두께의 피사체에서는 관전압을 높여서는 안된다.

• 한국재료학회지
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• 제20권1호
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• pp.47-50
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• 2010

Various thicknesses of Al-doped ZnO (AZO) films were deposited on glass substrate using pulsed dc magnetron sputtering with a cylindrical target designed for large-area high-speed deposition. The structural, electrical, and optical properties of the films of various thicknesses were characterized. All deposited AZO films have (0002) preferred orientation with the c-axis perpendicular to the substrate. Crystal quality and surface morphology of the films changed according to the film thickness. The samples with higher surface roughness exhibited lower Hall mobility. Analysis of the measured data of the optical band gap and the carrier concentration revealed that there were no changes for all the film thicknesses. The optical transmittances were more than 85% regardless of film thickness within the visible wavelength region. The lowest resistivity, $4.13\times10^{-4}\Omega{\cdot}cm^{-1}$ was found in 750 nm films with an electron mobility $(\mu)$ of $10.6 cm^2V^{-1} s^{-1}$ and a carrier concentration (n) of $1.42\times10^{21} cm^{-3}$.

• 한국진공학회지
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• 제18권5호
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• pp.394-401
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• 2009

본 논문은 ZnO 분말 타겟을 스퍼터링하여 glass 기판 위에 증착한 ZnO 박막의 구조적, 광학적 특성을 보고한다. 소결된 ZnO ceramic target을 사용하는 보통의 radio-frequency magnetron sputtering과 달리 본 연구에서는 전처리과정이 필요하지 않은 ZnO 분말 target을 사용하였다. ZnO 박막은 wurtzite (0002) 우선배향면으로 성장하였다. 초기의 ZnO 박막은 매우 평평한 층구조로 증착되었고, 두께가 증가함에 따라 섬구조로 전이하였다. 400-1000 nm 광원에 대하여 평균 88% 이상의 광투과도를 나타내었으며, 220 nm 시편의 경우, 3.23 eV의 near bandedge emission 흡수단을 측정하였다.

• 한국치위생학회지
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• 제16권5호
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• pp.695-700
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• 2016

Objectives: The purpose of the study was to investigate the effect of CAD/CAM ceramic thickness on shade. Methods: 24 disk-shaped ceramic specimens (E.Max CAD & Empress CAD, $12mm{\times}12mm$) were prepared and divided into 4 groups (n=6). Ceramic specimens in 2 thicknesses (0.8 mm, 1.0 mm) were made low translucency(LT) shade A2. All specimens were measured as L*, a*, b* using spectrophotometer. The color differences(${\Delta}E$ values) between the specimen and a control target block ($12{\times}12{\times}1.2mm$) were calculated. Two-way ANOVA performed between 2 groups(material and thickness). Results: As the thickness increased, the $L^*$ (for all groups) and $b^*$ value (for all groups) increased and the $a^*$ value(for LR group) decreased. The mean color differences caused by thickness was acceptible (${\Delta}E$ > 2) for group LD1. But the mean color differences by thickness were not selected (${\Delta}E$ < 2) for group LD2, LR1, LR2. Conclusions: The different thickness can influence the final color of CAD/CAM ceramic.

• 한국표면공학회지
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• 제41권6호
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• pp.274-278
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• 2008

3-dimensional numerical analysis for a rectangular magnetron cathode model is done to predict cooling characteristics of high power sputtering system for ZnO deposition. It includes cooling channel design, heat transfer analysis of a target, bonding layer and backing plate. In order to model erosion profiles of a target, ion current density distribution from 3D Monte Carlo simulation is used to distribute total sputtering power to 5 discrete regions. At 3 kW of sputtering power and cooling water flow of 1 liter/min at $10^{\circ}C$, the maximum surface temperature was $45.8^{\circ}C$ for a flat new target and $156^{\circ}C$ for a target eroded by 1/3 of its thickness, respectively.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.565-568
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• 2005

We describe a new scheme of dispersive white-light interferometer that is capable of measuring the thickness profile of thin-film layers, for which not only the top surface height profile but also the film thickness of the target surface should be measured at the same time. The interferometer is found useful particularly for in-situ inspection of micro-engineered surfaces such as liquid crystal displays, which requires for high-speed implementation of 3-D surface metrology.