Statistical Characterization and Optimization of SU-8 Photoresist Processing by Response Surface Methodology (반응표면분석을 통한 SU-8 포토레지스트의 특성 및 최적화)
-
- Proceedings of the Korean Institute of Information and Commucation Sciences Conference
- /
- v.9 no.2
- /
- pp.891-894
- /
- 2005