• Korean Chemical Engineering Research
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• v.51 no.4
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• pp.506-512
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• 2013

Biomass and low-grade coals are known to be better potential sources of energy compared to crude oil and natural gas since these materials are readily available and found to have large reserves, respectively. Gasification of these carbonaceous materials produced syngas for chemical synthesis and power generation. Woodchip, sawdust and lignite were gasified with steam in a thermobalance reactor under atmospheric pressure in order to evaluate their kinetic rate information. The effects of gasification temperature ($600{\sim}900^{\circ}C$) and partial pressure of steam (20~90 kPa) on the gasification rate were investigated. The three different types of gas-solid reaction models were applied to the experimental data to predict the behavior of the gasification reactions. The modified volumetric model predicted the conversion data well, thus the model was used to evaluate kinetic parameters in this study. The observed activation energy of biomass, sawdust and lignite gasification reactions were found to be in reasonable range and their rank was found to be sawdust > woodchip > lignite. The expression of apparent reaction rates for steam gasification of the three solids was proposed to provide basic information on the design of coal gasification processes.

• Applied Chemistry for Engineering
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• v.16 no.6
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• pp.737-741
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• 2005

In this study, the effect of copper content on the NO removal efficiency by Cu/MCM-41 has been investigated. MCM-41 was prepared by hydrothermal synthesis using a gel mixture of colloidal silica solution and cetyltrimethylammonium. Cu/MCM-41 was manufactured with copper content (5, 10, 20, and 40%) in Cu(II) acetylacetonate. The surface properties of MCM-41 were investigated by using pH, XRD, and FT-IR analyses. $N_2/77K$ adsorption isotherm characteristics, including the specific surface area and micropore volume were studied by BET's equation and Boer's t-plot methods. NO removal efficiency was confirmed by gas chromatography technique. From the experimental results, the MCM-41 was analyzed to have the surface functional groups of Si-OH and Si-O-Si and the characteristic diffraction lines (100), (110), (200), and (210) corresponding to a hexagonal arrangement structure. The copper content supported on MCM-41 appeared to increase the NO removal efficiency in spite of decreasing the specific surface areas or micropore volumes. Consequently, it was found that the copper content in Cu/MCM-41 played an important role in improving the NO removal efficiency, which was mainly attributed to the catalytic reactions.

• Korean Chemical Engineering Research
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• v.57 no.6
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• pp.812-825
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• 2019

Two dolomite samples mined from the different mines were calcined using a batch-type microwave kiln ($950/60min^{\circ}C$) to produce $CaO{\cdot}MgO$. The hydration of the $CaO{\cdot}MgO$ samples shows different reactivity. MgO was separated by reacting with a strong acid cation exchange resin using the reactivity of the hydration properties of light dolomite ($CaO{\cdot}MgO$). Calcium ($Ca-(R-SO_3)_2$) was separated from the prepared $CaO{\cdot}MgO$ by the cation exchange resin ($CaO{\cdot}MgO:R-SO_3H=1:12mass%$). High purity MgO (higher than 94 mass %) with unburned $CaCO_3$ (1~2 mass %) was obtained by the separation process. The separated MgO was heated at $950^{\circ}C$ for 60 minutes to afford high purity MgO with MgO content higher than 96%. And High-grade $CaCO_3$ was prepared from the reaction with calcium adsorbed resin ($Ca-(R-SO_3)_2$) and NaOH, $CO_2$ gas.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.29 no.1
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• pp.12-18
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• 2019

The spherical $SiO_2$ powders were synthesized by the scaled-up ultrasonic pyrolysis (USP). The aqueous $SiO_2$ sol, which contained 20~30 nm $SiO_2$ particles, was used as a precursor for the scaled-up USP. The effects of the USP operating conditions and precursor conditions were systematically investigated, including reaction temperature, gas flow rate, and the concentration of $SiO_2$ sol on the morphologies of synthesized $SiO_2$ particles. the synthesized $SiO_2$ particle showed a pseudo-crystal phase, spherical morphology, and a smooth surface. The size of the spherical $SiO_2$ particle decreased as both reaction temperature increased and precursor concentration decreased. In addition, the synthesized $SiO_2$ particle size was increased by increasing the gas flow rate. Lastly, the scaled-up USP was compared with the lab-scale USP based on the same process conditions. Due to a short retention time in the reaction tube during the USP process, the $SiO_2$ particle synthesized via the lab-scale USP showed a larger particle size.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1504-1507
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• 1999

We have grown vertically aligned carbon nanotubes in a large area of Co-Ni codeposited Si substrates by the thermal CVD using $C_2H_2$ gas. Since the discovery of carbon nanotubes, Synthesis of carbon nanotubes for mass production has been achieved by several methods such as laser vaporization arc discharge, and pyrolysis. In particular, growth of vertically aligned nanotubes is of technological importance for applications to FED. Recently, vertically aligned carbon nanotubes have been grown on glass by PECVD Aligned carbon nanotubes can be also grown on mesoporous silica and Fe patterned porous silicon using CVD. Despite such breakthroughs in the growth, the growth mechanism of the alignment are still far from being clearly understood. Furthermore, FED has not been clearly demonstrated yet at a practical level. Here, we demonstrate that carbon nanotubes can be vertically aligned on catalyzed Si substrate when the domain density reaches a certain value. We suggest that steric hindrance between nanotubes at an initial stage of the growth forces nanotubes to align vertically and then nanotubes are further grown by the cap growth mechanism.

• Korean Journal of Materials Research
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• v.3 no.6
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• pp.652-660
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• 1993

It was investigated to obtain the relationship between magnetic properties and conditions of forming $Fe_{3}C$ single phase from acicular goethite by heat treatment under the atmosphere of CO and $N_{2}$ mixed gas. X-ray analyses, TEM and VSM measurements were imployed for the characteristics of the carbide. Acicular goethite was sinthesized under proper process parameters. $Fe_{3}C$ single phase was obtained above $550^{\circ}C$, 60min. and $Fe_{5}C_2$ was formed with $Fe_{3}C$ below that temperature. The soturation magnetization of $Fe_{3}C$ single phase was about 100emu/g regardless of the reaction temperature. The coersive force and the ratio of Mr/Ms decreased respectively from 780 to 400 Oe. and from 0.35 to 0.13 with increasing reaction temperature.

• Toxicological Research
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• v.32 no.3
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• pp.245-250
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• 2016

3-Methylpentane ($C_6H_{14}$, CAS No. 96-14-0), isomer of hexane, is a colorless liquid originating naturally from petroleum or natural gas liquids. 3-Methylpentane has been used as a solvent in organic synthesis, as a lubricant, and as a raw material for producing carbon black. There is limited information available on the inhalation toxicity of 3-methylpentane, and the aim of this study was to determine its subacute inhalation toxicity. According to OECD Test Guideline 412 (subacute inhalation toxicity: 28-day study), Sprague Dawley rats were exposed to 0, 284, 1,135, and 4,540 ppm of 3-methylpentane for 6 hr/day, 5 days/week for 4 weeks via whole-body inhalation. Mortality, clinical signs, body weights, food consumption, hematology, serum chemistry, organ weights, and gross and histopathological findings were compared between control and all exposure groups. No mortality or remarkable clinical signs were observed during the study. No gross or histopathological lesions, or adverse effects on body weight, food consumption, hematology, serum chemistry, and organ weights were observed in any male or female rats in all exposure groups, although some statistically significant changes were observed in food consumption, serum chemistry, and organ weights. In conclusion, the results of this study indicate that no observable adverse effect level (NOAEL) for 3-methylpentane above 4,540 ppm/6 hr/day, 5 days/week for rats.

• JSTS:Journal of Semiconductor Technology and Science
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• v.11 no.3
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• pp.135-145
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• 2011

Accurate process characterization and optimization are the first step for a successful advanced process control (APC), and they should be followed by continuous monitoring and control in order to run manufacturing processes most efficiently. In this paper, process characterization and recipe optimization methods with multiple outputs are presented in high density plasma-chemical vapor deposition (HDP-CVD) silicon dioxide deposition process. Five controllable process variables of Top $SiH_4$, Bottom $SiH_4$, $O_2$, Top RF Power, and Bottom RF Power, and two responses of interest, such as deposition rate and uniformity, are simultaneously considered employing both statistical response surface methodology (RSM) and neural networks (NNs) based genetic algorithm (GA). Statistically, two phases of experimental design was performed, and the established statistical models were optimized using performance index (PI). Artificial intelligently, NN process model with two outputs were established, and recipe synthesis was performed employing GA. Statistical RSM offers minimum numbers of experiment to build regression models and response surface models, but the analysis of the data need to satisfy underlying assumption and statistical data analysis capability. NN based-GA does not require any underlying assumption for data modeling; however, the selection of the input data for the model establishment is important for accurate model construction. Both statistical and artificial intelligent methods suggest competitive characterization and optimization results in HDP-CVD $SiO_2$ deposition process, and the NN based-GA method showed 26% uniformity improvement with 36% less $SiH_4$ gas usage yielding 20.8 ${\AA}/sec$ deposition rate.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.105-105
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• 2012

We have developed a photoemission-assisted plasma-enhanced chemical vapor deposition (PAPE-CVD) [1,2], in which photoelectrons emitting from the substrate surface irradiated with UV light ($h{\nu}$=7.2 eV) from a Xe excimer lamp are utilized as a trigger for generating DC discharge plasma as depicted in Fig. 1. As a result, photoemission-assisted plasma can appear just above the substrate surface with a limited interval between the substrate and the electrode (~10 mm), enabling us to suppress effectively the unintended deposition of soot on the chamber walls, to increase the deposition rate, and to decrease drastically the electric power consumption. In case of the deposition of DLC gate insulator films for the top-gate graphene channel FET, plasma discharge power is reduced down to as low as 0.01W, giving rise to decrease significantly the plasma-induced damage on the graphene channel [3]. In addition, DLC thickness can be precisely controlled in an atomic scale and dielectric constant is also changed from low ${\kappa}$ for the passivation layer to high ${\kappa}$ for the gate insulator. On the other hand, negative electron affinity (NEA) of a hydrogen-terminated diamond surface is attractive and of practical importance for PAPECVD, because the diamond surface under PAPE-CVD with H2-diluted (about 1%) CH4 gas is exposed to a lot of hydrogen radicals and therefore can perform as a high-efficiency electron emitter due to NEA. In fact, we observed a large change of discharge current between with and without hydrogen termination. It is noted that photoelectrons are emitted from the SiO2 (350 nm)/Si interface with 7.2-eV UV light, making it possible to grow few-layer graphene on the thick SiO2 surface with no transition layer of amorphous carbon by means of PAPE-CVD without any metal catalyst.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.26-26
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• 2009

Vertically aligned arrays of mm-long multi-walled carbon nanotubes (MWCNTs) on Si substrates have been synthesized by water-assisted thermal chemical vapor deposition (CVD). The growth of CNTs was investigated by changing the experimental parameters such as growth temperature, growth time, gas composition, annealing time, catalyst thickness, and Al underlayer thickness. The 0.5-nm-thick Fe served as catalyst, underneath which Al was coated as a catalyst support as well as a diffusion barrier on the Si substrate. We grew CNTs by adding a little amount of water vapor to enhance the activity and the lifetime of the catalyst. Al was very good at producing the nm-size catalyst particles by preventing "Ostwald ripening". The Al underlayer was varied over the range of 15~40 nm in thickness. The optimum conditions for the synthesis parameters were as follows: pressure of 95 torr, growth temperature of $815^{\circ}C$, growth for 30 min, 60 sccm Ar + 60 sccm $H_2$ + 20 sccm $C_2H_2$. The water vapor also had a great effect on the growth of CNTs. CNTs grew 5.03 mm long for 30 min with the water vapor added while CNTs were 1.73 mm long without water vapor at the same condition. As-grown CNTs were characterized by using scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM), and Raman spectroscopy. High-resolution transmission electron microscopy showed that the as-grown CNTs were of ~3 graphitic walls and ~6.6 nm in diameter.