• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.359-362
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• 2003

The aerostatic stage. which is used in semiconductor process, is demanded higher velocity and more precise accuracy for higher productivity and integrated performance. So, in the case of XY stage, H type structure, which is designed two co-linear axis of guide-way, driving force in one surface, has advantage of velocity and accuracy compared to conventional tacked type XY stage. To analyze characteristics of H type aerostatic stage, H type aerostatic surface XY stage is made, which is driven by linear motor and detected position with precise optical linear scale. And, analyze characteristics of motion error, effect of angular motion on positioning accuracy error and effect of simultaneous control on variation of velocity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1811-1815
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• 2003

Investigated is the relationship between tool deflection and geometrical accuracy in side wall machining. Form error is predicted directly from the tool deflection without surface generation. Developed model can predict the surface form error about three hundred times faster than the previous method. Cutting forces and tool deflection are calculated considering tool geometry, tool setting error, and machine tool stiffness. The characteristics and the difference of generated surface shape in up milling and down milling are discussed. The usefulness of the presented method is verified from a set of experiments under various cutting conditions generally used in die and mold manufacture. This study contributes to real time surface shape estimation and cutting process planning for the improvement of geometrical accuracy.

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.4
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• pp.51-56
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• 2006

This paper proposes a control algorithm, which is verified experimentally, for aspherical surface grinding and polishing. The algorithm provides simultaneous control of the position and interpolation of an aspheric curve. The nonlinear formula for the tool position was derived from the aspheric equation and the shape of the tool. The function was partitioned at specific intervals and the control parameters were calculated at each control section. The position, acceleration, and velocity at each interval were updated during the process. A position error feedback was introduced using a rotary encoder. The feedback algorithm corrected the position error by increasing or decreasing the feed speed. In the experimental verification, a two-axis machine was controlled to track an aspherical surface using the proposed algorithm. The effects of the control and process parameters were monitored. The results demonstrated that the maximum tracking error with tuned parameters was at the submicron level for concave and convex surfaces.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.2
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• pp.90-95
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• 2001

f-$\theta$len is one of the important parts in Laser Scanning Unit because it affects on the optical performance of Laser Scanning Unit dominantly. It is necessary to find out the relationship between the surface profile error of f-$\theta$lens and the beam profile focusing on the Organic Photo Conductive drum in order to analysis the beam profile problems such as appearance of side lobe and expansion of center lobe. In this research, a simulation process which relates the surface profile characteristics to the beam profile has been developed by CODE V. The simulated beam profile also have been compared with the measurement results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.905-909
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• 1997

A geometric error of machine parts is one of the most important factors that affect the accuracy of positioning, generating and measuring for precision machinery. It is known that the thermal deformation of a workpiece during surface grinding is the most important in the geometric error of ground surface. This paper experimentally describes the grinding characteristics of creep-feed grinding. The wheels have 6 slotted pieces in order to compare the grinding temperature with the geometric.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.23 no.6
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• pp.563-573
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• 2013

The ship radiated noise level fluctuates by the interference between direct and reflected paths. The effect of sea surface reflection path on interference depends strongly on sea surface roughness. This paper describes error characteristics of ship acoustic signature estimation by sea surface scattering effect. The coherent reflection coefficient which explains a magnitude of sea surface scattering and its resultant interference acoustic field is analyzed quantitatively as a function of a grazing angle, effective surface height, frequency, source-receiver range and depths of source and receiver. Theoretical interference acoustic field is compared with experimental result for two different sea surfaces and five different frequencies by changing source-receiver range. It is found that both matches well each other and a magnitude of interference acoustic field is decreasing by increasing a grazing angle, effective surface height, frequency, and depths of source and receiver and decreasing source-receiver range. For given experimental conditions, the transmission anomaly which is a bias error of ship acoustic signature estimation, is about a range of 1~3 dB. The bias error of an existing ship radiated noise measurement system is also analyzed considering wind speed, source depth and frequency.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.3-4
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.862-865
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• 2000

The surface grinding of STD-11 was attempted on the machining center. Grinding experiments were performed at the various grinding conditions and the grinding force, machining error, grinding ratio, and surface roughness were measured. The experimental results indicate that the grinding ratio decreases as the table speed and depth of cut increase. The surface roughness of ground surface was not affected by the change of depth of cut. The surface roughness values obtained on the experiments were 0.02 ～ 0.03${\mu}{\textrm}{m}$ which are fairy good and acceptable for ground surface.

• Journal of the Korea Convergence Society
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• v.7 no.5
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• pp.175-180
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• 2016

The demand for accurate freeform apsheric surface is increasing to satisfy the optical performance. In this paper, we develop the algorithm for opto-mechatronics convergence, that reconstruct the surface 3D profiles from the curvarure data along two orthogonal directions. A synthetic freeform surface with 8.4 m diameter was simulated for the testing. The simulation results show that the reconstruction error is 0.065 nm PV(Peak-to-valley) and 0.013 nm RMS(Root mean square) residual difference. Finally the sensitivity to noise is diagnosed for probe position error, the simulation results proving that the suggested method is robust to position error.

• Korean Journal of Remote Sensing
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• v.25 no.6
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• pp.487-499
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• 2009

Atmospheric correction of satellite measurements is a major step to estimate accurate surface reflectance of solar spectrum channels. In this study, Simplified Method for the Atmospheric Correction (SMAC) radiative transfer model used to retrieve surface reflectance from MODIS (MODerate resolution Imaging Spectrometer) top of atmosphere (TOA) reflectance. It is fast and simple atmospheric correction method, so it uses for work site operation in various satellite. This study attempts a test of accuracy of SMAC through a sensitivity test to detected error sources and to improve accuracy of surface reflectance using SMAC. The results of SMAC as compared with MODIS surface reflectance (MOD09) was represented that low accuracy ($R^2\;=\;0.6196$, Root Means Square Error (RMSE) = 0.00031, bias = - 0.0859). Thus sensitivity analysis of input parameters and coefficients was conducted to searching error sources. Among the input parameters, Aerosol Optical Depth (AOD) is the most influence input parameter. In order to modify AOD term in SMAC code, Stepwise multiple regression was performed with testing and remove variable in three stages with independent variables of AOD at 550nm, solar zenith angle, viewing zenith angle. Surface reflectance estimation by using Newly proposed AOD term in the study showed that improve accuracy ($R^2\;=\;0.827$, RMSE = 0.00672, bias = - 0.000762).