• Applied Science and Convergence Technology
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• 제26권6호
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• pp.164-173
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• 2017

Across the most industry, the demand for nanoparticles is increasing. Therefore, many studies have been carried out to synthesize nanoparticles using various methods. The aim of this paper is to introduce an industry-applicable as well as financially and environmentally effective solution plasma process. The solution plasma process involves fewer chemicals than the traditional kit, and can be used to replace many of the chemical agents employed in previous synthesis of nanoparticles into plasma. In this study, this process is compared to the wet-reaction process that has thus far been widely used in the most industry. Furthermore, the solution plasma process has been classified into four different types (in-solution, out of solution, direct type, and remote type), according to its plasma occurrence position and plasma types. Thus, the source of radicals, nanoparticle synthesis, and modification methods are explained for each design. Lastly, unlike nanoparticles with hydrophilic functional groups that are made inside the solution, a nanoparticle synthesis and modification method to create a hydrophobic functional group is also proposed.

• 공업화학
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• 제33권2호
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• pp.229-233
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• 2022

In this study, a gas-liquid hybrid atmospheric pressure plasma reactor of the dielectric barrier discharge method was fabricated and characterized. The solubility of copper oxide in the organic acid solution was increased when argon having a larger atomic weight than helium was used during plasma discharge. There was no significant effect of mixing organic acid solutions under plasma discharge treatment on the variation of copper oxide's solubility. As the applied voltage for plasma discharge and the concentration of the organic acid solution increased, the dissolution and removal power of the copper oxide layer increased. Solubility of copper oxide was more affected by the concentration in organic acid solution rather than the variation of plasma applied voltage. The usefulness of hybrid plasma reactor for the surface cleaning process was confirmed.

• Journal of Advanced Marine Engineering and Technology
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• 제40권10호
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• pp.888-893
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• 2016

In this study, the solution plasma process was utilized with the aim of degrading synthetic dyes in water at atmospheric pressure. The experiments were conducted in a batch-type reactor consisting of a symmetric wire-wire electrode configuration with rhodamine B (RhB) as the target synthetic dye. The effects of the plasma treatment time and initial dye concentration on the RhB degradation were investigated by monitoring the change in absorbance of RhB solutions. The RhB solutions turned lighter in color and finally colorless with prolonged plasma treatment time, indicating the destruction of dye molecules. The RhB solutions were found to have degraded, following the first-order kinetic process. However, for high initial RhB concentrations, another kinetic process or factor seems to play a dominant role at the initial degradation stage. The fitted first-order rate constant decreased as the initial concentration increased. This result suggests that the degradation behavior and kinetic process of the RhB solution strongly depends on its initial concentration. The RhB degradation is considered to be due to a combination of factors, including the formation of chemically oxidative species, as well as the emission of intense UV radiation and high-energy electrons from the plasma. We believe that the solution plasma process may prove to be an effective and environment-friendly method for the degradation or remediation of synthetic dye in wastewater.

• 한국재료학회지
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• 제33권7호
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• pp.315-322
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• 2023

In the present work, we address the new route for the green synthesis of manganese dioxide (MnO₂) by an innovative method named the solution plasma process (SPP). The reaction mechanism of both colloidal and nanostructured MnO₂ was investigated. Firstly, colloidal MnO₂ was synthesized by plasma discharging in KMnO₄ aqueous solution without any additives such as reducing agents, acids, or base chemicals. As a function of the discharge time, the purple color solution of MnO₄^- (oxidation state +7) was changed to the brown color of MnO₂ (oxidation state +4) and then light yellow of Mn²⁺ (oxidation state +2). Based on the UV-vis analysis we found the optimal discharging time for the synthesis of stable colloidal MnO₂ and also reaction mechanism was verified by optical emission spectroscopy (OES) analysis. Secondly, MnO₂ nanoparticles were synthesized by SPP with a small amount of reducing sugar. The precipitation of brown color was observed after 8 min of plasma discharge and then completely separated into colorless solution and precipitation. It was confirmed layered type of nanoporous birnessite-MnO₂ by X-ray powder diffraction (XRD), fourier-transform infrared spectroscopy (FT-IR), and electron microscopes. The most important merits of this approach are environmentally friendly process within a short time compared to the conventional method. Moreover, the morphology and the microstructure could be controllable by discharge conditions for the appropriate potential applications, such as secondary batteries, supercapacitors, adsorbents, and catalysts.

• 멤브레인
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• 제20권4호
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• pp.297-303
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• 2010

폴리올레핀 중합공정에서 발생되는 미반응 올레핀 모노머를 회수하기 위한 분리막/냉각응축 공정에 적용할 복합막을 용액 코팅공정과 플라즈마 중합공정의 두가지 방법으로 제조하였다. Polysulfone (PSF) 지지체 위에 poly(dimethylsiloxane) (PDMS) 용액을 코팅하였고 코팅 용액에서 prepolymer의 함량이 높을수록 올레핀 모노머의 선택도는 증가하였으나 막이 치밀하여지는 관계로 절대 투과량은 감소하는 경향을 보였다. 유기물의 복합막 투과는 용액확산 메커니즘에 의한 것으로서 임계온도가 높을수록 분리효율은 향상되고 molar volume이 증가할수록 투과도가 향상되었다. 또한 가교시간에 siloxane 계열의 물질을 plasma 종합하여 복합막을 제조하였는데 PSF 및 polypropylene (PP) 지지체를 사용하였다. 특히 지지체로 기존의 용액코팅 공정에서 사용되기 어렵던 PP 지지체 위에도 복합막을 코팅할 수 있었으며 용액코팅 공정으로 제조된 복합막과 유사한 성능을 나타내었다.

• 한국건축시공학회지
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• 제23권5호
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• pp.559-570
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• 2023

건설산업에서 사용되는 구조용 강재의 부식은 산업화로 인해 많은 공격적인 이온이 내포된 대기 환경에서 증가추세에 있다. 따라서 본 연구에서는 아크 및 플라즈마 아크용사로 Al 코팅을 용착하여 Cl^-와 CO₃^2-같은 공격적인 이온을 다량 함유한 Society of Automotive Engineering(SAE) J2334 용액의 모사대기환경에서 그 효과를 비교하였다. 다양한 분석기법으로 코팅 특성과 부식 메커니즘을 고찰하였다. 플라즈마 아크용사로 용착된 Al 코팅은 밀도 있고 균일하면 층층이 적층이 잘 되었고 높은 부착력이 나타났다. 이 공법으로 용착된 Al 코팅을 SAE J2334 용액에 기간별로 침지하여 측정한 개회로전위(OCP)는 아크용사로 용착된 Al 코팅보다 더 양전성(electropositive)한 값을 보여주었다. 플라즈마 아크용사는 총 임피던스가 아크용사보다 높게 나타났다. SAE J2334 용액에 23일 침지하였을 때 플라즈마 아크용사 Al 코팅의 부식속도는 아크용사에 비해 20% 감소하였다.

• 한국표면공학회지
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• 제49권2호
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• pp.119-124
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• 2016

Plasma electrolytic oxidation (PEO) is a promising coating process to produce ceramic oxide on valve metals such as Al, Mg and Ti. The PEO coating is carried out with a dilute alkaline electrolyte solution using a similar technique to conventional anodizing. The coating process involves multiple process parameters which can influence the surface properties of the resultant coating, including power mode, electrolyte solution, substrate, and process time. In this study, ceramic oxide coatings were prepared on commercial Al alloy in electrolytes with different KOH concentrations (0.5 ~ 4 g/L) by plasma electrolytic oxidation. Microstructural and electrochemical characterization were conducted to investigate the effects of electrolyte concentration on the microstructure and electrochemical characteristics of PEO coating. It was revealed that KOH concentration exert a great influence not only on voltage-time responses during PEO process but also on surface morphology of the coating. In the voltage-time response, the dielectric breakdown voltage tended to decrease with increasing KOH concentration, possibly due to difference in solution conductivity. The surface morphology was pancake-like with lower KOH concentration, while a mixed form of reticulate and pancake structures was observed for higher KOH concentration. The KOH concentration was found to have little effect on the electrochemical characteristics of coating, although PEO treatment improved the corrosion resistance of the substrate material significantly.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2020년도 봄 학술논문 발표대회
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• pp.83-84
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• 2020

In present study, we have deposited the Zinc coating using arc thermal spray and plasma arc spray processes onto the steel substrate and durability of the deposited coating was evaluated. The bond adhesion result shows that plasma arc sprayed Zn coating exhibited higher in its value compared to arc thermal spray. SEM shows that Zn coating deposited by plasma arc process is more compact, less porous and adherent compare to arc spray process. The corrosion resistance properties are evaluated in artificial ocean water solution with exposure periods. EIS results show that total impedance at 0.01 Hz of plasma arc sprayed coating is higher than arc thermal spray owing to the compact and less porous morphology. It is concluded that plasma arc sprayed Zn coating is better than arc thermal spray process.

• 한국진공학회지
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• 제18권2호
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• pp.97-101
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• 2009

현대의 반도체 산업에서 공정 중 가장 큰 비중을 차지하며, 가장 많은 자본과 인력을 소비하는 것이 바로 세정 공정이다. 세정공정은 소자의 작동에 영향을 미치고 기능을 저하시킬 수 있는 이물질 입자들을 제거하는 것이다. 특히 소자를 식각하기 위한 Photoresist(PR) 과정이 끝날 때마다 항상 세정 과정이 포함되어야 했다. 또한, Photoresist(PR) 공정 중 생성된 HDI-PR(high dose implanted photoresist)은 세정 과정에서 제거가 힘들기 때문에 현대의 고밀도 집적회로 세정 공정에서는 건식 세정과 습식 세정을 혼용하여 여러 단계의 세정 공정을 거치게 된다. 이 논문에서는 기존 플라즈마 방식으로 대표되는 건식 세정과 약액으로 대표되는 습식 세정을 동시에 사용하는 방식을 사용하여 약액활성화 방법(Plasma Liquid-Vapor Activation; PLVA)을 제안하여 실험을 실시하였고 HDI-PR을 활성화된 용액에 담근 후 Nano-Indenter를 이용하여 표면강도와 탄성계수를 측정했다. Nano-indenter는 특정한 기하학적 형태를 가지는 Tip을 표면에 압입한 후 압입하중과 압입깊이를 측정함으로서 시료의 표면강도와 탄성계수를 측정하였다. 그 결과 plasma로 활성화된 PR stripper 용액으로 strip한 후의 시료의 표면 강도가 크게 줄어든 것을 확인하였다. 이는 이후 물리적 표면 세정 공정을 후 공정으로 사용한다면 보다 효율적인 HDI-PR을 제거할 수 있을 것으로 사료된다.

• 한국표면공학회지
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• 제48권1호
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• pp.7-10
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• 2015

Recently, oxide TFTs has attracted a lot of interests due to their outstanding properties such as excellent environmental stability, high mobility, wide-band gap energy and high transparency, and investigated through the method using vacuum system and wet solution. In the case of the method using wet solution, process is very simple, however, annealing process should be included. In this study, to overcome the problem of annealing process, atmospheric pressure plasma was used for annealing, and the electrical characteristics such as on/off ration and mobility of device were investigated.