• 대한전자공학회논문지SD
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• 제40권8호
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• pp.560-564
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• 2003

본 논문에서는 RTP(rapid thermal process)를 이용한 새로운 산화방법을 고안했으며, 이는 짧은 시간에 다공질 실리콘을 산화시킴으로써 이 기술은 여타 방법에 비해 경제적이고 간편한 방법으로 짧은 시간에 두꺼운 산화막을 성장시킬 수 있는 장점을 가지고 있다. 먼저, 양극반응을 통해 PSL(porous silicon layer)을 형성한 후 이를 저온 산화시킨 후에 급속 열처리 산화공정(RTO: rapid thermal oxidation)를 이용해서 OPSL(oxidized porous silicon layer)을 제조하고, 그 물성 및 전기적 특성을 조사하여, 열 산화로 제작된 OPSL과 그 특성을 비교하였다. 시편의 절연 파괴전압은 약 3.9 MV/cm의 값을 보여 벌크 산화막보다는 적은 값이지만 절연 재료로서는 충분한 값이고, 누설전류는 0 ∼ 50 V의 인가 전압에서 100 ∼ 500 ㎀의 값을 보였다. 그리고, XPS 결과는 RTO 공정 추가가 저온 산화막의 완전 산화에 크게 기여함을 확인하였으며, 저온 산화막의 표면 및 내부에서도 산화반응이 완전하게 이루어졌음을 확인하였다. 이 결과로부터 저온 OPSL을 제조할 때, RTO 공정이 OPSL의 산화 및 치밀화(densification)의 증가에 크게 기여함을 알 수 있었다. 따라서, 이의 방법으로 제조된 OPSL은 저온을 요구하는 공정에서 소자의 절연막, 전기적인 분리층 그리고 실리콘 고주파용 기판 등으로 활용될 수 있을 것으로 보인다.

• 공학논문집
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• 제1권1호
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• pp.15-22
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• 1997

코디어라이트(2MgO.$2Al_2 O_3$.$5SiO_2$)계 유리와 겔을 일반 용융법과 졸겔법으로 제조하여 그 결정화 거동을 비교하여 보았다. 졸겔법으로 제조되는 겔의 치밀화 온도는 $810^{\circ}C$이었으며, IR결과 용융유리와 같은 구조를 가짐을 알 수 있었다. 겔의 결정화 개시온도는 $965^{\circ}C$이었으며, 핵형성제로서 10wt%의 $TiO_2$를 첨가한 용융유리의 $978^{\circ}C$ 보다 낮았다. 겔로부터의 결정상의 변화는 스피넬, $\beta$-석영고용 결정에서 $\alpha$-코디어라이트결정으로, 핵형성제로서 $TiO_2$를 넣은 용융유리에서는 (Mg,Al)TiOn 고용결정상과 $\beta$-석영고용결정에서 $\alpha$-코디어라이트로 전이하여감을 알 수 있었다. 핵형성제를 첨가한 용융유리의 결정화는 핵형성제로부터의 체적결정화였으며, 첨가하지 않은 경우는 $\beta$-석영고용결정으로부터의 표면결정화에 의해 결정화가 일어났으며, 겔로부터의 결정화는 치밀화과정에서 미립자사이에 생겨난 계면으로부터의 표면핵형성에 의한 내부 결정화과정을 거쳐 일어남을 알 수 있었다.

• 한국응용과학기술학회지
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• 제41권1호
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• pp.46-57
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• 2024

In this study, the various process conditions for high-power DC Magnetron Sputtering (DCMS) on the surface roughness of carbon thin films were investigated. The optimal conditions for Si/C coating were 40min for deposition time, which does not deviate from normal plasma, to obtain the maximum deposition rate, and the conditions for the best surface roughness were -16volt bias voltage and 400watt DC power with 1.3x10-3torr chamber pressure. Under these optimal conditions, an excellent carbon thin film with a surface roughness of 1.62nm and a thickness of 724nm was obtained. As a result of XPS analysis, it was confirmed that the GLC structure (sp² bonding) was more dominant than the DLC structure (sp³ bonding) in the thin film structure of the carbon composite layer formed by DC sputtering. Except in infrequent cases of relatively plasma instability, the lower bias voltage and applied power induces smaller surface roughness value due to the cooling effect and particle densification. For the optimal conditions for Graphite/C composite layer coating, a roughness of 36.3 nm and a thickness of 711 nm was obtained under the same conditions of the optimal process conditions for Si/C coating. This layer showed a immensely low roughness value compared to the roughness of bare graphite of 242 nm which verifies that carbon coating using DC sputtering is highly effective in modifying the surface of graphite molds for glass forming.

• 한국세라믹학회지
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• 제30권10호
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• pp.829-837
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• 1993

Chemically and geometrically homogeneous mixing of Si3N4 powders with sintering additives(YAG, 3Y2O3$.$5Al2O3) was attempted via coprecipitation method. X-ray dot maps for the additive elements(Al and Y) showed that the additives are evenly distributed in the powder mixture prepared by coprecipitation method(CP). TEM observation of the coprecipittion-treated Si3N4 powders revealed that they are covered with extremely fine crystallites of additive. The shift in isoelectric point(IEP) of Si3N4 powders from pH 6.7 to pH 7.9 after coprecipitation mixing gave another evidence for coating of Si3N4 powders with YAG additives. SIMS analysis for composition on the surface and in the matrix of mixed powders showed that the YAG additives are highly enriched on the surface of coprecipitation-treated Si3N4 powders. Especially when a small amount of additive was used, the effect of homogeneous additive distribution on densification was preceptible: After pressureless-sintering of powder compacts containing 5 mol% YAG at 1800$^{\circ}C$ for 0.5h, a sintered density of 96.5% theoretical was obtained from the specimens prepared bycoprecipitation in comparison with 93.8% from the mechanically-mixed one.

• Journal of Mechanical Science and Technology
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• 제16권12호
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• pp.1652-1663
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• 2002

It is desirable to perform nondestructive evaluation to assess material properties and part homogeneity because manufacturing of carbon/carbon (C/C) composites requires complicated and costly processes. In this work several ultrasonic techniques were applied to carbon/carbon composites for the evaluation of spatial variations in material properties that are attributable to the manufacturing process. In a large carbon/carbon composite manufactured by chemical vapor infiltration (CVI) method, the spatial variation of ultrasonic velocity was measured and found to be consistent with the densification behavior in CVI process in order to increase the density of C/C composites. Ultrasonic velocity and attenuation depend on a density variation of materials. Low frequency through-transmission scans based on both amplitude and time-of-flight of the ultrasonic pulse were used for mapping out the material property inhomogeneity These results were compared with that obtained by dry-coupling ultrasonics. Pulse-echo C-scans was used to image near-surface material property anomalies such as the placement of spacers between disks during CVI. Also, optical micrograph had been examined on the surface of C/C composites using a destructive way.

• The Korean Journal of Ceramics
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• 제4권3호
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• pp.213-221
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• 1998

$BaCe_{0.9}Gd_{0.1_O_{2.95}$ powder was synthesized by oxalate coprecipitation method. Precipitate with a stoichimetric ratio of the cations was prepared by adding a mixture of Ba, Ce and Gd nitrate solution to an oxalic acid solution at pH 4. Reaction between the constituent oxides to form a perovskite phase was initiated at $800^{\circ}C$ and a single phase $BaCe_{0.9}Gd_{0.1_O_{2.95}$ powder having good sinterability was obtained after calcination at $1000^{\circ}C$. Sintering green compacts of this powder for 6 h showed a considerable densification to start at $1100^{\circ}C$ and resulted in 93% and 97% relative densities at $1300^{\circ}$ and at $1450^{\circ}C$, respectively. Whereas the power compacts prepared by solid state reaction had lower relative densities, 78% at $1300^{\circ}$and 90% at $1450^{\circ}C$. Fine particles of $CeO_2$ second phase were observed in the surface of the sintered compacts. This was attributed to the evaporation of BaO from the surface that had been exposed during thermal etching.

• Geomechanics and Engineering
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• 제19권1호
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• pp.79-91
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• 2019

Renewed interest in the long-term pile foundations has been driven by the increase in offshore wind turbine installation to generate renewable energy. A monopile subjected to repetitive loads experiences an evolution of displacements, pile rotation, and stress redistribution along the embedded portion of the pile. However, it is not fully understood how the embedded pile interacts with the surrounding soil elements based on different pile geometries. This study investigates the long-term soil response around offshore monopiles using finite element method. The semi-empirical numerical approach is adopted to account for the fundamental features of volumetric strain (terminal void ratio) and shear strain (shakedown and ratcheting), the strain accumulation rate, and stress obliquity. The model is tested with different strain boundary conditions and stress obliquity by relaxing four model parameters. The parametric study includes pile diameter, embedded length, and moment arm distance from the surface. Numerical results indicate that different pile geometries produce a distinct evolution of lateral displacement and stress. In particular, the repetitive lateral load increases the global lateral load resistance. Further analysis provides insight into the propagation of the shear localization from the pile tip to the ground surface.

• 한국표면공학회지
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• 제54권3호
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• pp.133-138
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• 2021

Ternary Ti-X-N coatings, where X = Al, Si, Cr, O, etc., have been widely used for machining tools and cutting tools such as inserts, end-mills, and etc. Ti-Al-N-O coatings were deposited onto silicon wafer and WC-Co substrates by a cathodic arc evaporation (CAE) technique at various negative substrate bias voltages. In this study, the influence of substrate bias voltages during deposition on the microstructure and mechanical properties of Ti-Al-N-O coatings were systematically investigated to optimize the CAE deposition condition. Based on results from various analyses, the Ti-Al-N-O coatings prepared at substrate bias voltage of -80 V in the process exhibited excellent mechanical properties with a higher compressive residual stress. The Ti-Al-N-O (-80 V) coating exhibited the highest hardness around 30 GPa and elastic modulus around 303 GPa. The improvement of mechanical properties with optimized bias voltage of -80 V can be explained with the diminution of macroparticles, film densification and residual stress induced by ion bombardment effect. However, the increasing bias voltage above -80 V caused reduction in film deposition rate in the Ti-Al-N-O coatings due to re-sputtering and ion bombardment phenomenon.

• 한국표면공학회지
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• 제57권3호
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• pp.208-213
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• 2024

With the development of industry, miniaturization and densification of semiconductor components are rapidly progressing. Particularly, as demand surges across various sectors, efficiency in productivity has emerged as a crucial issue in semiconductor component manufacturing. Maximizing semiconductor productivity requires real-time monitoring of semiconductor processes and continuous reflection of the results to stabilize processes. However, various unexpected variables and errors in judgment that occur during the process can cause significant losses in semiconductor productivity. Therefore, while the development of a reliable manufacturing system is important, the importance of developing sensor technology that can complement this and accurately monitor the process is also growing. In this study, conducted a basic research on the concept of diagnostic sensors for thickness based on the physical changes of thin films due to etching. It observed changes in resistance corresponding to variations in thin film thickness as etching processes progressed, and conducted research on the correlation between these physical changes and thickness variations. Furthermore, to assess the reliability of thin film thickness measurement sensors, it conducted multiple measurements and comparative analyses of physical changes in thin films according to various thicknesses.

• 한국세라믹학회지
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• 제25권4호
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• pp.390-398
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• 1988

Effects of atmospheres and adidtives on the grain growth of TiO2 ceramics were investigated. In the range of 1300~140$0^{\circ}C$, grain growth was increased in CO2 as compared with O2 atmosphere and the grain boundary migration activation energy was lower than the diffusion activation energy of oxygen ion in TiO2. Also, in the case of addition of oxides, the grain growth was increased by oxides acting as a acceptor andinhibited by oxides acting as a donor. From the above results, when the oxygen vacancy concentration was increased, the intrinsic grain boundary mobility was increased and the pore drag force was decreased due to the rapid densification. Also it seems that the pore was migrated by the surface diffusion rather than lattice diffusion.