• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2022.10a
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• pp.121-122
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• 2022

In this paper, the device performance with the structure of Nanosheet FET (NSFET) and FinFET is simulated through a three-dimensional device simulator. Current-voltage characteristics of NSFET and FinFET were simulated with respect to channel doping concentrations, and the performance such as threshold voltage and subthreshold swing extracted from the current-voltage characteristics was compared. NSFET flows more drain current and has a higher threshold voltage in current-voltage characteristics depending on channel doping concentration than that of FinFET. The subthreshold voltage swing (SS) of NSFET is steeper than that of FinFET

• Transactions on Electrical and Electronic Materials
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• v.18 no.5
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• pp.250-252
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• 2017

High-performance full swing logic inverters were fabricated using amorphous 1 wt% Si doped indium-zinc-oxide (a-SIZO) thin films with different channel layer thicknesses. In the inverter configuration, the threshold voltage was adjusted by varying the thickness of the channel layer. The depletion mode (D-mode) device used a TFT with a channel layer thickness of 60 nm as it exhibited the most negative threshold voltage (-1.67 V). Inverters using enhancement mode (E-mode) devices were fabricated using TFTs with channel layer thicknesses of 20 or 40 nm with excellent subthreshold slope (S.S). Both the inverters exhibited high voltage gain values of 30.74 and 28.56, respectively at $V_{DD}=15V$. It was confirmed that the voltage gain can be improved by increasing the S.S value.

• Electrical & Electronic Materials
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• v.7 no.3
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• pp.225-230
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• 1994

In this paper, we have fabricated short channel MOSFETs with these parameters to verify the validity of process parameters extraction by DTC method. The experimental results of fabricated short channel devices according to the optimal process parameters demonstrate good device characteristics such as good drain current-voltage characteristics, low body effects and threshold voltage of$\leq$+-.1.0V, high punch through and breakdown voltage of$\leq$12V, low subthreshold swing(S.S) values of$\leq$105mV/decade.

• JSTS:Journal of Semiconductor Technology and Science
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• v.6 no.1
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• pp.43-51
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• 2006

80-nm self-aligned n-and p-channel I-MOS devices were demonstrated by using a novel fabrication method featuring double sidewall spacer, elevated drain structure and RTA process. The fabricated devices showed a normal transistor operation with extremely small subthreshold swing less than 12.2 mV/dec at room temperature. The n- and p-channel I-MOS devices had an ON/OFF current of 394.1/0.3 ${\mu}A$ and 355.4/8.9 ${\mu}A$ per ${\mu}m$, respectively. We also investigated some critical issues in device design such as the junction depth of the source extension region and the substrate doping concentration.

• Proceedings of the IEEK Conference
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• 2000.06b
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• pp.234-237
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• 2000

In this paper, a method to implement new Quasi-SOI LDMOSFET is introduced and the electrical characteristics of the device are studied. Key process steps of the device are explained briefly. By performing process and device simulations, electrical characteristics of the device are investigated, with emphasis on the optimization of the tilt angle of p$\^$0/ channel region. The electrical properties of the Quasi-SOI device are compared with those of bulk and SOI devices with the same process parameters. Simulated device characteristics are threshold voltage, off-state leakage current, subthreshold swing, DIBL, output resistance, lattice temperature, I$\_$D/-V$\_$Ds/, and cut-off frequency.

• Proceedings of the IEEK Conference
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• 2000.06b
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• pp.322-325
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• 2000

N-channel poly-Si TFT, Processed by Solid Phase Crystalline(SPC) on a glass substrate, has been investigated by measuring its electrical properties before and after electrical stressing. It is observed that the threshold voltage shift due to electrical stress varies with various stress conditions. Threshold voltages measured in 1.5$\mu\textrm{m}$ and 3$\mu\textrm{m}$ poly-Si TFTs are 3.3V, 3.V respectively. With the threshold voltage shia the degradation of transconductance(G$\_$m/) and subthreshold swing(S) is also observed.

• JSTS:Journal of Semiconductor Technology and Science
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• v.17 no.2
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• pp.271-276
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• 2017

The triple-gate tunnel FETs encapsulated with an epitaxial layer (EL TFETs) is proposed to lower the subthreshold swing of the TFETs. Furthermore, the band-to-band tunneling based on the maximum electric-field can occur thanks to the epitaxial layer wrapping the Si fin. The performance and mechanism of the EL TFETs are compared with the previously proposed TFET based on simulation.

• Proceeding of EDISON Challenge
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• 2014.03a
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• pp.434-438
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• 2014

CMOS의 최종형태로써 Gate-All-Around(GAA) Silicon Nanowire(NW)가 각광받고 있다. 이 논문에서 NW FET(Field Effect Transistor)의 채널 길이와 NW의 폭과 같은 size에 따른 특성변화를 실제 실험 data와 NW FET 특성분석 simulation을 이용해서 비교해보았다. MOSFET(Metal Oxide Semiconductor Field Effect Transistor)의 소형화에 따른 쇼트 채널 효과(short channel effect)에 의한 threshold voltage($V_{th}$), Drain Induced Barrier Lowering(DIBL), subthreshold swing(SS) 또한 비교하였다. 이에 더하여, 기존의 상용툴로 NW를 해석한 시뮬레이션 결과와도 비교해봄으로써 NW의 size scaling에 대한 EDISON NW 해석 simulation의 정확도를 파악해보았다.

• Proceeding of EDISON Challenge
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• 2017.03a
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• pp.448-452
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• 2017

단층 $MoS_2$와 단층 실리콘을 채널 물질로 사용한 TMD FET과 UTB FET의 소자 특성 분석 시뮬레이션을 진행하였다. TMD FET과 UTB FET의 채널과 oxide 두께를 변화시켜가며 각 각의 게이트 전압과 드레인 전류의 특성과 subthreshold swing 등을 분석하였으며, 채널과 oxide 두께가 얇을수록 단채널 효과가 줄어든다는 것을 알 수 있었다. 얇은 채널을 사용하는 트랜지스터의 최적 구동 조건은 채널과 oxide 층의 두께가 1 nm 정도 되어야 한다는 시뮬레이션 결과를 바탕으로 TMD FET과 UTB FET의 소자 특성을 상호 비교해 보았으며 TMD FET의 SS값이 더 좋다는 것을 확인할 수 있었다.

• Proceedings of the IEEK Conference
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• 2000.07b
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• pp.933-936
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• 2000

N-channel poly-Si TFT, processed by Solid Phase Crystalline(SPC) on a glass substrate, has been investigated by measuring its electrical properties before and after stressing. It is observed that the threshold voltage shift due to electrical stress varies with various stress conditions. Threshold voltages measured in 1.5um and 3um poly-Si TFT’s are 3.3V, 37V respectively. With the threshold voltage shift, the degradation of transconductance and subthreshold swing is also observed.