• Land and Housing Review
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• v.2 no.2
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• pp.163-170
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• 2011

Individual Vacuum Pressure Method (IVPM) is a soft ground improvement technique, in which a vacuum pressure can be directly applied to the vertical drain board to promote consolidation and to strengthen the soft ground. This method does not require surcharge loads, different to embankment or pre-loading method. In this study, the ground improvement efficiency of Individual Vacuum Pressure Method was estimated when suction pressure increases step by step(-20, -40, -60, -80kPa) with different periods. During Individual Vacuum Pressure Method process, surface settlement and pore pressure were monitored, and cone resistance as well as water content were also measured after the completion of Individual Vacuum Pressure Method treatment. From the results, optimum duration of each step of vacuum pressure was determined, and the settlement was calculated using FEM numerical analysis.

• Geophysics and Geophysical Exploration
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• v.15 no.4
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• pp.163-176
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• 2012

Effective porosity has been measured for cement specimen as a function of vacuum time and pressure in the vacuum saturation process. Six cement specimen are used; three of them are made of the same ratio of cement and sand, the other three are 100% cement mortar, of which average porosity is about 25% and 40%, respectively. Using the 6 samples, measured effective porosities are compared and examined with 5 different vacuum pressures (2, 4, 6, 8, 10 torr) and times (20, 40, 60, 80, 100 minute), respectively. Comparing measured effective porosity from experiments when vacuum time varies from 100 minute to 20 minute with 20 minute step and vacuum pressure is fixed to 10, 6, and 2 torr, average deviation decreases as 0.6, 0.5, and 0.2% respectively. Comparing measured effective porosity from experiments when vacuum pressure varies from 2 torr to 10 torr with 2 torr step and vacuum time is fixed to 100, 60, and 20 minute, average deviation increases as vacuum time decreases. These results can be a background of suggested method of ISRM that describes the vacuum time longer than 60 minute and vacuum pressure higher than 6 torr. In this study, only qualitative discussion can be possible for the effects on the effective porosity by decreasing 20 minute vacuuming time at the same pressure or by decreasing 2 torr of vacuum pressure at the same vacuum time. This is because the sample could not reached to perfectly dried condition even though the sample were dried at $105^{\circ}C$ and following the ISRM suggested method, so that initial water content could not be the same at each experiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.155-156
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• 2006

UV-NIL is a promising technology for the fabrication of sub-100 nm features. Due to non-uniformity of the residual layer thickness (RLT) and a strong possibility of defects, many UV-NIL processes have been developed and some are commercially available at present, most are based on the 'step-and-repeat' nanoimprint technique, which employs a small-area stamp, much smaller than the substrate. This is mainly because, when a large-area stamp is used, it is difficult to obtain acceptable uniform residual layer thickness and/or to avoid defects such as air entrapment. As an attempt to enable UV_NIL with a large-area stamp for high throughput, we propose a new UV-NIL tool that is able to imprint 4 inch wafer in a low vacuum environment at a single step.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.415.1-415.1
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• 2016

2009년도에 Perovskite가 태양전지에 처음 적용된 이후, Perovskite를 기반으로 하는 태양전지는 급속한 발전을 이루고 있으나, 향후 상용화를 위해서는 추가적인 공정개선 및 제조 단가를 낮추는 노력이 필수적이다. 초창기 Perovskite의 증착 공정은 One step deposition 방법이 사용되었으나, Layer의 thickness, uniformity 등을 조절하기 어려워 Sequential deposition 방법으로 개선되었다. 하지만 결과적으로 초기방법 대비 추가공정이 발생함에 따라 시간 및 비용의 증가가 불가피하였다. 제조단가 측면에서는 Perovskite 태양전지를 구성하는 재료 중 HTM(정공수송물질)을 구성하는 Spiro-MeOTAD의 비용이 가장 비싸다. 따라서 저비용 태양전지를 위해서는 HTM이 없는 구조가 필요하다. 이 페이퍼에서는 Perovskite 물질이 고흡광 능력 외에 충분한 전하수송능력을 보유한다는 점에 착안하여, Gas Pressure Assisted Modified One Step Deposition을 이용한 HTM Free Perovskite를 제작하고 기존의 Sequential Deposition Method 통해 만들어진 Perovskite 태양전지와 비교/분석하였다.

• Carbon letters
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• v.25
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• pp.95-102
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• 2018

We examined the pressure effects on petroleum pitch synthesis by using open and closed reaction systems. The pressure effects that occur during the pitch synthesis were investigated in three pressure systems: a closed system of high pressure and two open systems under either an atmosphere or vacuum. A thermal reaction in the closed system led to the high product yield of a pitch by suppressing the release of light components in pyrolysis fuel oil. Atmospheric treatment mainly enhanced the polymerization degree of the pitch via condensation and a polymerization reaction. Vacuum treatment results in a softening point increase due to the removal of components with low molecular weights. To utilize such characteristic effects of system pressure during pitch preparations, we proposed a method for synthesizing cost-competitive pitch precursors for carbon materials. The first step is to increase product yield by using a closed system; the second step is to increase the degree of polymerization toward the desired molecular distribution, followed by the use of vacuum treatment to adjust softening points. Thus, we obtained an experimental quinoline insolubles-free pitch of product yield over 45% with softening points of approximately $130^{\circ}C$. The proposed method shows the possibility to prepare cost-competitive pitch precursors for carbon materials by enhancing product yield and other properties.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.28 no.6C
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• pp.321-329
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• 2008

In this study, a series of column test as a way in order to make up for the weakness point of the conventional acceleration method were conducted to both propose the suction board drain method and grapes the specific improvement character of this method as a result of a sort of plastic drain board and a phase of vacuum pressure conditions. On this occasion, the study focused on computing the effective factors of the fittest Suction board drain method affected by each condition through confirming the settlement generated during the test, the water content reduction and stress increase effect occurred arising from the test, and the ratio of consolidation related to the improvement period. In accordance with the shape of core and that whether the core is attached to the filter(pocket or adhesion), the castle type of adhesion and the column type of pocket are more efficient than the others as a consequence of the test to find out the improvement effect depending on each drainage such as a castle type, coil type, harmonica type, column type of pocket and a castle of the adhesion. In case of the step suction pressure, the shorter the period of $-0.8\;kg/cm^2$ as a final step of the suction pressure is, the better the improvement is. In addition, the correlation between degree of consolidation per each suction pressure level and duration of application was drawn as a curve and the point of inflection on this curve was provided to determine the duration period to maximize the consolidation.

• Journal of the Korean Ceramic Society
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• v.50 no.2
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• pp.142-148
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• 2013

Conventional cold isostatic pressing, slip casting, and filter pressing are not completely suitable for fabricating large plates because of disadvantages such as the high cost of equipment and formation of density gradient. These problems could be avoided by employing pressure-vacuum hybrid slip casting (PVHSC). In the PVHSC, the consolidation occurs not only by the compression of the slip in casting room, but also by vacuum sucking of the dispersion medium around the mold. We prepared the alumina bodies by the PVHSC in a static- or stepwise-pressure manner for loading up to 0.5 MPa using an aqueous slip. The green bodies were dried at $30^{\circ}C$ with 40 ~ 80% relative humidity. Under static pressure, casting induced a density gradient in the formed body, resulting in cracking and distortion after the firing. However, the stepwise pressure loading resulted in green bodies with homogeneous density, and the minimization of the appearance of those defects in final products. Desirable drying results were obtained from the cast bodies dried with 80% RH environment humidity. When sintered at $1650^{\circ}C$ for 4 h, the alumina plate made by stepwise-pressure casting reached full density (> 99.7% relative density).

• Clean Technology
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• v.10 no.2
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• pp.101-109
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• 2004

PSA and VSA processes have been used broadly to produce oxygen from ambient air in midium- or small-sized plants. PSA and VSA processes are the separation methods which use difference of amount adsorbed as pressure is changed periodically, but they have the differences in pressurization and regeneration. In this study, the performance of 6-step PSA process was compared with that of 5-step VSA process with respect to purity and recovery. In addition, the effects of each step (pressurization step, adsorption step, and pressure equalization step) on purity and recovery were investigated. As a result, the VSA process using zeolite 10X showed better performance than the zeolite 5A PSA and zeolite 13X VSA process in comparison with purity, recovery and productivity. And it was enough to apply the vacuum pressure of 200 torr for the VSA, which produced over 90% oxygen with 70% recovery.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.63-63
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• 2000

Deep submicron device contact hole에서의 bottom step coverage의 향상 및 SALICIDE공정의 필요성에 의해 collimated sputtering 및 ionized sputtering 등의 다양한 증착방법이 연구되어왔다. 반도체소자의 고집적화 및 미세화에 따라서 기존의 증착방법보다 더 높은 throughput을 가진 새로운 증착방법의 필요성이 대두되고 있다. Collimated sputtering방식으로 증착한 박막의 경우에는 증착속도가 느리고 collimator의 사용기간에 따른 공정조건의 변화가 단점으로 작용하였고 새로이 ionzied sputtering방식이 개발되었다. ionzied sputtering방식은 증착되는 금속 입자를 이온화시키고 기판에 바이어스를 걸어서 증착되는 입자의 방향성 및 증착속도의 향상을 얻을 수 있었다. 하지만 고집적도가 더욱 증가함에 따라서 더 높은 박막의 증착속도, bottom step coverage의 향상, 방향성의 향상과 더불어 증착되는 입자의 이온화 율의 증가 및 기존의 증착방식에 의한 박막보다 향상된 물성을 가진 박막증착의 필요성에 의해 hollow cathode magnetron sputtering방식이 연구되었다. HCM방식으로 titanium 박막을 증착하여 collimated sputtering 및 ionize sputtering 방식으로 증착한 titanium 박막과 물성을 비교해서 증착방식에 따른 박막물성의 차이를 연구하였다. 증착전에 기판온도는 30$0^{\circ}C$를 유지하였고 base pressure는 5.0$\times$10-9torr, working pressure는 5.7m torr로 유지하였다. power는 30kW를 가하여 50nm두께의 titanium박막을 증착하였다. 증착된 박막의 미세구조는 TEM 및 XRD로 분석하였다. HCM방식으로 증착한 titanium박막은 5nm두께의 비정질 층이 관찰되었고 ionized sputtering방식으로 증착한 titatnium박막에서 나타나는 것으로 보고된 silicon (002)와 titanium (0002) eledtron diffraction spot사이의 (10-10)spot은 관찰되지 않았다. 박막은 크고 작은 grain의 연속적 분포를 가졌고 HCM방식으로 증착한 titanium박막의 in-plane grain size가 다른 증착방식으로 증착한 박막에 비해 크게 관찰됨을 Plan-view TEM 분석을 통해서 확인되었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.316-316
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• 2014

Two different transparent conducting oxide (TCO) layers of Al-doped ZnO (AZO) and $WO_3$ were prepared by a rf sputtering process. Working pressure, deposition time, and target-to-substrate distance were varied for the sputtering process to improve electrical properties of the resulting layer. Thickness of the TCO layers was measured by a profile meter of ${\alpha}$-step. To evaluate the electrical conductivity, surface resistivity of the TCO layers was measured by a four-point probe technique. Decrease of the working pressure resulted in increase of deposition rate and decrease of surface resistivity of the resulting layer. Increase of the layer thickness due to increased deposition time resulted in decrease of surface resistivity of the resulting layer. The shorter the target-to-substrate distance was, the lower was the surface resistivity of the resulting layer.