• 한국세라믹학회지
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• 제52권1호
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• pp.13-18
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• 2015

The fabrication method used for mineral hydrate is similar to that of ALC (autoclaved lightweight concrete), but the fabrication of normal slurry with a considerable amount of a foaming agent is difficult due to material separation and collapse of the slurry. Therefore, the development of fabrication methods for normal slurry is necessary. The final product, mineral hydrate insulation, has excellent thermal properties but poor strength characteristic given the many pores. In this study, in order to fabricate normal slurry, the viscosity and foaming time of the slurry were controlled. The mixing ratio of the starting material and the polypropylene fiber was controlled to improve the strength. Mineral hydrate with polypropylene fiber showed a higher strength than that without this type of fiber. Specifically, the compressive strength of mineral hydrate with 2% polypropylene fiber added to it was more than 40% higher than that without the fiber.

• 한국전기전자재료학회논문지
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• 제14권7호
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• pp.557-561
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• 2001

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integraded circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). Especially, defects such as micro-scratch lead to severe circuit failure which affect yield. CMP slurries can contain particles exceeding 1㎛ in size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particles agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectrics(IMD)-CMP process. The filter installation in CMP polisher could reduce defects after IMD-CMP process. As a result of micro-scratch formation, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have concluded that slurry filter lifetime is fixed by the degree of generating defects.

• 한국전기전자재료학회논문지
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• 제14권9호
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• pp.707-713
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

• 한국건축시공학회지
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• 제2권3호
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• pp.131-138
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• 2002

The objective of the study is to examine the characteristic correlations between reinforcing carbon fiber and interfacial adhesion agent since the interfacial adhesion strength between reinforcing carbon fiber and matrices is believed to be an essential element influencing the physical properties in carbon fiber reinforced cement composite using slurry method. The integrity of interfacial adhesion between reinforcing fiber and cement not only affects the quality of fiber reinforced cement composite but also influences to a large degree the physical properties of the cement composite when producing carbon fiber reinforced cement composite using slurry method. Having analyzed the physical properties 1.e., water content, tensile strength, flexural strength and flexural toughness of carbon fiber reinforced cement composite specimens, C-PAM(cation polyacrylamide) was determined to be an optimum interfacial adhesion agent. The study has also demonstrated that interfacial adhesion strength varies largely on the content and type of the reinforcing fiber. Judging from magnified view of the tensile shear cross-section using VMS(video microscope system), interfacial adhesion strength between reinforcing fiber and matrices is affected by the type of interfacial adhesion agent. According to the result of the experiments, C-PAM was determined to be an ideal interfacial adhesion agent when using carbon fiber in producing carbon fiber reinforced cement composite with the optimum content of carbon fiber being established.

• 한국터널지하공간학회 논문집
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• 제19권3호
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• pp.463-473
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• 2017

벤토나이트는 물과 접촉하면 팽창하고 점성을 발휘하는 성질이 있어 일반적으로 차수가 필요한 토목공사에 많이 활용되고 있다. 이수식 TBM에서는 이와 같은 성질을 활용하여 가압된 슬러리로 불투수성 막을 형성하고 굴착벽면의 붕괴를 방지하는 동시에 굴착된 버력을 운송하며 굴착을 수행한다. 하지만 벤토나이트는 해수와 접촉할 경우 팽창성이 저하되어 그 성질을 발휘하지 못하는 문제가 있다. 이는 해수 조건에서 이수식 TBM으로 터널을 굴착할 시 지하수 유입 증가로 인한 굴착 안정성 및 버력 배출에 문제를 초래할 수 있다. 본 연구에서는 이수식 TBM으로 터널을 굴착 시 해수의 유입으로 인한 슬러리의 상태변화를 살펴보고 이에 대응하기 위한 슬러리 관리방안을 제시 하였다. 이를 위해 현장에서 적용된 슬러리 품질관리 기준을 바탕으로 실내 시험을 수행하였으며, 해수의 영향이 있는 현장에 적용 할 수 있는 방안을 제시하였다.

• Journal of Advanced Marine Engineering and Technology
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• 제28권4호
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• pp.618-623
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• 2004

This paper has dealt with the heat storage characteristics of gel type micro size latent heat storage material slurry. The heat release operation to the gel type micro size latent heat storage material slurry was carried out using hot air bubbles by direct contact heat exchange. This experiment was carried out using phase change material of n-paraffin so the heat release amount is higher than cold water system. The parameters of this experiment were concentration of latent heat phase change material, height of heat release bath and inlet velocity of hot air. The main results obtained are as follows : (1) The effect of concentration of latent heat phase change material dispersed with water is very affective to the direct contact heat exchange between hot air and gel type micro size latent heat storage material slurry. (2) It is clarified that the most effective concentration of latent heat phase change material dispersed with water exists around 20mass% at this type of direct heat exchange model experiment.

• 한국산학기술학회논문지
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• 제14권2호
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• pp.578-584
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• 2013

아이스 슬러리는 유동성이 좋고 증발잠열이 커서 빙축열 시스템의 전열 유체로 선호되고 있다. 일반적으로 아이스 슬러리는 과냉각된 유체로부터 생성되는데, 동결이 과할 경우 배관을 막히게 하는 단점이 있다. 더욱이 아이스 슬러리 생성을 쉽게 하기 위해 과냉각온도를 낮출 경우 빙축열 시스템의 효율을 떨어뜨리기도 한다. 따라서 아이스 슬러리 생성을 효율적으로 제어할 수 있는 방법이 요구되고 있다. 본 논문에서는 초음파 진동에 의해 과냉각수에 캐비테이션 충격을 가하여 아이스 슬러리를 생성하는 새로운 방식의 빙축열 시스템에 관한 실험연구를 수행하여, 초음파 진동과 아이스 슬러리 생성과의 상관관계를 규명하고, 초음파 진동이 아이스 슬러리 생성을 성공적으로 촉진할 수 있음을 확인하였다.

• 한국대기환경학회지
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• 제14권4호
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• pp.273-280
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• 1998

The investigation on the removal of 502 gas fro.In flue gas which causes serious air pollution was made by using a semi dry flue gas desulfurization method. Experiments were carried out as a function of process variables which would affect SO2 removal efficiency. Process variables inclilded SO2 inlet concentration, inlet temperature of simulated flue gas, sorbent weight fraction, and volume flow rate of sorbent slurry. In this study, used sorbent was Ca(OH), and simulated flue gas was prepared by mixing pure SO2 gas with air. Experimental conditions were varied at 140~18$0^{\circ}C$ of inlet temperature of the simulated flue gas, 500~2000ppm of inlet SO2 concentration, 0.4~1.0% of sorbent concentration, and 10~25 mL/min of flow rate of sorbent slurry. Among process variables, inlet concentration of SO2 was found to be the most significant factor to affect SO2 removal efficiency. The concentration of Ca(OH2) had a lower effect on SO2 removal than SO2 inlet concentration removal amount was 0.108, 0.141, 0.153 g SO2/g Ca(OH)2 respectively- As 200 mmol of HNO3 was added into slurry to improve removal efficiency, initial pH was maintained and solubility of slurry increased, so that removal efficiency elevated. Adding over 200 mmol of HNO3 into slurry caused removal efficiency lower. Therefore it could be concluded the optimum was 200 mmol of HNO3 input.

• 한국세라믹학회지
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• 제38권9호
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• pp.860-865
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• 2001

본 논문은 출발물로서 2mol% CdO가 치환된 $0.05Pb(Mn_{1/3}Sb_{2/3})O_3-0.95Pb(Zr_{0.52}Ti_{0.48})O_3$ 분말을 제조 후, 닥터 블레이드 방법으로 green sheet를 제조하기 위한 slurry의 최적 공정첨가제 조성에 관한 연구를 수행하였다. 또한, 제조된 green sheet에 대하여 소결 특성과 두께 변환에 따른 유전 및 압전 특성을 관찰하였다. 공정첨가제의 첨가에 따른 점도거동을 통하여 slurry를 최적화하였고, TGA 분석으로 소결조건을 정하였으며, sheet의 특성에 미세구조와 XRD 등으로 측정하였다. 최적의 slurry는 고형분량 30vol%에 대해 분산제 3.0wt%에서 가장 안정화되었고, 이후 바인더/가소제(0.75/0.25) 3.0wt% 첨가시 점도는 7.55Pa${\cdot}$s이었다. Green sheet의 유전 및 압전 특성들은 각각 900$^{\circ}$C, 950$^{\circ}$C, 1000$^{\circ}$C로 소결온도를 증가함에 따라 다소 증가하였지만, 두께에 따른 특성들은 큰 변화가 관찰되지 않음을 확인하였다.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2001년도 추계 기술심포지움
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• pp.235-239
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• 2001

In recent years, as Chemical Mechanical Planarization(CMP) has been routinely utilized in integrated circuit(IC) fabrication, the consumption of slurry, main consumable in a CMP process, is greatly increased. Thus the reprocess of CMP slurries has been actively considered in the industry to reduce cost-of-consumable (COC). The main purpose of this study was to recycle the used oxide slurry using filters as a new method. As a result, Ultra Fine(UF) Filter could distinguish silica from the used oxide slurry and Reverse Osmosis(RO) Filter could distinguish Deionized(DI) Water and chemistry from chemistry solution. The tetraethylorthosilicate removal rate was almost the same as the number of recycle polishing was increased, when it was modified by slightly adding new SS-12 slurry. The microscratch didnt found as the number of recycle polishing was increased.