• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.50-53
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• 2003

CMP (chemical mechanical polishing) process remained to solve several problems in deep sub-micron integrated circuit manufacturing process. especially consumables (polishing pad, backing film, slurry, pad conditioner), one of the most important components in the CMP system is the slurry. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are important in determining polish rate and planarization ability of a CMP process. However, the cost of abrasives is still very high. So, in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Journal of the Korean Ceramic Society
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• v.33 no.11
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• pp.1276-1284
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• 1996

Ultrafine calcim carbonate powders with the size of 0.05~0.1 ${\mu}{\textrm}{m}$ and the calcite phase were prepared by the nozzle spouting method which was conducted by spouting calcium hydroxide slurry in reactor filled with CO2 gas. Well dispersed ultra-fine particles were synthesized in condition of high Ca(OH)2 concentration of the slurry ( 0.5wt%) synthesized calcium carbonate powder was shown the large particle size with agglo-meration.

• Journal of the Korean Ceramic Society
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• v.41 no.9
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• pp.647-652
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• 2004

In aqueous tape casting of alumina slurry systems, the relationships between the suspension compositions and the defects of the dried tapes were discussed. The suspensions compositions were controlled with the ratios of the solids, water and organics binder contents. The effects of the thickness of dried tape and kinds of binder system were also examined. In the defect free region, the apparent viscosity showed nearly same value due to the count balancing effect of solid and organic binder content on the apparent viscosity. When water content was constant, increasing solid led to decrease of organic binder content. The defect free region was narrowed with increasing of casting thickness. When linear type acrylic emulsion binders system (D1000 and D 1035) were used, defect free zone formed the belt type in the triangle of solid, water and organic binder content according to the line of constant water contents. However the defect free region was not found in the cross-link type emulsion binder system (D 1050).

• Journal of Hydrogen and New Energy
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• v.24 no.5
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• pp.451-460
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• 2013

In a direct coal fuel cell (DCFC) system, it is essential to identify volume fraction of coal suspended in electrolyte melt in order to control its dispersion and fluidity. This requirement is compelling especially at anode channel where hot slurry is likely to flow at low velocity. In this study, light scattering techniques were employed to measure the volume fraction for a pulverized coal suspension with relatively high absorption coefficient. The particle size, scattering angle, and volume fraction were varied to evaluate their effects on the scattering behavior as well as scattering regime. The larger coal size and smaller forward scattering angle could provide a shift to more favorable scattering regime, i.e., independent scattering, where interferences of light scattering from one particle with others are suppressed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.145-148
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• 2003

Recently, the recycle of CMP (chemical mechanical polishing) slurries have been positively considered in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in CMP process. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are one of the most important components. Especially, the abrasive particles of slurry are needed in order to achieve a good removal rate. However, the cost of abrasives, is still very high. In this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slury, As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Journal of the Korea Society of Computer and Information
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• v.25 no.2
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• pp.189-195
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• 2020

In this study, the inlet duct and guide vane of the gas floating absorption tower were redesigned to improve the desulfurization efficiency so that the exhaust gas can be uniformly introduced into the absorption tower. In order to reduce the sulfur oxide pollutants among the main sources of air pollutants in industrial boilers, the existing equipment is redesigned and solved. For this purpose, change the exhaust gas, the slurry and recycling the adsorbent to improve the removal efficiency of SOx component in the exhaust gas inside the gas floating absorption tower so as to uniformly contact. And the initial design value and CFD value for the pressure loss from the boiler outlet to the gas floating absorption tower outlet are verified. Also, the velocity distribution of the exhaust gas, the concentration distribution of the recycled adsorbent, the liquid slurry behavior, and the pressure loss were compared. The results confirmed that the desulfurization efficiency was improved because the pressure loss from the boiler outlet to the absorption tower outlet was reduced and the deflection of the exhaust gas was minimized.

• Korean Journal of Food Science and Technology
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• v.39 no.2
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• pp.169-174
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• 2007

In this study, we examined the characteristics of alkali gelatinization of corn starch. Here, the degree of corn starch gelatinization increased exponentially with the NaOH concentration of the starch slurry. The alkali gelatinization initiation point (AGIP) was obtained from the intersection point of gelatinization slope line, which resulted from the regression of the logarithmic degree of gelatinization, and was markedly changed. The effects of temperature and corn starch concentration on alkali gelatinization were studied with a 10%(w/w) corn starch suspension. We found that this corn starch suspension gelatinized in 24.1 meq/g starch of NaOH at $40^{\circ}C$, and in 9.8 meq NaOH/g starch at $60^{\circ}C$. Moreover, a 40%(w/w) corn starch suspension gelatinized with 9.5 meq NaOH/g starch, even at $40^{\circ}C$. These results indicate that the amount of alkali added for the gelatinization of corn starch has an inverse relationship with the temperature and concentration of corn starch.

• Journal of the Korean Ceramic Society
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• v.50 no.6
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• pp.460-465
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• 2013

Plate-shaped inorganic particles are coated onto a stainless steel substrate by the electrophoretic deposition of a precursor slurry which includes the inorganic particles of $Al_2O_3$ and polymer resin in mixed solvents to mimic the abalone shell structure, which is a composite of plate-shaped inorganic particles and organic interlayer binding materials with a layered orientation. The process parameters of the electrophoretic deposition include the voltage, coating time, and conductivity of the substrate. In addition, the suspension parameters are the particle size, concentration, viscosity, conductivity, and stability. We prepared an organic-inorganic composite coating with a high inorganic solid content by arraying the plate-shaped $Al_2O_3$ particles and electrophoretic resin via an electrophoretic deposition method. We analyzed the effect of the slurry composition and the electrophoretic deposition process parameters on the physical, mechanical and thermal properties of the coating layer, i.e., the thickness, density, particle orientation, Young's modulus and thermogravimetric analysis results.

• Applied Chemistry for Engineering
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• v.29 no.3
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• pp.258-263
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• 2018

This study attempted to utilize ultrafine precipitated calcium carbonate for fluoride removal from the wastewater of electronics industries. An average particle size of the calcium carbonate was $0.96{\mu}m$, and pH of the aqueous slurry was 10 with 70% in mass. The suspension solution showed approximately 2 mL/hr of the sedimentation rate. The present calcium carbonate solution could be comparable to the conventional aqueous calcium source, $Ca(OH)_2$, for the neutralization and removal of fluoride ions. Depending on the amount of an additional alkali source, less amounts of test Ca-source slurries were required to reach the solution pH of 7.0 than that of using the aqueous calcium hydroxide. It was also found from XRD analysis that more calcium fluoride precipitates were formed by the addition of calcium carbonate solution rather than that of calcium hydroxide. In addition, Minteq equilibrium modelling estimated various ion complexes of fluoride and calcium in this process.

• Korean Journal of Materials Research
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• v.22 no.1
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• pp.54-60
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• 2012

The particle size of MgO was examined as a function of the Na content in $Mg(OH)_2$ powders and the calcination temperature. $Mg(OH)_2$ suspension was obtained by dropwise precipitation of $Mg(NO_3)_2{\cdot}6H_2O$ and NaOH solutions. The suspension was diluted by varying the dilution volume ratio of distilled water to $Mg(OH)_2$ suspension to change the Na salt concentration in the suspension. $Mg(OH)_2$ slurry was filtered and dried at $60^{\circ}C$ under vacuum, and then its $Mg(OH)_2$ powder was calcined to produce MgO with different amount of Na content at $500\sim900^{\circ}C$ under air. Investigation of the physical and chemical properties of the various MgO powders with dilution ratio and calcination temperature variation was done by X-ray diffraction, transmission electron microscopy, BET specific surface area and thermal gravimetric analysis. It was observed that MgO particle size could depend on the condition of calcination temperature and dilution ratio of the $Mg(OH)_2$ suspension. The particle size of the MgO depends on the Na content remaining in the $Mg(OH)_2$ powder, which powder was prepared by changing the dilution ratio of the $Mg(OH)_2$ suspension. This change increased as the calcination temperature increased and decreased as the dilution ratio increased. The growth of MgO particle size according to the increase of temperature was more effective when there was a relatively high content of Na. The increase of Na content lowered the temperature at which decomposition of $Mg(OH)_2$ to MgO took place, thereby promoting the crystal growth of MgO.