• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.546-546
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• 2008

Copper (Cu) Chemical mechanical polishing (CMP) has been an essential process for Cu wifing of DRAM and NAND flash memory beyond 45nm. Copper has been employed as ideal material for interconnect and metal line due to the low resistivity and high resistant to electro-migration. Damascene process is currently used in conjunction with CMP in the fabrication of multi-level copper interconnects for advanced logic and memory devices. Cu CMP involves removal of material by the combination of chemical and mechanical action. Chemicals in slurry aid in material removal by modifying the surface film while abrasion between the particles, pad, and the modified film facilitates mechanical removal. In our research, we emphasized on the role of chemical effect of slurry on Cu CMP, especially on the effect of amine functional group on removal rate selectivity between Cu and Tantalum-nitride (TaN) film. We investigated the two different kinds of complexing agent both with amine functional group. On the one hand, Polyacrylamide as a polymer affected the stability of abrasive, viscosity of slurry and the corrosion current of copper film especially at high concentration. At higher concentration, the aggregation of abrasive particles was suppressed by the steric effect of PAM, thus showed higher fraction of small particle distribution. It also showed a fluctuation behavior of the viscosity of slurry at high shear rate due to transformation of polymer chain. Also, because of forming thick passivation layer on the surface of Cu film, the diffusion of oxidant to the Cu surface was inhibited; therefore, the corrosion current with 0.7wt% PAM was smaller than that without PAM. the polishing rate of Cu film slightly increased up to 0.3wt%, then decreased with increasing of PAM concentration. On the contrary, the polishing rate of TaN film was strongly suppressed and saturated with increasing of PAM concentration at 0.3wt%. We also studied the electrostatic interaction between abrasive particle and Cu/TaN film with different PAM concentration. On the other hand, amino-methyl-propanol (AMP) as a single molecule does not affect the stability, rheological and corrosion behavior of the slurry as the polymer PAM. The polishing behavior of TaN film and selectivity with AMP appeared the similar trend to the slurry with PAM. The polishing behavior of Cu film with AMP, however, was quite different with that of PAM. We assume this difference was originated from different compactness of surface passivation layer on the Cu film under the same concentration due to the different molecular weight of PAM and AMP.

• Korean Journal of Environmental Agriculture
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• v.6 no.2
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• pp.46-52
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• 1987

This study of adsorption and column percolation was conducted to examine the utilization of natural zeolite for the removal of heavy metals from waste water to compare with that of absorption activated carbon. The adsorption of heavy metals by natural zeolite was conformed to the Freundlich isotherm (1/n values: $0.12{\sim}0.45$, K values: $18.77{\sim}59.48$) and natural zeolite was turned out to be an effective adsorbent of heavy metals. At the same particle size and percolation velocity, zeolite adsorbed a greater amount of heavy metals was adsorbed on natural zeolite than activated carbon. The smaller the particle size, the more heavy metals that were adsorbed. It was postulated that the most effective size as an adsorbent of heavy metals from waste water ranged from 0.5 to 2.0mm. The slower the percolation velocity that of the heavy metal solution in column, the more heavy metals were adsorbed. Natural zeolite in a single solution adsorbed more heavy metals than that in mixed solution, and the order of the adsorption amount on natural zeolite was Cu>Zn>Cd.

• Resources Recycling
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• v.29 no.3
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• pp.11-23
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• 2020

This study aims to investigate breakage and liberation characteristics of iron ore from Shinyemi mine, Jeongseon by ball mill. Parameters of breakage functions for three grade samples of iron ore were obtained using single-sized-feed breakage test and back-calculation based on nonlinear programming. The results showed that with the increase in the grade of iron ore, the breakage rate factor decrease whereas the particle size sensitivity decreases. This results from retardation of microcrack-propagation by magnetite grain in the ore. Breakage distribution analysis showed that the breakage mechanism appear to be impact fracture dominant with the increase of grade owing to the stress distribution effect by magnetite grain. Degree of liberation (DOL) increased with the increase in grade and decrease in particle size, respectively. Using the breakage function and size-DOL relationship, a model that can predict time-dependent-DOL is established. When scale-up factors from operating condition are available, the model is expected to be capable of predicting size and DOL with time in actual mining process.

• Explosives and Blasting
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• v.24 no.2
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• pp.51-63
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• 2006

The typical blasting method adopted in Pasir Coal Mine is a surface blasting technique with a single free face. It means that there is only one free face, which is usually the ground surface. This kind of blasting method is easy to use but inevitably causes enormous ground vibrations, which, in turn, can affect the stability of the slopes comprising the various boundaries of the open pit mine. In addition, the method also has the problem of lowering the overall blast efficiency compared to other methods such as bench blasting methods or ones with more than two free faces. In this respect, a project was launched to develop a new blasting method that is suitable for both controling the ground vibration and enhancing the blast efficiency. As a part of the project, we investigated the current blasting method of the mine, and have conducted field measurements of the ground vibrations from 12 biasts. This Paper presents the details of the typical blasting pattern and the Propagation characteristics of the ground vibration from the surface blasting in the mine. Especially, various predictive equations for peak Particle velocities that can be used to estimate the ground vibration level in the mine area were derived from the regression analyses using the measured ground vibration data.

• Journal of the Korean Institute of Intelligent Systems
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• v.22 no.6
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• pp.722-728
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• 2012

Urban sewer systems has a limitation of capacity of rainwater storage and problem of occurrence of untreated sewage, so adopting a storage facility for sewer flooding prevention and urban non-point pollution reduction has a big attention. The Korea Ministry of Environment has recently introduced a new concept of "multi-functional storage facility", which is crucial not only in preventive stormwater management but also in dealing with combined sewer overflow and sanitary sewer discharge, and also has been promoting its adoption. However, reserving a space for a single large-scale storage facility might be difficult especially in urban areas. Thus, decentralized construction of small- and midium-sized storage facilities and its operation have been introduced as an alternative way. In this paper, we propose a model predictive control scheme for an optimized operation of distributed storage facilities and sewer networks. To this aim, we first describe the mathematical model of each component of networks system which enables us to analyze its detailed dynamic behavior. Second, overflow locations and volumes will be predicted based on the developed network model with data on the external inflow occurred at specific locations of the network. MPC scheme based on the introduced particle swarm optimization technique then produces the optimized the gate setting for sewer network flow control, which minimizes sewer flooding and maximizes the potential storage capacity. Finally, the operational efficacy of the proposed control scheme is demonstrated by simulation study with virtual rainstorm event.

• Journal of Conservation Science
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• v.34 no.6
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• pp.557-568
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• 2018

The manufacturing techniques were studied by investigating a precise analysis on wall structure, features of materials and the painting layer of the bracket mural paintings at Daeungbojeon Hall in Naesosa temple. The wall frame is a single-branch structure, and The mural paintings are composed of 3 layers which are a support layer, a finishing layer and a painting layer. The support layer and the finishing layer are an earth wall that sand and clay such as Quartz, Feldspar, and etc. are mixed. The support and the finishing layers have a combination of medium particle sand and smaller than fine particle sand in the approximate ratios of 0.8:9.2 and 6:4, respectively. Therefore, the aforementioned ratio of sand with medium or large particles is relatively higher in the finishing layer than the support layer. As a result of a precise analysis on the painting layer, it has a relatively thick ground layer for painting which is maximum $456.15{\mu}m$ by using Celadonite or Glauconite and the paintings were colored by using pigments such as Atacamite, Kaolinite or Halloysite, Oxidized steel, and etc. on it. The manufacturing style and the painting techniques of an earth wall are included in the category of the Joseon Dynasty style that have been studied up to now, but the facts that the finishing layer has a high content of sand and a middle layer and chopped straw have not been identified. These are remarkable points in terms of structure and materials, and can be crucial in the evaluation of the state of conservation of mural paintings or preparation of a conservation plan.

• Journal of Korean Society on Water Environment
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• v.35 no.1
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• pp.64-71
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• 2019

In recent years, carbon dioxide ($CO_2$) bubbles emerged as the most widely applied material with the recycling of sequestrated storage to decrease global warming. Flotation using $CO_2$ as an alternative to air could be effective in overcoming the high power consumption in the dissolved air flotation (DAF) process. The comparison of DAF and DCF system indicated that, the carbon dioxide flotation (DCF) system with pressurized $CO_2$ only requires 1.5 ~ 2.0 atm, while the DAF system requires 3.0 ~ 6.0 atm. In a bid to understand the characteristics of particle separation, the single collector collision (SCC) model was used and a series of simulations were conducted to compare the differences of collision and flotation between $CO_2$ bubbles and air bubbles. In addition, laboratory experiments were sequentially done to verify the simulation results of the SCC model. Based on the simulation results, surfactant injection, which is known to decrease bubble size, cloud improved the collision efficiency of $CO_2$ bubbles similar to that of air bubbles. Furthermore, the results of the flotation experiments showed similar results with the simulation of the SCC model under anionic surfactant injection. The findings led us to conclude that $CO_2$ bubbles can be an alternative to air bubbles and a promising material as a collector to separate particles in the water and wastewater.

• Clean Technology
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• v.16 no.2
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• pp.124-131
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• 2010

Effects of $Ca(OH)_2$ concentration (0.16~0.64 wt%), surfactant concentration (2~16 wt%), total volumetric flow rate (3~6 L/min) and $CO_2$ volume fraction $(0.3{\sim}0.6)$ on morphology, crystal structure, mean particle diameter, aggregation and specific surface area of the precipitated $CaCO_3$ were investigated in the slurry bubble column reactor. Experiments were carried out in acrylic reactor ($0.11\;m-ID{\times}1.0\;m-high$) with a internal tube ($0.04\;m-ID{\times}1.0\;m-high$h). The reaction time of $CaCO_3$ synthesis decreased with adding Dispex N40 of the anionic surfactant. The reaction rate of $Ca(OH)_2$ increased with increasing the volumetric flow rate of $CO_2$. From SEM images, the single crystal of $CaCO_3$ increased with increasing the reaction rate in the saturated concentration of $Ca(OH)_2$ (0.16 wt %) and the concentration of Dispex N40 (2 wt%). The mean particle size of $CaCO_3$ varied with adding Dispex N40. In addition, the specific surface area of $CaCO_3$ increased with adding of surfactant (2 wt%) from $35m^2/g$ to $44m^2/g$ at the volumetric flow rate of $CO_2$ (0.9 L/min) and the concentration of $Ca(OH)_2$(0.64 wt %).

• Particle and aerosol research
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• v.19 no.3
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• pp.53-62
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• 2023

This study compared the collection efficiency of a two-stage electrostatic precipitator (ESP) with a lightweight PET film-coated carbon electrode collector plate, depending on the relative humidity of the exhaust gas and the applied voltage to the pre-charger. It was confirmed that the onset voltage at which corona discharge occurs decreases and the discharge current decreases at the same voltage as the relative humidity increases. On the other hand, even though there was almost no change in the diameter of the particles generated depending on the relative humidity, the efficiency was higher at the same voltage as the relative humidity increased. In addition, by applying a two-stage ESP structure, the collection efficiency was higher than that of a single-stage electrostatic precipitator under the same conditions. The ESP using the carbon electrode coated with PET film used in this study is expected to be effective in various aspects such as weight and in the current situation where environmental regulations are rapidly tightening.

• Land and Housing Review
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• v.15 no.1
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• pp.147-156
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• 2024

This study aims to reduce CO₂ generated during the manufacturing process by using limestone (CaCO₃), a carbonate mineral used in the production of cement clinker, as a decarbonated raw material that does not contain CO₂. Among various industrial by-products, we attempted to use cement paste attached to waste concrete. In general, limestone for cement must have a CaCO₃ content of at least 80% (CaO, 44% or more) to ensure the quality of cement clinker. However, the CaO content of waste concrete fine powder is about 20% on average, so in order to use it as a cement clinker raw material, the CaO content must be increased to more than 35%. Therefore, by using the difference in hardness of the mineral composition of waste concrete fine powder to selectively crush CaO type minerals with relatively low hardness, classify and sieve, the CaO content can be increased by more than 35%. Accordingly, in this study, we experimentally and statistically reviewed and analyzed the optimal conditions for efficiently separating CaO and SiO₂ and other components by selectively pulverizing minerals containing relatively low CaO through a grinding process. As a result of the optimal grinding conditions experiment, it was found that the optimal conditions were a grinding time of less than 5 minutes, a type of material to be crushed of 30 mm, and an amount of material to be crushed of 1.0 or more. However, it is judged that it is necessary to review pulverized materials of mixed particle sizes rather than pulverized products of single particle size.