• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.434-435
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• 2012

Plasma enhanced chemical vapor deposition (PECVD) silicon dioxide thin films have many applications in semiconductor manufacturing such as inter-level dielectric and gate dielectric metal oxide semiconductor field effect transistors (MOSFETs). Fundamental chemical reaction for the formation of SiO2 includes SiH4 and O2, but mixture of SiH4 and N2O is preferable because of lower hydrogen concentration in the deposited film [1]. It is also known that binding energy of N-N is higher than that of N-O, so the particle generation by molecular reaction can be reduced by reducing reactive nitrogen during the deposition process. However, nitrous oxide (N2O) gives rise to nitric oxide (NO) on reaction with oxygen atoms, which in turn reacts with ozone. NO became a greenhouse gas which is naturally occurred regulating of stratospheric ozone. In fact, it takes global warming effect about 300 times higher than carbon dioxide (CO2). Industries regard that N2O is inevitable for their device fabrication; however, it is worthwhile to develop a marginable nitrous oxide free process for university lab classes considering educational and environmental purpose. In this paper, we developed environmental friendly and material cost efficient SiO2 deposition process by substituting N2O with O2 targeting university hands-on laboratory course. Experiment was performed by two level statistical design of experiment (DOE) with three process parameters including RF power, susceptor temperature, and oxygen gas flow. Responses of interests to optimize the process were deposition rate, film uniformity, surface roughness, and electrical dielectric property. We observed some power like particle formation on wafer in some experiment, and we postulate that the thermal and electrical energy to dissociate gas molecule was relatively lower than other runs. However, we were able to find a marginable process region with less than 3% uniformity requirement in our process optimization goal. Surface roughness measured by atomic force microscopy (AFM) presented some evidence of the agglomeration of silane related particles, and the result was still satisfactory for the purpose of this research. This newly developed SiO2 deposition process is currently under verification with repeated experimental run on 4 inches wafer, and it will be adopted to Semiconductor Material and Process course offered in the Department of Electronic Engineering at Myongji University from spring semester in 2012.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.7
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• pp.1253-1261
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• 2000

Natural organic matter (NOM) which occurs ubiquitously in both surface and ground waters, consists of both humic (i.e., humic and fulvic acids) and nonhumic components. NOM in general as well as certain constituents are problematic in water treatment. From a regulatory perspective, concerns focus upon the role of NOM constituents as disinfection byproduct (DBP) precursors. The fractionation of NOM through water treatment processes can provide insight into treatment process selection and applicability. Problematic NOM fractions can be targeted for removal or transformation. Significant source-related differences in NOM were observed among various source waters. This study found that bulk Dissolved Organic Carbon (DOC) concentration was hardly removed by oxidation process. Oxidation transformed high Molecular Weight (MW) hydrophobic fraction into low MW hydrophilic fraction. Ozone reduced s-pecific Ultraviolet Absorbance (SUVA) value more than chlorine. High MW hydrophobic fraction was effectively removed by coagulation process. About 50% of Trihalomethane Formation Potential (THMFP) was removed by coagulation process.

• Korean Journal of Remote Sensing
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• v.30 no.6
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• pp.743-754
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• 2014

In this present paper, we, for the first time, calculated $SO_2$ inflow from China to Korea peninsula based on OMI $SO_2$ products and HYSPLIT (Hybrid Single Particle Lagrangian Integrated Trajectory Model) backward trajectory calculations. The major factors used to estimate $SO_2$ flux are long range transported $SO_2$ concentration, transport speed of air mass, and thickness of transported air mass layer. The mean and maximum $SO_2$ fluxes are estimated to be 0.81 and $2.11g{\cdot}m^{-2}{\cdot}h^{-1}$, respectively based on OMI products while, those of $SO_2$ fluxes are 0.50 and $1.18g{\cdot}m^{-2}{\cdot}h^{-1}$ respectively using insitu data obtained at the surface. For most cases, larger $SO_2$ inflow values were found at the surface than those estimated for the air mass layer which extends from surface up to 1.5 km. However, increased transport speed of air mass leads to the enhanced $SO_2$ flux at the altitude up to 1.5 km at the receptor sites. Additionally, we calculate uncertainties of $SO_2$ flux using error propagation method.

• Journal of Korean Society of Environmental Engineers
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• v.28 no.12
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• pp.1280-1286
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• 2006

Three different virgin activated carbons made of each coal(Calgon), coconut(Samchully) and wood(Picabiol) based activated carbon(AC) were tested for an adsorption performance of 1,4-dioxane in a continuous adsorption column. Breakthrough behavior was Investigated that the breakthrough points of coal, coconut and wood based AC were observed as 3600 bed volumn(BV), 1440 BV and 144 BV respectively. Adsorption capacity(X/M) of coal, coconut and wood based AC was observed. The reported results of adsorption capacity showed that coal based AC was highest(578.9 ${\mu}g/g$), coconut based AC was intermediate(142.3 ${\mu}g/g$) and wood based AC was lowest(7.4 ${\mu}g/g$) due to increasing specific surface area. Moreover, carbon usage rates(CURs) for coal, coconut and wood based AC had been shown as 0.48 g/day, 1.41 g/day and 6.9 g/day respectively. The constant characteristic of the system, k of coal based AC was found to be 91.5 and k of coconut based AC was found to be 17.9. Removal efficiencies of 1,4-dioxane with different ozonation dosages(2 and 5 mg/L) for 20 min ozonation had been shown 38% and 87% respectively. There was no observation for biological removal of 1.4-dioxane by attached micro-organisms when used(3.1 years and over 5 years) biological activated carbon(BAC) without pretreatment of oxidation were employed. When a combination of ozonation(2 mg/L and 5 mg/L) and BAC process for $10{\sim}30$ min was applied, removal efficiency for 1,4-dioxine increased only $2{\sim}6%$ compared to only applying ozonation. Therefore removal efficiency of BAC process prior to using oxidation was proven to negligible. Consequently, the results presented in this paper provide a better insight into the adsorption performance of 1,4-dioxane. This observation suggests that using virgin activated carbon made of coal is the best selection for removal of 1,4-dioxane in the water treatment for an advanced treatment. It is clear from this research that longer EBCT for ozonation or higher ozone concentration are more effective operation methods for removal of 1,4-dioxane than longer EBCT in the BAC process.

• Journal of the Korean earth science society
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• v.43 no.1
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• pp.60-76
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• 2022

This study presents a software full setup and the following test execution times in a Linux cluster for the United Kingdom Earth System Model (UKESM) and then compares the model results from control and experimental simulations of the UKESM relative to various observations. Despite its low resolution, the latest version of the UKESM can simulate tropospheric chemistry-aerosol processes and the stratospheric ozone chemistry using the United Kingdom Chemistry and Aerosol (UKCA) module. The UKESM with UKCA (UKESM-UKCA) can treat atmospheric chemistryaerosol-cloud-radiation interactions throughout the whole atmosphere. In addition to the control UKESM run with the default CMIP5 SO₂ emission dataset, an experimental run was conducted to evaluate the aerosol effects on meteorology by changing atmospheric SO₂ loading with the newest REAS data over East Asia. The simulation period of the two model runs was 28 years, from January 1, 1982 to December 31, 2009. Spatial distributions of monthly mean aerosol optical depth, 2-m temperature, and precipitation intensity from model simulations and observations over East Asia were compared. The spatial patterns of surface temperature and precipitation from the two model simulations were generally in reasonable agreement with the observations. The simulated ozone concentration and total column ozone also agreed reasonably with the ERA5 reanalyzed one. Comparisons of spatial patterns and linear trends led to the conclusion that the model simulation with the newest SO₂ emission dataset over East Asia showed better temporal changes in temperature and precipitation over the western Pacific and inland China. Our results are in line with previous finding that SO₂ emissions over East Asia are an important factor for the atmospheric environment and climate change. This study confirms that the UKESM can be installed and operated in a Linux cluster-computing environment. Thus, researchers in various fields would have better access to the UKESM, which can handle the carbon cycle and atmospheric environment on Earth with interactions between the atmosphere, ocean, sea ice, and land.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.38 no.1
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• pp.91-101
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• 2012

This study's purpose is to research the antioxidant power of Calaguala (Polypodium leucotomos, PL) as an oral supplement: Calaguala, a native of Central America, is a fern which belongs to the family polypodiaceae protecting the skin from the ultraviolet and active oxygen free radicals. The total 14 volunteers, each female 7 & male 7, were divided into 2 groups, then exposed to UV for 30 min after taking Calaguala and placebo. The total antioxidant capacity (TAC) was analyzed by taking the blood samples from anticubital vein 3 hours after UV exposure. First, Calaguala siginifcantly decreased the concentration of active oxygen free radicals 4 weeks later. The concentration of active oxygen free radical in PL group declined more than placebo group, when measured 30 min and 3 hours after UV exposure. Second, Calaguala did not significantly increase TAC 4 weeks later, but significantly decreased TAC 3 hours after exposure, when compared with placebo group. Now days, the photo allergy and photo aging caused by air pollution and ozone destruction have drastically increased, and thus the amount of UV radiation reaching the earth's surface increased. The increase of active free oxygen radicals resulted in accelerating the diseases and aging. The first superficial protecting protection by reflection & dispersion and the second body internal protection by taking oral photo antioxidant such as Calaguala should be continuously researched.

• Journal of the Korean earth science society
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• v.32 no.3
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• pp.276-293
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• 2011

In this study a modeling system consisting of Weather Research and Forecasting (WRF), Sparse Matrix Operator Kernel Emissions (SMOKE), the Community Multiscale Air Quality (CMAQ) model, and the CMAQ-Model of Aerosol Dynamics, Reaction, Ionization, and Dissolution (MADRID) model has been applied to estimate enhancements of $PM_{10}$ during Asian dust events in Korea. In particular, 5 experimental formulas were applied to the WRF-SMOKE-CMAQ (MADRID) model to estimate Asian dust emissions from source locations for major Asian dust events in China and Mongolia: the US Environmental Protection Agency (EPA) model, the Goddard Global Ozone Chemistry Aerosol Radiation and Transport (GOCART) model, and the Dust Entrainment and Deposition (DEAD) model, as well as formulas by Park and In (2003), and Wang et al. (2000). According to the weather map, backward trajectory and satellite image analyses, Asian dust is generated by a strong downwind associated with the upper trough from a stagnation wave due to development of the upper jet stream, and transport of Asian dust to Korea shows up behind a surface front related to the cut-off low (known as comma type cloud) in satellite images. In the WRF-SMOKE-CMAQ modeling to estimate the PM10 concentration, Wang et al.'s experimental formula was depicted well in the temporal and spatial distribution of Asian dusts, and the GOCART model was low in mean bias errors and root mean square errors. Also, in the vertical profile analysis of Asian dusts using Wang et al's experimental formula, strong Asian dust with a concentration of more than $800\;{\mu}g/m^3$ for the period of March 31 to April 1, 2007 was transported under the boundary layer (about 1 km high), and weak Asian dust with a concentration of less than $400\;{\mu}g/m^3$ for the period of 16-17 March 2009 was transported above the boundary layer (about 1-3 km high). Furthermore, the difference between the CMAQ model and the CMAQ-MADRID model for the period of March 31 to April 1, 2007, in terms of PM10 concentration, was seen to be large in the East Asia area: the CMAQ-MADRID model showed the concentration to be about $25\;{\mu}g/m^3$ higher than the CMAQ model. In addition, the $PM_{10}$ concentration removed by the cloud liquid phase mechanism within the CMAQ-MADRID model was shown in the maximum $15\;{\mu}g/m^3$ in the Eastern Asia area.

• Journal of Korean Society of Environmental Engineers
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• v.33 no.9
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• pp.644-655
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• 2011

VOCs (Volatile Organic Compounds) have adverse effects on human health and have caused serious global air pollution problems such as ozone depletion and cimate changes. The total of 56 target VOCs were selected to be monitored in this study for 4 years (2006~2009). The VOCs were measured every hour. The concentration of BTEX was higher than the other target compounds. Generally, the levels of VOCs measured in this study were higher than those measured by the other studies because Gamjeon and Jangrim monitering sites are located in industrial areas. The seasonal variations showed that the VOCs were the highest in winter. The temporal variations showed that the VOCs were high during commuting time on weekday. PMF model was used to resolve source types and source contributions of VOCs in this study. Identified sources and quantified contributions resolved by PMF were vehicle exhaust (15.22%), thinning solvent (29.83%), surface coating (17.13%), industries (13.95%), LPG vehicle (15.22%), combustion boiler (7.11%) and biogenic source (6.61%). Thinning solvent and Surface coating were the most contributed sources possibly due to manufactures and automobile garages in Gamjeon and solvent and paint manufactures in Sasang-Gu.

• Korean Journal of Remote Sensing
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• v.39 no.6_2
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• pp.1591-1604
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• 2023

In ocean color remote sensing, atmospheric correction is a vital process for ensuring the accuracy and reliability of ocean color products. Furthermore, in recent years, the remote sensing community has intensified its requirements for understanding errors in satellite data. Accordingly, research is currently addressing errors in remote sensing reflectance (R_rs) resulting from inaccuracies in meteorological variables (total ozone, pressure, wind field, and total precipitable water) used as auxiliary data for atmospheric correction. However, there has been no investigation into the error in R_rs caused by the variability of the water vapor profile, despite it being a recognized error source. In this study, we used the Second Simulation of a Satellite Signal Vector version 2.1 simulation to compute errors in water vapor transmittance arising from variations in the water vapor profile within the GOCI-II observation area. Subsequently, we conducted an analysis of the associated errors in ocean color products. The observed water vapor profile not only exhibited a complex shape but also showed significant variations near the surface, leading to differences of up to 0.007 compared to the US standard 62 water vapor profile used in the GOCI-II atmospheric correction. The resulting variation in water vapor transmittance led to a difference in aerosol reflectance estimation, consequently introducing errors in R_rs across all GOCI-II bands. However, the error of R_rs in the 412-555 nm due to the difference in the water vapor profile band was found to be below 2%, which is lower than the required accuracy. Also, similar errors were shown in other ocean color products such as chlorophyll-a concentration, colored dissolved organic matter, and total suspended matter concentration. The results of this study indicate that the variability in water vapor profiles has minimal impact on the accuracy of atmospheric correction and ocean color products. Therefore, improving the accuracy of the input data related to the water vapor column concentration is even more critical for enhancing the accuracy of ocean color products in terms of water vapor absorption correction.