• 한국정밀공학회지
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• 제16권2호통권95호
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• pp.145-152
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• 1999

This paper presents the principle and experimental results of a non-contact surface roughness measurement by means of screen projected pattern of lase beam reflected from a polished surface. In the reflected laser beam pattern especially from a fine surface like ground or polished one, light intensity varies from the center fo the image to its boundary as the Gaussian distribution. The standard deviation of a light intensity distribution is assumed to be a good non-contact estimator for measuring the surface roughnes, because the light reflectivity is known to be well related with the surface roughness. This method doesn't need to discriminate between the specularly reflected light and the diffusely reflected one, whereas the scattered laser intensity method must do. Nor it needs to adjust the change of light intensity caused by environmental lights or specimen materials. Reflected laser beam pattern narrowly spreads out in the vertical direction to tiny scratches on the polished surface due to abrasives. The deeper the scratch the more the dispersion, which means the rougher surface. The standard deviation of the pattern is nearly in proportion to the surface roughness. Measurement errors by this method are shown to be below 10 percent compared with those obtained by a common contact method. The inclination of measuring unit from the normal axis causes the measurement errors up to 10 percent for an angle of 4 degree. Therefore the proposed method can be used as an on-the-machine quick roughness estimator within 10 percent measurement error.

• 한국정밀공학회지
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• 제11권6호
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• pp.168-178
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• 1994

This paper presents an optical surface roughness sensor developed for intermediate- process measurement on the machine. The light scattering method is adopted for the sensor, which is designed conpact and flexible enough to apply to 'on the machine' measurement of surface roughness. The developed sensor has special features such that it makes use, as the measurement parameter, of the ratio between fluxes of the incident light, and the specularly and partly diffusely reflected light, and that it can adjust the incident light angle. The experimental investigation reveals not only the sensor has good performance as a surface roughness sensor but the sensor is very robust so as to be useful in in-process measurement.

• 한국정밀공학회지
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• 제12권4호
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• pp.46-54
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• 1995

This paper presents a simple method for measurenemt of roughness of ground surfaces. The present method utilizes fluxes of scattered lights condensed through lenses aligned along the specular direction. A theoretical analysis is preformed for the purpose of investigating the possibility of the method as well as determining the experimental condition. Experiments are also performed to show the effectiveness and robustness of the proposed method. The theoretical and experimental results show that the proposed method is simple enouth to implement and has a potential to identify a wide range of roughness of ground surfaces.

• 대한전자공학회논문지SD
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• 제43권8호
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• pp.1-5
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• 2006

본 논문은 극자외선 리소그래피용 마스크의 결함을 극자외선을 이용하여 검출하는 방법과 기존의 가시광선을 이용하여 결함을 검출해 내는 시스템과 비교하고, 인위적으로 만들어진 결함을 이용하여 극자외선이 결함에 조사되었을 때의 반사되는 패턴을 분석하였다. 포커스된 극자외선을 래스터 스캔 방식으로 조사하면서 반사되는 극자외선의 세기를 비교함으로서 결함을 발견해 내는 시스템을 구축하였고, 이를 이용하여 기존의 가시광선을 이용하는 결함 검출 장비와 상관 실험을 진행하여 반사된 빛의 세기로 예측한 결함의 크기가 두 검출 방법 사이에 강한 상관관계를 가짐을 확인하였다. 또한, 인광판을 이용하여 극자외선이 결함에 조사되어 반사되는 패턴을 영상화하여 크기별, 결함의 종류별로 다른 프린지 패턴을 가지는 것을 확인하였다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 추계학술대회 논문집
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• pp.164-169
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• 2002

Recently, LCD(Liquid Crystal Display) is the display product widely used on various fields of industry. This is generally composed of many parts. Among many parts, polarizer film control the intensity of the transmitted light according to the degree of rotation of the polarizer axis. Therefore, this film must be free from defects. But it contains many defects such as the defects caused by dust or different thing, adhesive badness, scratch. Presently, the inspection of these defects is depending on the sight of operator. In this paper, we propose the vision system composed of telecentric lens and optical mirror. This system use the coaxial illumination and the light is specularly reflected on the optical mirror. And we develop the image processing algorithm using the threshold and morphological technique.