Numerical modeling for pressure uniformity improvement of a large area sputtering system by change of gas distribution configuration (대면적 스퍼터링 장치에서 Gas 분배 구조 변화에 따른 압력 균일도 개선 모델링)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2007.11a
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- pp.175-176
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- 2007