• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.921-926
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• 1997

SOI(Silicon On lnsulator) technology is many advantages in the gabrication of MOS(Metal-Oxide Semiconductor) and CMOS(Complementary MOS) structures. These include high speed, lower dynamic power consumption,greater packing density, increased radiation tolearence et al. In smiple form of bonded SOL wafer manufacturing, creation of a bonded SOI structure involves oxidizing at least one of the mirror polished silicon surfaces, cleaning the oxidized surface and the surface of the layer to which it will be bonded,bringing the two cleanded surfaces together in close physical proximity, allowing the subsequent room temperature bonding to proceed to completion, and than following this room temperature joining with some form of heat treatment step,and device wafer is thinned to the target thickness. This paper has been performed to investigate the possibility of the bonded SOI wafer manufacturing Especially, we focused on the bonding quality and thinning method. Finally,we achieved the bonded SOI wafer that Si layer thickness is below 3 .mu. m and average roughness is below 5.angs.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.52-55
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• 1997

In this paper, the case study of reducing rotational errors is done for a grinding spindle with an active magnetic bearing system. The rotational errors acting on the magnetic bearing spindle are due to mass unbalance of rotor, runout, grinding excitation and unmodeled nonlinear dynamics of electromagnets. For the most case, the electrical runout of sensor target is big even in well-finished surface; this runout can cause a rotation error amplified by feedback control system. The adaptive feedforward method based on LMS algorithm is discussed to compensate this kind of runout effects, and investigated its effectiveness by numerical simulation and experimental analysis. The rotor orbit size in both bearings is reduced about to 5 pin due to lX rejection by feedforward control up to 50, 000 rpm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.605-608
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• 1997

In this paper, the case study of reducing rotational errors is done for a grinding spindle with an active magnetic bearing system. The rotational errors acting on the magnetic bearing spindle are due to mass unbalance of rotor, runout, grinding excitation and ed nonlinear dynamics of electromagnets. For the most case, the electrical runout of sensor target is big even in well-finished surface; this runout can cause a rotation error amplified by feedback control system. The adaptive feedforward method based on LMS algorithm is discussed to compensate this kind of runout effects, and investigated its effectiveness by numerical simulation and experimental analysis. The rotor orbit size in both bearings is reduced about to 5 pin due to lX rejection by feedforward control up to 50,000 rpm.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.7
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• pp.29-38
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• 1997

A closed-loop system modeling of an active/semiactive suspension system has been accomplished through an artificial neural network. A 7DOF full model as a system's equation of motion has been derived and an output feedback linear quadratic regulator has been designed for control purpose. A training set of a sample data has been obtained through a computer simulation. A 7DOF full model with LQR controller simulated under several road conditions such as sinusoidal bumps and rectangular bumps. A general multilayer perceptron neural network is used for dynamic modeling and target outputs are fedback to the a layer. A backpropagation method is used as a training algorithm. Model validation of new dataset have been shown through computer simulations.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.288-291
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1087-1090
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• 2003

In this study, experimental procedures were suggested to investigate the sloshing behavior of a liquid storage tank subjected to inevitably external vibrating conditions. For this purpose. liquid storage tank with rectangular cross section was made of an acrylic resin for the visualization of liquid fluctuation. A specially designed vibrator was used to provide a specified vibrating condition to the liquid storage tank. Extrapolation technique was applied to determine sloshing natural frequency by using various sloshing frequencies at each vibrating displacement and liquid contents at a fixed vibrating frequency. Sloshing mode was also determined from continuous images or liquid fluctuation captured from a video camera. In addition, change in the height of the liquid free surface was measured by using a floating target and a laser displacement sensor. It is found that the suggested method can be applicable to identify the sloshing behavior of liquid storage tank with rectangular cross section.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.316-320
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• 2003

This paper introduces an autonomous underwater vehicle (AUV) model, ASUM, equipped with a visual servo control system to dock into an underwater station with a camera and motion sensors. To make a visual servoing AUV, this paper implemented the visual servo control system designed with an augmented state equation, which was composed of the optical flow model of a camera and the equation of the AUV's motion. The system design and the hardware configuration of ASUM are presented in this paper. ASUM recognizes the target position by processing the captured image for the lights, which are installed around the end of the cone-type entrance of the duct. Unfortunately, experiments are not yet conducted when we write this article. The authors will present the results for the AUV docking test.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.476-480
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• 2003

This paper presents an effective method to analyze the dynamic characteristics for the shilling transients of power transmission system using the multibody dynamics, which is composed of subsystem equation, subsystem assemble, and the self-determining technique for the system degree of freedom. Using the advantages of multibody dynamics, the proposed method can be used easily for mathematical models of mechanical systems, such as a power transmission, compared with newtonian method. With this theory, dynamic simulation program was developed. The program can be used to verify system performances, transient phenomena, and other dynamic problems. The simulation of a target system was presented, and its validity was attained by being compared with the previous analysis using newtonian method.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.2 s.191
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• pp.73-85
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• 2007

The rear lateral collision warning system using fuzzy control algorithms is discussed in this paper. Common rear lateral warning system has many problems. For example if target vehicle comes into the warning area, it must unconditionally warn. Drivers could be interrupted by it. To solve the problem, I divided measuring area into two sections. One section is blind area of vehicle and the other rear lateral area. For blind area, obtained data was filtered inefficient warning signal by using relative velocity method. For rear lateral area, a fuzzy logic algorithm is used to recognition of obstacles. According to our experiment relative velocity method and fuzzy logic algorithms were very efficient.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.1
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• pp.69-77
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• 1998

Linear displacement accuracy is one of the most important factors that determine machine tool accuracy The laser interferometer has been usually recommended for the measurement of linear displacement accuracy. In this paper, microcomputer aided measurement and compensation system has been developed for the pitch error in a CNC machine tool. For accurate pitch error calculation. the analysis code for the pitch error has been also implemented according to the international standards (ISO). The PC based automatic compensation system for the pitch error is also implemented. A new algorithm for calculating optimum value for pitch error compensation is proposed, minimizing the deviation at each target points. The development system has been applied to a practical CNC maching center and the performance has been demonstrated.