• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.2
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• pp.111-117
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• 2008

We have studied surface roughness, contamination of impurity, bonding with some gas element, reflectance and zeta potential on masks to be generated or changed during photolithography/dry or wet etching process. Mask surface roughness was not changed after photolithography/dry etching process. But surface roughness was changed on some area under MoSi film of Cr/MoSi/Qz. There was not detected any impurity on mask surface after plasma dry etching process. Reflectance of mask was increased after variable plasma etching treatment, especially when mask was treated with plasma including $O_2$ gas. Blank mask was positively charged when the mask was treated with Cr plasma etching gas($Cl_2:250$ sccm/He:20 $sccm/O_2:29$ seem, source power:100 W/bias power:20 W, 300 sec). But this positive charge was changed to negative charge when the mask was treated with $CF_4$ gas for MoSi plasma etching, resulting better wet cleaning. There was appeared with negative charge on MoSi/Qz mask treated with Cr plasma etching process condition, and this mask was measured with more negative after SC-1 wet cleaning process, resulting better wet cleaning. This mask was charged with positive after treatment with $O_2$ plasma again, resulting bad wet cleaning condition.

• Journal of the Korean Association of Geographic Information Studies
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• v.17 no.3
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• pp.195-206
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• 2014

In this study, soil contamination maps related to Cu and Pb were created at the Busan abandoned mine in Korea using a handheld X-Ray Fluorescence(XRF) and Geographic Information Systems(GIS). Hydrological analysis was performed using the Digital Elevation Model(DEM) of the study area to identify the flow directions of surface runoff where pollutants can be dispersed from the soil contamination sources. 24 locations for measuring the soil contamination related to Cu and Pb were selected by considering the result of hydrological analysis. The results measured at the 24 locations using the handheld XRF showed that the highest value of Cu contamination is 8,255ppm and that of Pb is 2,146ppm. The field investigation data were entered into ArcGIS software, and then soil contamination maps regarding Cu and Pb with a 5m grid-spacing were created after performing spatial interpolations using the ordinary kriging method. As a result, we could know that high concentrations of Cu and Pb are presented at the waste and tailings dumps around the abandoned mine openings. This study also showed that the handheld XRF and GIS can be utilized to create soil contamination maps related to Cu and Pb in the field.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.3 no.3
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• pp.159-165
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• 2005

The characterization of radiological contamination inside pipes generated during the decommission of a nuclear facility is necessary before pipes can be recycled or disposed. But, existing direct measurements of radioactive contamination level using the survey-meter can not estimate the characteristic of contamination on a local area such as the pipe inside. Moreover, the measurement of surface contamination level using the indirect methods has many problems of an application because of the difficulty of collecting sample and contamination possibility of a worker when collecting sample. In this work, plastic scintillator was simulated by using Monte Carlo simulation method for detection of beta radiation emitted from internal surfaces of small diameter pipe. Simulation results predicted the optimum thickness and geometry of plastic scintillator at which energy absorption for beta radiation was maximized. In addition, the problem of scintillator processing and transferring the detector into the pipe inside was considered when fabricating the plastic detector on the basis of simulation results. The characteristic of detector fabricated was also estimated. As a result, it was confirmed that detector capability was suitable for the measurement of contamination level. Also, the development of a detector for estimating the radiological characteristic of contamination on a local area such as the pipe inside was proven to be feasible.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.143-144
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.477-478
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• 2006

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.169-170
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• 2014

반도체, 디스플레이 산업 등의 진공공정이 사용되면서 공정 중에 내부기체 종류와 양을 정확한 측정하기 위해서 QMS (Quadrupole Mass Spectrometer)가 사용되고 있다. 이온전류 변화로 공정분석을 진행하므로 필라멘트로 인한 오염과 이온소스의 오염은 치명적으로 작용한다.

• Journal of the Korean Society for Marine Environment & Energy
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• v.15 no.4
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• pp.302-313
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• 2012

Concentrations of selected heavy metals (Al, Fe, Mn, Cr, Cu, Ni, Zn, Pb, As and Cd) in surface sediments from 96 sites in Masan and Jinhae Bay were studied in order to understand metal contamination. Results show that the surface sediments were mainly enriched by Cu (18-294 ppm), Zn (67-568 ppm), Pb (10-120 ppm) and Cd (0.2-3.5 ppm). The coastal zone of Masan Bay was significantly more contaminated than the non-coastal zone, and spatial distribution pattern suggested additional sources of heavy metal input in the coastal area. The enrichment ratio and geoaccumulation index ($I_{geo}$) have been calculated and the relative contamination levels assessed in the study area. The enrichment ratios of Cu, Zn, Pb and Cd in Masan Bay have been observed to be relatively high. $I_{geo}$ results reveal that the study area is not contaminated with respect to Fe, Mn, Cr and Ni; moderately to strongly contaminated with Cu, Zn and Pb; and strongly to strong contaminated with Cd. The high contents of Cu, Zn, Pb and Cd in the study area result from anthropogenic activities in the catchment area. Based on the eight different sediment quality guideline values from USA (ERL, ERM), Canada (TEL, PEL), Australia/New Zealand (ISQG-high, ISQG-low) and Hong Kong (ISQV-low, ISQV-high), sediment quality of Masan and Jinhae Bay was also assessed and characterized.

• Journal of Radiation Protection and Research
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• v.32 no.1
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• pp.1-8
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• 2007

A model for radiological dose assessment in an urban environment, METRO-K has been developed. Characteristics of the model are as follows ; 1) mathematical structures are simple (i.e. simplified input parameters) and easy to understand due to get the results by analytical methods using experimental and empirical data, 2) complex urban environment can easily be made up using only 5 types of basic surfaces, 3) various remediation measures can be applied to different surfaces by evaluating the exposure doses contributing from each contamination surface. Exposure doses contributing from each contamination surface at a particular location of a receptor were evaluated using the data library of kerma values as a function of gamma energy and contamination surface. A kerma data library was prepared fur 7 representative types of Korean urban buildings by extending those data given for 4 representative types of European urban buildings. Initial input data are daily radionuclide concentration in air and precipitation, and fraction of chemical type. Final outputs are absorbed dose rate in air contributing from the basic surfaces as a function of time following a radionuclide deposition, and exposure dose rate contributing from various surfaces constituting the urban environment at a particular location of a receptor. As the result of a contaminative scenario for an apartment built-up area, exposure dose rates show a distinct difference for surrounding environment as well as locations of a receptor.

• Tribology and Lubricants
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• v.16 no.6
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• pp.415-424
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• 2000

The use of magnetoresistive (MR) head requires much tighter control of particle contamination in a drive since loose particles on the disk surface will generate thermal asperities (TA). In this study, a spinoff test was performed to investigate the adhesion and removal capability of a particle to disk surface. Numerical simulation was also performed to investigate dominant factor of particle detachment and to support experimental results. It was shown that particles are detached from the disk surface by the moment derived from the centrifugal force and the drag force and that the centrifugal force and capillary force are the dominant force, which determines spin-off of a particle on the disk surface. Removal of particles smaller than several micrometers, which are the main source of TA generation, is extremely difficult since the adhesion forces exceed the centrifugal force. Lubricant types and manufacturing process also influence the particle removal. Lower bonding ratio and lower viscosity of the lubricant will help to increase the removal rate of the particles from the disk surface.

• Korean Journal of Remote Sensing
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• v.12 no.1
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• pp.60-80
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• 1996

AVHRR(Advanced Very High Resolution Radiometer) on NOAA satellite provides data in five spectral, one in visible range, one in near infrared and three in thermal range. In this paper, application of NOAA/AVHRR data is studied for environment monitoring such as cloud top temperature, surface temperature, albedo, sea surface temperature, vegetation index, forest fire, flood, snow cover and so on. The analyses for cloud top temperature, surface temperature, albedo, sea surface temperature, vegetation index and forest fire showed reasonable agreement. But monitoring for flood and snow cover was uneasy due to the limitations such as cloud contamination, low spatial resolution. So this research had only simple purpose to identify well-defined waterbody for dynamic monitoring of flood. Based on development of these basic algorithms, we have a plan to further reseach for environment monitoring using AVHRR data.