• Transactions on Electrical and Electronic Materials
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• v.8 no.2
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• pp.67-72
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• 2007

High Pressure Micro Jet (HPMJ) pad conditioning system was investigated as an alternative to diamond disc conditioning in copper CMP. A series of comparative 50-wafer marathon runs were conducted at constant wafer pressure and sliding velocity using Rohm & Haas IC1000 and Asahi-Kasei EMD Corporation (UNIPAD) concentrically grooved pads under ex-situ diamond conditioning or HPMJ conditioning. SEM images indicated that fibrous surface was restored using UNIPAD pads under both diamond and HPMJ conditioning. With IC1000 pads, asperities on the surface were significantly collapsed. This was believed to be due to differences in pad wear rates for the two conditioning methods. COF and removal rate were stable from wafer to wafer using both diamond and HPMJ conditioning when UNIPAD pads were used. Also, HPMJ conditioning showed higher COF and removal rate when compared to diamond conditioning for UNIPAD. On the other hand, COF and removal rates for IC1000 pads decreased significantly under HPMJ conditioning. Regardless of pad conditioning method adopted and the type of pad used, linear correlation was observed between temperature and COF, and removal rate and COF.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.397-397
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• 2016

Triboelectric nanogenerators (TENG) can produce power from ambient mechanical sources and have strong points of high output performance, light weight, low cost, and easy manufacturing process. It is expected that TENG can be utilized in the fields of wireless electronics and self-powered devices in the world which pays attention to healthcare and the IoT. In this work, we focus on scavenging ambient rotational energy by using a durably designed TENG. In previous studies regarding harvesting rotation mode energy, the devices were based on sliding mechanism and durability was not considered as a major issue. However friction by rotation causes reliability problems due to wear and tear. Therefore, in this study, we convert rotary motion to linear motion utilizing a cam by which we can then utilize contact-mode TENG and improve device reliability. In order to increase output performance, bumper springs were used below the TENG and the optimum value for the bumper spring constant was analyzed theoretically. Furthermore, the inserting a soft substrate was proposed and its effect on high output was determined to be due to an increase in the contact area. By increasing the number of cam noses, the output frequency was shown to increase linearly. For the purpose of maximum power transfer, the input impedance of the device was determined. Finally, to demonstrate the use of the C-TENG as a direct power source, it was installed on a commercial bicycle wheel and connected to 180 LEDs. In conclusion we present a rotational motion TENG energy scavenger system designed for enhanced durability and optimized output by appropriate choice of spring constants and substrate.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.7
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• pp.723-730
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• 2012

During the cold wire-drawing process, the diameter of a wire is reduced and the length of the wire is increased as the wire passes through the die. The pressure and sliding motion at the interface between the wire and die cause elastic recovery of the workpiece and friction and wear on the die. In addition, wire deformation and frictional heating raise the temperature of the wire and die, resulting in difficulty in manufacturing the drawn products according to a designated inner diameter of the die, deviating from the designated dimension or the inner diameter of the die. In this study, considering the die temperature distribution, the effects of dimensional changes of the drawn products were analyzed quantitatively; these changes are caused by the elastic deformation of the die, the elastic recovery of the workpiece, and the thermal deformation of both the die and the workpiece. It was confirmed that the elastic recovery of the workpiece influenced these changes the most. The initial dies considering these factors could avoid deviation from the designated dimension, and the desired drawn products were obtained by using the designed initial drawing dies.

• Tribology and Lubricants
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• v.32 no.3
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• pp.101-105
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• 2016

Trap effect of groove is evaluated in a lubricating system using computational fluid dynamics (CFD) analysis. The simulation is based on the standard k-ε turbulence model and the discrete phase model (DPM) using a commercial CFD code FLUENT. The simulation results are also capable of showing the particle trajectories in flow field. Computational domain is meshed using the GAMBIT pre-processor. The various grooves are applied in order to improve lubrication characteristics such as reduction of friction loss, increase in load carrying capacity, and trapping of the wear particles. Trap effect of groove is investigated with variations in cross-sectional shape and Reynolds number in this research. Various cross-sectional shapes of groove (rectangular, triangle, U shaped, trapezoid, elliptical shapes) are considered to evaluate the trap effect in simplified two-dimensional sliding bearing. The particles are assumed to steel, and defined a single particle injection condition in various positions. The “reflect” boundary condition for discrete phase is applied to the wall boundary, and the “escape” boundary condition to “pressure inlet” and “pressure outlet” conditions. The streamlines are compared with particles trajectories in the groove. From the results of numerical analysis in the study, it is found that the cross-sectional shapes favorable to the creation of vortex and small eddy current are effective in terms of particle trapping effect. Moreover, it is found that the Reynolds number has a strong influence on the pattern of vortex or small eddy current in the groove, and that the pattern of the vortex or small eddy current affects the trap effect of the groove.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.3
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• pp.1253-1258
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• 2014

The tribological properties of TiC, TiN and TiC/TiN coatings on steels prepared by the cathodic-arc (CA) ion plating technique were investigated. Experiments were carried out on a tribo-test machine using a Falex journal V block system. The friction and wear characteristics of the coatings were determined by varying the applied load and sliding speed. The TiC, TiN and TiC/TiN coatings markedly increased the tribological characteristics of the surface. As far as a single layer coating was concerned, TiN goes better results than TiC. However, the TiC/TiN multilayer coating performed better than either single layer coating. The major factor in the improved performance of the multilayer coating was the role of TiC in improving the adhesion between the external TiN layer and the substrate steel.